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    • 43. 发明授权
    • Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device
    • 用于形成多孔膜的组合物,多孔膜及其形成方法,层间绝缘膜和半导体器件
    • US07341775B2
    • 2008-03-11
    • US10706861
    • 2003-11-12
    • Yoshitaka HamadaFujio YagihashiHideo NakagawaMasaru Sasago
    • Yoshitaka HamadaFujio YagihashiHideo NakagawaMasaru Sasago
    • H01L23/48
    • H01L21/02126C08K5/19C09D183/02C09D183/04H01L21/02203H01L21/02216H01L21/02282H01L21/31695Y10T428/249953Y10T428/31649Y10T428/31663
    • Provided are a composition for forming film which can form a porous film excelling in dielectric constant, adhesiveness, uniformity of the film, mechanical strength and having low hygroscopicity; a porous film and a method for forming the film; and a high-performing and highly reliable semiconductor device comprising the porous film inside. More specifically, provided is a composition for forming porous film, comprising a surfactant and a solution comprising polymer obtainable by hydrolyzing and condensing, in the presence of the surfactant, one or more of alkoxysilane represented by Formula (1) and one or more of alkoxysilane represented by Formula (2): (R1)mSi(OR2)4-m  (1) R3Si(R4)n(OR5)3-n  (2) Also provided is a method for forming porous film comprising a step of applying said composition on a substrate to form film and a step of transforming the film into porous film.
    • 提供一种可形成介电常数,粘合性,膜均匀性,机械强度和吸湿性低的多孔膜的成膜用组合物。 多孔膜和形成膜的方法; 以及内部具有多孔膜的高性能,高可靠性的半导体装置。 更具体地,提供了一种用于形成多孔膜的组合物,其包含表面活性剂和包含可通过在表面活性剂存在下水解和缩合获得的聚合物的溶液,所述聚合物可由一种或多种由式(1)表示的烷氧基硅烷和一种或多种烷氧基硅烷 由式(2)表示:<?in-line-formula description =“In-line Formulas”end =“lead”?>(R&lt; 1&gt;)&lt; (1)<?in-line-formula description =“In-line Formulas”end =“tail”?> <?in-line -formulae description =“In-line Formulas”end =“lead”?> R <3> Si(R 4) 3-n(2)<?in-line-formula description =“In-line Formulas”end =“tail”?>还提供了形成多孔的方法 薄膜,其包括在基材上涂布所述组合物以形成薄膜的步骤和将薄膜转变成多孔薄膜的步骤。
    • 45. 发明授权
    • SIP telephone set, and file transfer system, file transfer method and file transfer program thereof
    • SIP电话机,文件传输系统,文件传输方法和文件传输程序
    • US08537808B2
    • 2013-09-17
    • US12871015
    • 2010-08-30
    • Yoshitaka Hamada
    • Yoshitaka Hamada
    • H04L12/66
    • H04L12/66
    • Provided is service for transmitting and receiving a file between a calling device and a call receiving device without depending on a capacity of a proxy server.An SIP telephone set (calling device 11) which makes a call through a proxy server 13 to establish a session for a voice path with a call receiving device 12 conformed to SIP, comprising a request issuing unit 111 which requests the call receiving device 12 to establish a session for a data path by the pressing of a specific extension at the time of establishment of a session for a voice path, a session establishing unit 112 which obtains an access authentication result by the pressing of the specific extension to establish a session for a data path with the call receiving device 12, and a file obtaining unit 113 which obtains a file managed by the call receiving device 12 from the call receiving device 12 independently of the proxy server 13 after a session for a data path is established.
    • 提供了用于在主叫设备和呼叫接收设备之间发送和接收文件而不依赖于代理服务器的容量的服务。 通过代理服务器13进行呼叫以建立符合SIP的呼叫接收设备12的语音路由会话的SIP电话机(呼叫设备11),包括请求发送单元111,其请求呼叫接收设备12 在建立用于语音路径的会话时通过按压特定分机来建立用于数据路径的会话;会话建立单元112,其通过按压特定分机来获得访问认证结果,以建立会话 与呼叫接收装置12的数据路径,以及文件获取单元113,其在建立了数据路径的会话之后,独立于代理服务器13从呼叫接收装置12获取由呼叫接收装置12管理的文件。
    • 50. 发明授权
    • Sacrificial film-forming composition, patterning process, sacrificial film and removal method
    • 牺牲成膜组合物,图案化工艺,牺牲膜和去除方法
    • US07485690B2
    • 2009-02-03
    • US11148380
    • 2005-06-09
    • Yoshitaka HamadaTsutomu OgiharaMotoaki IwabuchiTakeshi AsanoTakafumi UedaDirk Pfeiffer
    • Yoshitaka HamadaTsutomu OgiharaMotoaki IwabuchiTakeshi AsanoTakafumi UedaDirk Pfeiffer
    • C08G77/08
    • G03F7/094G03F7/0752H01L21/31116H01L21/31144H01L21/76808
    • A sacrificial film-forming composition is provided comprising (A) a silicone resin which is a co-hydrolytic condensate of hydrolyzable silanes having formulae (1) and (2): X—Y—SiZ3  (1) RnSiZ4-n  (2) wherein Z is a hydrolyzable group, X is a crosslinkable organofunctional group such as an unsubstituted hydroxyl group or a substituted or unsubstituted epoxy, acyloxy or acryloxy group, Y is a single bond or a divalent hydrocarbon group, R is hydrogen or a monovalent hydrocarbon group, and n is an integer of 0 to 3, the silicone resin being capable of crosslinking reaction by the crosslinkable organofunctional group in formula (1), (B) a crosslinking agent, (C) an acid generator, and (D) an organic solvent. The composition has improved storage stability, filling properties, adhesion and coating uniformity sufficient to form a sacrificial film which is effectively dissolvable in a stripping solution.
    • 提供牺牲性成膜组合物,其包含(A)作为具有式(1)和(2)的可水解硅烷的共水解缩合物的硅氧烷树脂:<?在线配方说明=“在线配方” end =“lead”?> XY-SiZ3(1)<?in-line-formula description =“In-line Formulas”end =“tail”?> <?in-line-formula description =“In-line formula end =“lead”?> RnSiZ4-n(2)<?in-line-formula description =“In-line Formulas”end =“tail”?>其中Z是可水解基团,X是可交联的有机官能团,例如 未取代的羟基或取代或未取代的环氧基,酰氧基或丙烯酰氧基,Y为单键或二价烃基,R为氢或一价烃基,n为0〜3的整数,有机硅树脂为 能够通过式(1)中的交联性有机官能团交联反应,(B)交联剂,(C)酸产生剂和(D)有机溶剂进行交联反应。 该组合物具有提高的储存稳定性,填充性能,粘附性和涂层均匀性,足以形成有效地溶解在剥离溶液中的牺牲膜。