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    • 42. 发明申请
    • Perpendicular magnetic write pole formation using an aluminum oxide wrap around mask
    • 使用氧化铝缠绕掩模的垂直磁性写入磁极形成
    • US20080072417A1
    • 2008-03-27
    • US11525788
    • 2006-09-21
    • Yimin HsuVladimir NikitinAron Pentek
    • Yimin HsuVladimir NikitinAron Pentek
    • G11B5/127
    • G11B5/1278G11B5/3146G11B5/315G11B5/3163Y10T29/49041Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.
    • 一种用于制造用于垂直磁写头的写极的方法。 该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。 然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。 然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层(硬掩模层)的水平设置的部分,从而在掩模结构的侧面形成垂直的硬掩模壁。 然后使用离子磨机形成写柱,校准侧壁为形成良好定义的写极边缘提供了优​​异的掩模。 然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。 使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此,在形成写入极之后,可以进行相对温和的清洁,例如TMAH蚀刻和NMP可以 用于从写入极上去除剩余的掩模和氧化铝壁。