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    • 41. 发明授权
    • Substrate processing method
    • 基板加工方法
    • US07476554B2
    • 2009-01-13
    • US11389117
    • 2006-03-27
    • Toshio KanekoToru Nishiwaki
    • Toshio KanekoToru Nishiwaki
    • H01L21/66
    • H01L21/02057H01L21/26513H01L21/67213
    • A substrate processing method of the present invention includes the steps of placing a substrate inside a vacuum container containing particles and processing the substrate inside the container while moving the substrate at a predetermined relative velocity of the substrate to the container. In this case, an allowable upper limit of the number or density of defects produced at the substrate due to the particles in the process for the substrate is determined, and the predetermined relative velocity is set at a value equal to or smaller than the relative velocity obtained when the number or density of defects reaches the upper limit.
    • 本发明的基板处理方法包括以下步骤:将基板放置在含有颗粒的真空容器内并且在基板以预定的相对速度移动到容器的同时将基板处理在容器内部。 在这种情况下,确定由于基板的处理中的颗粒而在基板上产生的缺陷的数量或密度的允许上限,并且将预定的相对速度设定为等于或小于相对速度 当缺陷的数量或密度达到上限时获得。
    • 50. 发明授权
    • Method and apparatus for manufacturing curved pipe
    • 弯管制造方法及装置
    • US4989435A
    • 1991-02-05
    • US449581
    • 1989-12-11
    • Toshio Kaneko
    • Toshio Kaneko
    • B21D7/08B21D9/12
    • B21D9/12
    • A curved pipe manufacturing method comprises the steps of providing a fixed die having a curved cavity, an entrance opening and an exit opening contained therein, the curved cavity being formed in a circular arc and extending from the entrance opening to the exit opening, providing a movable block having a curved mandrel attached to one side thereof and an ejecting rod on the side thereof opposite to the curved mandrel, inserting the curved mandrel into the curved cavity of the fixed die through the exit opening therein and forming a curved annular chamber inside the cavity, pressing a work with a presser rod through the entrance opening into the curved annular chamber to form a curved pipe, providing a stopper through hole adjacent to the exit opening of the fixed die so that the through hole of the stopper is positioned in a turning track of the mandrel and restrains the tip end of the curved pipe, moving the movable block so as to remove only the mandrel from the exit opening while the curved pipe is restrained from movement by the stopper, inserting the ejecting rod into the entrance opening so as to extract the curved pipe from the exit opening of the fixed die, and recovering the curved pipe. An apparatus for carrying out the curved pipe manufacturing method is provided.