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    • 41. 发明申请
    • Torque converter and system using the same
    • 转矩转换器和系统使用相同
    • US20050258692A1
    • 2005-11-24
    • US11171336
    • 2005-07-01
    • Richard Wise
    • Richard Wise
    • B60K17/12H02K7/02H02K49/10H02K7/06H02K49/00
    • H02K53/00B60K17/12H02K7/025H02K49/102Y02E60/16Y02T10/6204Y10T464/30
    • A torque converter device comprises a flywheel rotatable about a first axis, the flywheel including a first body portion having a first radius from a circumferential surface and a first radius of curvature, a first plurality of magnets mounted in the first body portion, each having first ends disposed from the circumferential surface of the first body portion, and each of the first ends of first plurality of magnets having a second radius of curvature similar to the first radius of curvature of the first body portion, a second plurality of magnets mounted in the first body portion, each of the second plurality of magnets being disposed from the circumferential surface of the first body portion, and a generator disk rotatable about a second axis angularly offset with respect to the first axis, the generator disk including a second body portion, and a third plurality of magnets within the second body portion for magnetically coupling to the first and second pluralities of magnets.
    • 变矩器装置包括可围绕第一轴线旋转的飞轮,飞轮包括第一主体部分,第一主体部分具有从圆周表面的第一半径和第一曲率半径,安装在第一主体部分中的第一多个磁体,每个具有第一主体部分 从第一主体部分的圆周表面设置的端部,并且第一多个磁体的每个第一端部具有与第一主体部分的第一曲率半径相似的第二曲率半径,安装在第一主体部分中的第二多个磁体 第一主体部分,第二多个磁体中的每一个从第一主体部分的圆周表面设置;以及发电机盘,可围绕第二轴线旋转,第二轴线相对于第一轴线成角度偏移,发电机盘片包括第二主体部分, 以及第二主体部分内的第三多个磁体,用于磁耦合到第一和第二多个磁体。
    • 43. 发明申请
    • SELF-LIMITED METAL RECESS FOR DEEP TRENCH METAL FILL
    • 自有金属浸渍深层金属镀膜
    • US20050070064A1
    • 2005-03-31
    • US10605362
    • 2003-09-25
    • Nikki EdlemanRichard Wise
    • Nikki EdlemanRichard Wise
    • H01L21/285H01L21/3213H01L21/8242H01L21/8234
    • H01L27/10861H01L21/28568H01L21/32136
    • Disclosed is a method of manufacturing a deep trench capacitor structure that forms a trench in a substrate, lines the trench with a polysilicon liner, and forms titanium nitride columns along the polysilicon liner. The method etches the titanium nitride columns using chlorine-based dry chemistry that is substantially isotropic. This etching process removes the upper portion of the titanium nitride columns without affecting the polysilicon liner. The etching process attacks only in the uppermost portion of the titanium nitride columns such that, after the etching process is completed, the remaining lower portions of the titanium nitride columns are substantially unaffected by the etching process. Then, the method fills the space between the titanium nitride columns and the upper portion of the trench with additional polysilicon material. The process of filling the space simultaneously forms a polysilicon plug and polysilicon cap.
    • 公开了一种制造深沟槽电容器结构的方法,其在衬底中形成沟槽,用多晶硅衬垫对沟槽进行排列,并沿着多晶硅衬垫形成氮化钛柱。 该方法使用基本上各向同性的氯基干化学法蚀刻氮化钛柱。 该蚀刻工艺除去氮化钛柱的上部,而不影响多晶硅衬垫。 蚀刻过程仅在氮化钛柱的最上部进行攻击,使得在蚀刻工艺完成之后,氮化钛柱的其余下部基本上不受蚀刻工艺的影响。 然后,该方法用附加的多晶硅材料填充氮化钛柱和沟槽的上部之间的空间。 同时填充空间的过程形成多晶硅插塞和多晶硅盖。
    • 44. 发明授权
    • Method for simultaneously forming features of different depths in a semiconductor substrate
    • 同时形成半导体衬底中不同深度的特征的方法
    • US08901005B2
    • 2014-12-02
    • US13865223
    • 2013-04-18
    • Habib HichriXi LiRichard Wise
    • Habib HichriXi LiRichard Wise
    • H01L21/311H01L21/84H01L21/3065H01L21/762H01L27/108H01L29/66
    • H01L21/3065H01L21/76229H01L21/84H01L27/1087H01L29/66181
    • Embodiments of the invention may include first providing a stack of layers including a semiconductor substrate, a buried oxide layer on the semiconductor substrate, a semiconductor-on-insulator layer on the buried-oxide layer, a nitride layer on the semiconductor-on-insulator layer, and a silicon oxide layer on the nitride layer. A first opening and second opening with a smaller cross-sectional area than the first opening are then formed in the silicon oxide layer, the nitride layer, the semiconductor-on-insulator layer, and the buried-oxide layer. The first opening and the second opening are then etched with a first etching gas. The first opening and the second opening are then etched with a second etching gas, which includes the first etching gas and a halogenated silicon compound, for example, silicon tetrafluoride or silicon tetrachloride. In one embodiment, the first etching gas includes hydrogen bromide, nitrogen trifluoride, and oxygen.
    • 本发明的实施例可以包括首先提供包括半导体衬底,半导体衬底上的掩埋氧化物层,掩埋氧化物层上的绝缘体上半导体层,绝缘体上半导体上的氮化物层 层和氮化物层上的氧化硅层。 然后在氧化硅层,氮化物层,绝缘体上半导体层和掩埋氧化物层上形成具有比第一开口更小的横截面面积的第一开口和第二开口。 然后用第一蚀刻气体蚀刻第一开口和第二开口。 然后用第二蚀刻气体蚀刻第一开口和第二开口,第二蚀刻气体包括第一蚀刻气体和卤化硅化合物,例如四氟化硅或四氯化硅。 在一个实施方案中,第一蚀刻气体包括溴化氢,三氟化氮和氧。
    • 48. 发明申请
    • METHOD AND STRUCTURE FOR FORMING TRENCH DRAM WITH ASYMMETRIC STRAP
    • 用不对称带形成TRENCH DRAM的方法和结构
    • US20090184392A1
    • 2009-07-23
    • US12017154
    • 2008-01-21
    • Kangguo ChengXi LiRichard Wise
    • Kangguo ChengXi LiRichard Wise
    • H01L21/8239H01L29/92G06F17/50
    • H01L21/26586H01L27/10867H01L29/7833
    • A method of forming a trench device structure having a single-side buried strap is provided. The method includes forming a deep trench in a semiconductor substrate, said deep trench having a first side portion and a second side portion; depositing a node dielectric on said deep trench, wherein said node dielectric covers said first side portion and said second side portion; depositing a first conductive layer over said node dielectric; performing an ion implantation or ion bombardment at an angle into a portion of said node dielectric, thereby removing said portion of said node dielectric from said first side portion of said deep trench; and depositing a second conductive layer over said first conductive layer, wherein said second conductive layer outdiffuses into a portion of said semiconductor substrate. A trench device structure having a single-side buried strap is also provided. The device structure includes a semiconductor substrate having a deep trench therein; and a first conductive layer and a second conductive layer sequentially disposed on said deep trench, wherein said second conductive layer outdiffuses into a portion of said semiconductor substrate.
    • 提供了一种形成具有单面埋入带的沟槽器件结构的方法。 该方法包括在半导体衬底中形成深沟槽,所述深沟槽具有第一侧部分和第二侧部分; 在所述深沟槽上沉积节点电介质,其中所述节点电介质覆盖所述第一侧部分和所述第二侧部分; 在所述节点电介质上沉积第一导电层; 以一定角度进行离子注入或离子轰击到所述节点电介质的一部分中,从而从所述深沟槽的所述第一侧部分移除所述节点电介质的所述部分; 以及在所述第一导电层上沉积第二导电层,其中所述第二导电层超出所述半导体衬底的一部分。 还提供了具有单面埋置带的沟槽器件结构。 该器件结构包括其中具有深沟槽的半导体衬底; 以及顺序地设置在所述深沟槽上的第一导电层和第二导电层,其中所述第二导电层向外延伸到所述半导体衬底的一部分中。
    • 50. 发明申请
    • Torque converter and system using the same
    • 转矩转换器和系统使用相同
    • US20070145844A1
    • 2007-06-28
    • US11711099
    • 2007-02-27
    • Richard Wise
    • Richard Wise
    • H02K37/00H02K7/02H02K49/00
    • H02K53/00B60K17/12H02K7/025H02K49/102Y02E60/16Y02T10/6204Y10T464/30
    • A torque converter device includes a first body having a first radius and a first thickness, a first plurality of magnets mounted in the first body, the first plurality of magnets including a plurality of magnet pairs, each of the magnet pairs being axially disposed along a centerline of the first body along the first radius through the first thickness, a second plurality of magnets mounted in the first body, each of the second plurality of magnets being disposed between each of the plurality of magnet pairs, and a second body having a third plurality of magnets within the second body for magnetically coupling to each of the magnet pairs and the second plurality of magnets, wherein rotation of the first body induces rotation of the second body.
    • 变矩器装置包括具有第一半径和第一厚度的第一主体,安装在第一主体中的第一多个磁体,第一多个磁体包括多个磁体对,每个磁体对沿着 所述第一主体沿着所述第一半径穿过所述第一厚度的中心线,安装在所述第一主体中的第二多个磁体,所述第二多个磁体中的每一个设置在所述多个磁体对中的每一个之间,以及第二主体, 第二主体内的多个磁体用于磁耦合到每个磁体对和第二多个磁体,其中第一主体的旋转引起第二主体的旋转。