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    • 43. 发明授权
    • Heat treatment apparatus
    • 热处理设备
    • US07311520B2
    • 2007-12-25
    • US10528704
    • 2003-08-29
    • Takanori SaitoKenichi YamagaKen Nakao
    • Takanori SaitoKenichi YamagaKen Nakao
    • F27D11/00
    • H01L21/67109
    • The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a reaction tube consisting of a single tube contained in the heating-furnace body; a gas-discharging-unit connecting portion formed at an upper portion of the reaction tube, the gas-discharging-unit connecting portion having a narrow diameter; a substrate-to-be-processed supporting member for supporting a substrate to be processed, contained in the heating-furnace body; and a heating unit for heating the substrate to be processed supported by the substrate-to-be-processed supporting member. The heating unit has: a first heating portion arranged around the reaction tube, a second heating portion arranged around the gas-discharging-unit connecting portion, a third heating portion arranged around an upper portion of the reaction tube, a fourth heating portion arranged around a lower portion of the reaction tube, and a fifth heating portion arranged under the substrate-to-be-processed supporting member.
    • 本发明是一种热处理单元,包括:上端具有开口的加热炉体; 由包含在加热炉体内的单个管构成的反应管; 气体排出单元连接部,形成在反应管的上部,气体排出单元连接部具有窄直径; 用于支撑加热炉体内所包含的待处理基板的待处理基板的支撑部件; 以及加热单元,用于加热由要处理的基板支撑构件支撑的待处理基板。 所述加热单元具有:设置在所述反应管周围的第一加热部,配置在所述排气单元连接部周围的第二加热部,配置在所述反应管的上部的第三加热部, 反应管的下部,以及配置在被处理基板的支撑部件的下方的第五加热部。
    • 46. 发明授权
    • Heat treatment system
    • 热处理系统
    • US07102104B2
    • 2006-09-05
    • US10505863
    • 2002-11-25
    • Takanori SaitoKenichi YamagaKen Nakao
    • Takanori SaitoKenichi YamagaKen Nakao
    • F27B5/14
    • H01L21/67109
    • The present invention is a thermal processing unit that includes: a tubular processing container; an object-to-be-processed holding unit that holds a plurality of objects to be processed in a tier-like manner and that can be inserted into and taken out from the processing container; a process-gas introducing unit that introduces a predetermined process gas into the processing container; a heating unit provided in the processing container, the heating unit heating the plurality of objects to be processed held by the object-to-be-processed holding unit when the object-to-be-processed holding unit is inserted into the processing container; and a container cooling unit that cools an outside wall surface of the processing container.
    • 本发明是一种热处理单元,其包括:管状处理容器; 待处理的待处理的保持单元,其以层状的方式保持待处理的多个对象,并且可以被插入到处理容器中并从处理容器中取出; 将预定的处理气体引入到处理容器内的处理气体导入部; 设置在处理容器中的加热单元,当待处理保持单元插入处理容器中时,加热单元将待处理保持单元保持的多个待处理对象加热; 以及冷却处理容器的外壁表面的容器冷却单元。
    • 48. 发明申请
    • Heat treatment system
    • 热处理系统
    • US20050121432A1
    • 2005-06-09
    • US10505863
    • 2002-11-25
    • Takanori SaitoKenichi YamagaKen Nakao
    • Takanori SaitoKenichi YamagaKen Nakao
    • H01L21/28H01L21/00H01L21/02H01L21/205H01L21/324F27B5/14F27D11/00
    • H01L21/67109
    • The present invention is a thermal processing unit that includes: a tubular processing container; an object-to-be-processed holding unit that holds a plurality of objects to be processed in a tier-like manner and that can be inserted into and taken out from the processing container; a process-gas introducing unit that introduces a predetermined process gas into the processing container; a heating unit provided in the processing container, the heating unit heating the plurality of objects to be processed held by the object-to-be-processed holding unit when the object-to-be-processed holding unit is inserted into the processing container; and a container cooling unit that cools an outside wall surface of the processing container.
    • 本发明是一种热处理单元,其包括:管状处理容器; 待处理的待处理的保持单元,其以层状的方式保持待处理的多个对象,并且可以被插入到处理容器中并从处理容器中取出; 将预定的处理气体引入到处理容器内的处理气体导入部; 设置在处理容器中的加热单元,当待处理保持单元插入处理容器中时,加热单元将待处理保持单元保持的多个待处理对象加热; 以及冷却处理容器的外壁表面的容器冷却单元。