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41. 发明申请

US20060134829A1 Wafer scale integration of electroplate 3D structures using successive lithography, electroplated sacrifical layers, and flip-chip bonding 有权
标题翻译：使用连续光刻，电镀牺牲层和倒装芯片接合的电镀三维结构的晶圆级整合
公开(公告)号：US20060134829A1
公开(公告)日：2006-06-22
申请号：US11012597
申请日：2004-12-16
申请人： Michel Rosa , Eric Peeters
发明人： Michel Rosa , Eric Peeters
IPC分类号： H01L21/48 , H01L21/50
CPC分类号： B41J2/161 , B41J2/1625 , B41J2/1628 , B41J2/164
摘要： Wafer scale fabrication of three dimentional substantially enclosed structures on a MEMS/IC die use a combination of electrodeposition of structural and sacrificial layers and flip-chip alignment and bonding technology. A first wafer contains a die with MEMS and/or IC structures. On this MEMS/IC processed die, a first three dimensional structural component is formed using standard lithographic processes and electrodeposition of a structural layer. A second sacrificial wafer is separately processed using similar lithographic and electrodeposition processes to form a corresponding second three dimensional structural component. The wafers are placed in a flip-chip bonder and aligned. Once aligned, the structural components are bonded together. The bonded wafers are then removed from the bonder and the second sacrificial wafer substrate removed. The resultant die includes a three dimensional structural component with a substantially enclosed cavity as well as MEMS and IC elements.
摘要翻译：在MEMS / IC芯片上的三维基本封闭结构的晶片尺寸制造使用结合和牺牲层的电沉积和倒装芯片对准和结合技术的组合。第一晶片包含具有MEMS和/或IC结构的管芯。在该MEMS / IC处理的模具上，使用标准光刻工艺和结构层的电沉积形成第一三维结构部件。使用类似的光刻和电沉积工艺分别处理第二牺牲晶片以形成对应的第二三维结构部件。将晶片放置在倒装芯片接合器中并对齐。一旦对准，结构部件结合在一起。然后将粘合的晶片从粘合剂上除去，并且去除第二牺牲晶片衬底。所得模具包括具有基本上封闭的空腔以及MEMS和IC元件的三维结构部件。

42. 发明申请

US20060134561A1 Electroplated three dimensional ink jet manifold and nozzle structures using successive lithography and electroplated sacrificial layers 失效
标题翻译：使用连续光刻和电镀牺牲层的电镀三维喷墨歧管和喷嘴结构
公开(公告)号：US20060134561A1
公开(公告)日：2006-06-22
申请号：US11012697
申请日：2004-12-16
申请人： Michel Rosa , Eric Peeters
发明人： Michel Rosa , Eric Peeters
IPC分类号： B41J2/16
CPC分类号： B41J2/16 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643
摘要： Mechanical and/or structural devices are formed using electroplating techniques in conjunction with sacrifical materials that can also be formed using electroplated techniques. This can produce devices that are attached at only selected points to a substrate and/or structures having enclosed cavities on or above a working substrate. A particularly relevant use of such structure forming techniques is in the fabrication of an ink jet manifold and nozzle structure for use in an ink jet print head, particularly a MEMS-based ink jet print head.
摘要翻译：使用电镀技术结合使用电镀技术形成的牺牲材料形成机械和/或结构装置。这可以产生仅在选定的点附接到衬底和/或在工作衬底上或上方具有封闭空腔的结构的器件。这种结构形成技术的特别相关的用途是制造用于喷墨打印头，特别是基于MEMS的喷墨打印头的喷墨歧管和喷嘴结构。

43. 发明申请

US20060078999A1 Apparatus and method for a nanocalorimeter for detecting chemical reactions 失效
标题翻译：用于检测化学反应的纳米光度计的装置和方法
公开(公告)号：US20060078999A1
公开(公告)日：2006-04-13
申请号：US11149632
申请日：2005-06-10
申请人： Alan Bell , Richard Bruce , Scott Elrod , Eric Peeters , Francisco Torres
发明人： Alan Bell , Richard Bruce , Scott Elrod , Eric Peeters , Francisco Torres
IPC分类号： G01K17/02
CPC分类号： B82Y15/00 , G01N25/4846 , G01N25/4866 , Y10S977/957 , Y10T436/25 , Y10T436/25625 , Y10T436/2575
摘要： A method for detecting chemical reactions uses a nanocalorimeter having a substrate including thermal isolation capability residing on the substrate, thermal equilibration regions residing within the thermal isolation capability, and thermal measurement capability residing within each of the thermal equilibration regions. The thermal measurement device is connected to detection electronics. The method includes depositing drops of potentially reactive chemical solutions within the thermal equilibration region. These potentially reactive solution drops are merged through the use of drop merging electrodes residing within the thermal isolation region. The thermal change occurring within the merged solution drops is then measured with the detection electronics.
摘要翻译：用于检测化学反应的方法使用具有包含驻留在基底上的热隔离能力的基底，驻留在热隔离能力内的热平衡区域和驻留在每个热平衡区域内的热测量能力的纳米尺度计。热测量设备连接到检测电子设备。该方法包括在热平衡区域内沉积潜在的反应性化学溶液的液滴。这些潜在的反应性溶液滴通过使用位于热隔离区域内的滴合并电极而合并。然后用检测电子元件测量在合并溶液中发生的热变化。

44. 发明授权

US06891240B2 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure 失效
标题翻译：电极设计和定位，用于可移动电极和相关支撑结构的受控运动
公开(公告)号：US06891240B2
公开(公告)日：2005-05-10
申请号：US10136683
申请日：2002-04-30
申请人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
发明人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
IPC分类号： B81B3/00 , G02B26/08 , H01L29/82
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002
摘要： A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
摘要翻译：一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。宽范围的可控运动在光交换应用中尤其重要。

45. 发明授权

US06751865B1 Method of making a print head for use in a ballistic aerosol marking apparatus 有权
标题翻译：制造用于防弹气标记装置的打印头的方法
公开(公告)号：US06751865B1
公开(公告)日：2004-06-22
申请号：US09163799
申请日：1998-09-30
申请人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Meng H. Lean , Armin R. Volkel
发明人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Meng H. Lean , Armin R. Volkel
IPC分类号： B21D5376
CPC分类号： B41J2/14 , B41J2202/02 , Y10T29/49401
摘要： A method of making a print head is disclosed for use in a marking apparatus in which a propellant stream is passed through a channel and directed toward a substrate. Marking material, such as ink, toner, etc., is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. A multiplicity of channels for directing the propellant and marking material allow for high throughput, high resolution marking. Multiple marking materials may be introduced into the channel and mixed therein prior to being made incident on the substrate, or mixed or superimposed on the substrate without re-registration.
摘要翻译：公开了一种制造打印头的方法，用于标记装置，其中推进剂流通过通道并指向基板。诸如油墨，调色剂等的标记材料被可控地引入推进剂流中并且赋予足够的动能从而被入射到基底上。用于引导推进剂和标记材料的多个通道允许高通量，高分辨率标记。可以将多种标记材料引入通道中并在其入射到基板之前混合，或者混合或叠加在基板上而不重新配准。

46. 发明授权

US06504643B1 Structure for an optical switch on a substrate 有权
标题翻译：基板上光开关的结构
公开(公告)号：US06504643B1
公开(公告)日：2003-01-07
申请号：US09675045
申请日：2000-09-28
申请人： Eric Peeters , Michel A. Rosa , David K. Fork
发明人： Eric Peeters , Michel A. Rosa , David K. Fork
IPC分类号： G02B2600
CPC分类号： G02B26/0841 , B81B3/0021 , B81B7/0003 , B81B2201/045 , G02B6/3518 , G02B6/3556 , G02B6/358 , G02B6/3584 , Y10S359/904
摘要： Optical cross-connect involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms attached to a substrate.
摘要翻译：光学交叉连接涉及用于将来自第一光纤的光引导到第二光纤的MEMS倾斜镜的二维阵列的一般概念。二维阵列中的每个MEMS倾斜镜可围绕其x轴和y轴旋转并且被附接到基底的多个悬挂臂悬挂。

47. 发明授权

US06467862B1 Cartridge for use in a ballistic aerosol marking apparatus 有权
标题翻译：用于弹道气溶胶标记设备的墨盒
公开(公告)号：US06467862B1
公开(公告)日：2002-10-22
申请号：US09163765
申请日：1998-09-30
申请人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson
发明人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson
IPC分类号： B41J300
CPC分类号： B41J2/14 , B41J2/01 , B41J2/211 , B41J2202/02
摘要： A cartridge is disclosed for use in a marking apparatus in which a propellant stream is passed through a channel and directed toward a substrate. Marking material, such as ink, toner, etc., is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. A multiplicity of channels for directing the propellant and marking material allow for high throughput, high resolution marking. Multiple marking materials may be introduced into the channel and mixed therein prior to being made incident on the substrate, or mixed or superimposed on the substrate without re-registration. The cartridge may be replacably attached to the marking apparatus, and may contain one or more marking materials, propellant, etc.
摘要翻译：公开了一种用于标记装置的盒，其中推进剂流通过通道并指向衬底。诸如油墨，调色剂等的标记材料被可控地引入推进剂流中并且赋予足够的动能从而被入射到基底上。用于引导推进剂和标记材料的多个通道允许高通量，高分辨率标记。可以将多种标记材料引入通道中并在其入射到基板之前混合，或者混合或叠加在基板上而不重新配准。墨盒可以可替代地附接到打标设备，并且可以包含一种或多种标记材料，推进剂等。

48. 发明授权

US06454384B1 Method for marking with a liquid material using a ballistic aerosol marking apparatus 有权
标题翻译：使用弹道气溶胶标记装置用液体材料标记的方法
公开(公告)号：US06454384B1
公开(公告)日：2002-09-24
申请号：US09163924
申请日：1998-09-30
申请人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Andrew A. Berlin , G. A. Neville Connell
发明人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Andrew A. Berlin , G. A. Neville Connell
IPC分类号： B41J205
CPC分类号： B41J2/14 , B41J2/01 , B41J2/211 , B41J2202/02
摘要： A method of marking is disclosed in which a propellant stream is passed through a channel and directed toward a substrate. Liquid marking material, such as ink, is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. A multiplicity of channels for directing the propellant and marking material allow for high throughput, high resolution marking. Multiple marking materials may be introduced into the channel and mixed therein prior to being made incident on the substrate, or mixed or superimposed on the substrate without registration. One example is a single-pass, full-color printer.
摘要翻译：公开了一种标记方法，其中推进剂流通过通道并指向衬底。诸如油墨的液体标记材料被可控地引入推进剂流中并且赋予足够的动能，从而使其入射到基底上。用于引导推进剂和标记材料的多个通道允许高通量，高分辨率标记。可以将多个标记材料引入通道中并在其入射到基板之前混合，或者混合或叠加在基板上而不进行配准。一个例子是单程全彩色打印机。

49. 发明授权

US06416158B1 Ballistic aerosol marking apparatus with stacked electrode structure 有权
标题翻译：具有堆叠电极结构的弹道气溶胶标记装置
公开(公告)号：US06416158B1
公开(公告)日：2002-07-09
申请号：US09407908
申请日：1999-09-29
申请人： Philip D. Floyd , Tuan Anh Vo , Kaiser H. Wong , Gregory B. Anderson , Eric Peeters , Jaan Noolandi , Meng H. Lean , Armin R. Volkel , John E. Northrup , Jurgen Daniel , G. A. Neville Connell
发明人： Philip D. Floyd , Tuan Anh Vo , Kaiser H. Wong , Gregory B. Anderson , Eric Peeters , Jaan Noolandi , Meng H. Lean , Armin R. Volkel , John E. Northrup , Jurgen Daniel , G. A. Neville Connell
IPC分类号： B41J2035
CPC分类号： B41J2/01 , B41J2/14 , B41J2/211 , B41J2202/02
摘要： A device for the transport and/or metering of marking material includes a plurality of phased electrodes, for example formed on a substrate. An electrostatic traveling wave may be generated along the electrodes to sequentially attract particles of marking material, and thereby transport them to a desired location. The electrodes may be formed in a planar structure. A matrix interconnection scheme allows for reduced lead count.
摘要翻译：用于运输和/或计量标记材料的装置包括多个相控电极，例如形成在基底上。可以沿着电极产生静电行波，以顺序地吸引标记材料的颗粒，从而将它们运送到期望的位置。电极可以形成为平面结构。矩阵互连方案允许减少引线数。

50. 发明授权

US06340216B1 Ballistic aerosol marking apparatus for treating a substrate 有权
标题翻译：用于处理基材的弹道气溶胶标记装置
公开(公告)号：US06340216B1
公开(公告)日：2002-01-22
申请号：US09164250
申请日：1998-09-30
申请人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Karen A. Moffat , T. Brian McAneney , Richard P. N. Veregin , Maria N. V. McDougall , Danielle C. Boils , Paul D. Szabo
发明人： Eric Peeters , Jaan Noolandi , Raj B. Apte , Philip D. Floyd , Jonathan A. Small , Gregory J. Kovacs , Meng H. Lean , Armin R. Volkel , Steven B. Bolte , An-Chang Shi , Frederick J. Endicott , Gregory B. Anderson , Dan A. Hays , Joel A. Kubby , Warren B. Jackson , Karen A. Moffat , T. Brian McAneney , Richard P. N. Veregin , Maria N. V. McDougall , Danielle C. Boils , Paul D. Szabo
IPC分类号： B41J2015
CPC分类号： B41J2/211 , B41J2/01 , B41J2/14 , B41J2/14008 , B41J2202/02
摘要： An apparatus for treating a substrate is disclosed in which a propellant stream is passed through a channel and directed toward a substrate. Substrate pre-marking or post-marking treatment material is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. A multiplicity of channels for directing the propellant and treatment material allow for high throughput, high resolution in-situ treatment. Marking materials and treatment materials may be introduced into the channel and mixed therein prior to being made incident on the substrate, or mixed or superimposed on the substrate without registration. One example is a single-pass, full-color printer.
摘要翻译：公开了一种用于处理基底的装置，其中推进剂流通过通道并指向基底。将基板预标记或后标记处理材料可控地引入推进剂流中并赋予足够的动能，从而使其入射到基底上。用于引导推进剂和处理材料的多个通道允许高产量，高分辨率原位处理。可以将标记材料和处理材料引入通道并在其入射到基板之前混合，或者混合或叠加在基板上而不进行配准。一个例子是单程全彩色打印机。

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