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    • 41. 发明授权
    • Surface-acoustic-wave component adapted to electronic circuit and device, and manufacturing method therefor
    • 适用于电子电路和器件的表面声波元件及其制造方法
    • US06995634B2
    • 2006-02-07
    • US10753237
    • 2004-01-07
    • Setsuya IwashitaTakamitsu HiguchiHiromu Miyazawa
    • Setsuya IwashitaTakamitsu HiguchiHiromu Miyazawa
    • H03H9/64H03B5/36
    • H03H9/0542H03H9/02574H03H9/02984
    • A surface-acoustic-wave component that comprises a first piezoelectric layer composed of zinc oxide (ZnO), a second piezoelectric layer composed of lithium niobate (LiNbO3), and a protective layer, which are sequentially formed on a silicon substrate, on which electrodes (e.g., interdigital transducers) are further formed. Alternatively, it comprises a conductive layer composed of zinc oxide (ZnO), a piezoelectric layer composed of lithium niobate (LiNbO3), and a protective layer, which are sequentially formed on a silicon substrate, on which electrodes are further formed. The piezoelectric layer can actualize preferable orientation so as to improve the electromechanical coupling coefficient (K2). Thus, it is possible to produce surface-acoustic-wave components that contribute to manufacturing of highly-integrated electronic circuits such as frequency filters and oscillators as well as electronic devices such as portable telephones.
    • 一种表面声波分量,包括由氧化锌(ZnO)构成的第一压电层,由铌酸锂(LiNbO 3 N)组成的第二压电层和保护层,所述表面声波分量依次形成 在硅衬底上,在其上进一步形成电极(例如,叉指式换能器)。 或者,其包括由氧化锌(ZnO)构成的导电层,由铌酸锂(LiNbO 3 N)构成的压电层和保护层,其依次形成在硅基板上, 进一步形成电极。 压电层可以实现优选的取向,从而提高机电耦合系数(K 2 O 2)。 因此,可以产生有助于制造诸如频率滤波器和振荡器的高度集成的电子电路以及诸如便携式电话的电子设备的表面声波分量。
    • 48. 发明授权
    • Surface acoustic wave device with KNb03 piezoelectric thin film, frequency filter, oscillator, electronic circuit, and electronic apparatus
    • 具有KNb03压电薄膜,频率滤波器,振荡器,电子电路和电子设备的表面声波器件
    • US06720846B2
    • 2004-04-13
    • US10102181
    • 2002-03-20
    • Setsuya IwashitaTakamitsu HiguchiHiromu Miyazawa
    • Setsuya IwashitaTakamitsu HiguchiHiromu Miyazawa
    • H03H964
    • H03H9/02984H03H9/02574H03H9/0542
    • Surface acoustic wave device having a high k2, and a frequency filter, oscillator, electronic circuit and electronic device employing this surface acoustic wave device is provided, wherein a first oxide thin film layer comprising SrO or MgO and a second oxide thin film layer comprising SrTiO3 are sequentially formed on top of a (110) Si substrate, or a first oxide thin film layer comprising CeO2, ZrO2 or yttrium-stabilized zirconia and a second oxide thin film layer comprising SrTiO3 are sequentially formed on top of a (100) Si substrate, a KNbO3 piezoelectric thin film being then formed on top of either of these second oxide thin film layers, and then, a protective film comprising oxide or nitride is formed on top of the KNbO3 piezoelectric thin film, finally, at least one electrode is formed on top of this protective film, to form a surface acoustic wave device, which surface acoustic wave device is employed to form a frequency filter, oscillator, electronic circuit, or electronic device.
    • 提供具有高k <2的表面声波器件,以及使用该声表面波器件的频率滤波器,振荡器,电子电路和电子器件,其中包括SrO或MgO的第一氧化物薄膜层和第二氧化物薄膜 在(110)Si衬底的顶部依次形成包含SrTiO 3的层,或者包括CeO 2,ZrO 2或钇稳定的氧化锆的第一氧化物薄膜层和包含SrTiO 3的第二氧化物薄膜层依次形成在(100) )Si衬底,然后在这些第二氧化物薄膜层之一上形成KNbO3压电薄膜,然后在KNbO3压电薄膜的顶部形成包含氧化物或氮化物的保护膜,最后至少一个 电极形成在该保护膜的顶部上,形成表面声波装置,该声表面波装置用于形成频率滤波器,振荡器,电子电路或电子 设备。
    • 49. 发明授权
    • Ferroelectric memory having a BaTiO3 recording layer oriented in a <111> direction
    • 具有沿<111>方向取向的BaTiO 3记录层的铁电存储器
    • US06510074B2
    • 2003-01-21
    • US10103681
    • 2002-03-21
    • Hiromu MiyazawaTakamitsu HiguchiSetsuya Iwashita
    • Hiromu MiyazawaTakamitsu HiguchiSetsuya Iwashita
    • G11C1122
    • H01L27/105H01L27/11502
    • A ferroelectric memory element and an electronic apparatus provided with this ferroelectric memory element are provided with a thin film recording layer of less than 50 nm film thickness having a high polarization moment and a high Curie temperature, wherein a recording layer of BaTiO3 is fabricated so as to be oriented in a pseudo-cubic system direction in a trigonal crystal structure, and in order to increase the polarization moment and Curie temperature, the unit cell in BaTiO3 film is elongated more than 2% in the pseudo-cubic system direction compared with the unit cell in a bulk material of BaTiO3, wherein in order to produce lattice strain in the crystal structure of the recording layer, the recording layer is grown epitaxially on the electrode layer that serves as the base layer, the ferroelectric memory element being provided with the recording layer, and the electronic apparatus being provided with the ferroelectric memory element.
    • 具有这种铁电存储元件的铁电存储元件和电子设备设置有具有高极化矩和高居里温度的小于50nm薄膜厚度的薄膜记录层,其中制造BaTiO 3的记录层,以便 为了在三角晶体结构中以拟立方体方向<111>方向取向,为了增加极化力矩和居里温度,BaTiO 3膜中的晶胞在假立方体系中延伸超过2% 111>方向与BaTiO 3的块状材料中的单元电池相比,其中为了在记录层的晶体结构中产生晶格应变,在作为基极层的电极层上外延生长记录层,铁电体 存储元件设置有记录层,并且电子设备设置有铁电存储元件。
    • 50. 发明授权
    • Magneto-optical recording medium having large kerr rotational angle in
short wavelength range
    • 在短波长范围内具有较大克尔旋转角度的磁光记录介质
    • US5843570A
    • 1998-12-01
    • US789393
    • 1997-01-29
    • Hiromu MiyazawaShoji HoshinaSatoshi ShimokawatoMasaaki IchikawaMasaya IshidaTakeo KawaseToshiaki MikoshibaSatoshi NebashiTatsuya Shimoda
    • Hiromu MiyazawaShoji HoshinaSatoshi ShimokawatoMasaaki IchikawaMasaya IshidaTakeo KawaseToshiaki MikoshibaSatoshi NebashiTatsuya Shimoda
    • G11B11/105G11B5/66
    • G11B11/10593G11B11/10582G11B11/10586Y10S428/90Y10T428/26Y10T428/265
    • In a magneto-optical recording medium, a protective layer 14, a first magnetic layer 11 formed of a light rare earth element-heavy rare earth element-transition metal alloy, a second magnetic layer 12 formed of a light rare earth element-heavy rare earth element-transition metal alloy, a third magnetic layer 13 formed of a light rare earth element-heavy rare earth element-transition metal alloy, another protective layer 15, and a reflection layer 16 are laminated in sequence on a transparent substrate 10. The first, second and third magnetic layers are sandwiched so as to form a recording film 17. The compositions of the first and third magnetic layers are so selected as to provide a large Kerr rotational angle in a short wavelength range (400 to 700 nm), which is high in the ratio of light rare earth element. On the other hand, the composition of the second magnetic layer is so selected as to be prominent in the characteristics for forming a perpendicular magnetized film, which is high in the ratio of heavy rare earth element. The recording film 17 formed by sandwiching the first, second and third magnetic layers has a large Kerr rotational angle in a short wavelength range as a whole, and further provides a high coercivity. The recording film 17 is formed thin (400 angstrom or less) so that light can transmit sufficiently therethrough. Further, when the three layers of sandwich structure is combined with the reflection layer 16, a more larger Kerr rotational angle can be obtained.
    • 在磁光记录介质中,由轻稀土元素重稀土元素过渡金属合金形成的保护层14,第一磁性层11,由稀土稀土元素重稀土形成的第二磁性层12 接地元素 - 过渡金属合金,由轻稀土元素 - 重稀土元素 - 过渡金属合金形成的第三磁性层13,另一个保护层15和反射层16依次层叠在透明基板10上。 第一,第二和第三磁性层被夹持以形成记录膜17.第一和第三磁性层的组成被选择为在短波长范围(400-700nm)内提供较大的克尔旋转角, 其中轻稀土元素的比例高。 另一方面,第二磁性层的组成被选择为在用于形成重稀土元素的比率高的垂直磁化膜的特性方面是突出的。 通过夹持第一,第二和第三磁性层而形成的记录膜17整体上在短波长范围内具有较大的克尔旋转角度,并进一步提供高的矫顽力。 记录膜17形成为薄(400埃或更小),使得光可以充分透过。 此外,当三层夹层结构与反射层16组合时,可以获得更大的克尔旋转角。