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    • 41. 发明申请
    • Projection exposure apparatus
    • 投影曝光装置
    • US20080252871A1
    • 2008-10-16
    • US12069415
    • 2008-02-08
    • Jin SatoMasaru YamagaAkira NakazawaKoutatsu KudoYuken Nakamoto
    • Jin SatoMasaru YamagaAkira NakazawaKoutatsu KudoYuken Nakamoto
    • G03B27/70G03B27/72
    • G03B27/72G03F7/70233G03F7/70575
    • The present invention relates to a projection exposure apparatus that forms predetermined patterns onto a substrate. The projection exposure apparatus for forming patterns onto a substrate, which includes a mask-stage for holding a photo-mask having predetermined patterns thereon, a light source for emitting a light ray containing spectral lines including g, h, i and j-lines, a wavelength selector for selecting a light ray containing predetermined spectral lines from the light ray emitted from the light source, an illumination optical system for irradiating the photo-mask with the selected light ray, an Offner type projection system for projecting the light having passed through the photo-mask onto the substrate, a substrate stage including a vacuum portion for holding the substrate, the substrate stage for positioning the substrate, and a light-shielding body for partially blocking the light irradiated to the substrate.
    • 投影曝光装置技术领域本发明涉及在基板上形成预定图案的投影曝光装置。 用于在基板上形成图案的投影曝光装置,其包括用于保持其上具有预定图案的光掩模的掩模台,用于发射包含g,h,i和j行的谱线的光线的光源, 用于从从光源发射的光线中选择包含预定光谱线的光线的波长选择器,用于用所选择的光线照射光掩模的照明光学系统,用于投射已经通过的光的偏移型投影系统 光掩模到基板上,基板载台包括用于保持基板的真空部分,用于定位基板的基板台和用于部分地遮挡照射到基板的光的遮光体。
    • 46. 发明授权
    • Thin film single magnetic head
    • 薄膜单磁头
    • US06292329B1
    • 2001-09-18
    • US09164663
    • 1998-10-01
    • Jin SatoYoshihisa NakamuraHiroaki MuraokaToru Katakura
    • Jin SatoYoshihisa NakamuraHiroaki MuraokaToru Katakura
    • G11B5147
    • G11B5/1278G11B5/31G11B5/313Y10T29/49044
    • A thin-film single magnetic pole head which assures highly efficient magnetic energization of a main magnetic pole and which exhibits optimum recording characteristics even in case of recording on a double-layer perpendicular magnetic recording medium with a high frequency. The thin-film single magnetic pole head includes a main magnetic pole consisting of a soft magnetic thin film and a return yoke. A thin-film coil for energizing the main magnetic pole is constituted by a plurality of conductor layers extending substantially parallel to one another and substantially at right angles to the main magnetic pole. The conductor layers are layered together in the up-and-down direction on both sides of the main magnetic pole. A thin-film coil for magnetically energizing the main magnetic pole is constituted by selectively interconnecting the conductors. In this manner, the thin-film coil can be arranged at the foremost part of the main magnetic pole (towards the perpendicular magnetic recording medium facing surface) to render it possible to energize the foremost part of the main magnetic pole with high efficiency.
    • 一种薄膜单磁极头,其确保主磁极的高效磁通,并且即使在具有高频率的双层垂直磁记录介质上记录的情况下也表现出最佳的记录特性。 薄膜单磁极头包括由软磁性薄膜和返回轭构成的主磁极。 用于激励主磁极的薄膜线圈由基本上彼此平行延伸并与主磁极基本成直角延伸的多个导体层构成。 导体层在主磁极的两侧沿上下方向层叠在一起。 通过选择性地互连导体来构成用于使主磁极励磁的薄膜线圈。 以这种方式,薄膜线圈可以布置在主磁极的最前部(朝向垂直的磁记录介质面对表面),以便能够以高效率激励主磁极的最前部。