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41. 发明申请

US20090154015A1 MAGNETIC WRITE POLE FABRICATION 有权
标题翻译：磁性写字槽制造
公开(公告)号：US20090154015A1
公开(公告)日：2009-06-18
申请号：US11957481
申请日：2007-12-16
申请人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
发明人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.
摘要翻译：描述制造磁性写入极的写入元件和方法。对于一种方法，在写入极的极尖和磁轭的位置的磁性层上形成垂直掩模结构。垂直掩模结构可以通过用原子层沉积（ALD）工艺或类似工艺涂覆抗蚀剂的垂直表面而形成。然后围绕垂直掩模结构执行去除处理以限定磁极尖端和写极的磁轭的一部分，并且去除垂直掩模结构。极尖的下部被掩蔽，而极尖的上部和轭的一部分露出。然后用磁性材料例如电镀工艺使磁极尖端的上部和磁轭的一部分膨胀。

42. 发明申请

US20080113514A1 Methods for the manufacture of notched trailing shields 失效
标题翻译：开槽后挡板的制造方法
公开(公告)号：US20080113514A1
公开(公告)日：2008-05-15
申请号：US11595654
申请日：2006-11-10
申请人： Amanda Baer , Hung-chin Guthrie , Yimin Hsu , Ming Jiang , Aron Pentek
发明人： Amanda Baer , Hung-chin Guthrie , Yimin Hsu , Ming Jiang , Aron Pentek
IPC分类号： H01L21/311
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods for improving within wafer and wafer to wafer yields during fabrication of notched trailing shield structures are disclosed. Ta/Rh CMP stop layers are deposited prior to planarization and notch formation to ensure a planar surface for trailing shield structures. These stop layers may be blanket deposited or patterened prior to CMP. Patterned stop layers produce the highest yields.
摘要翻译：公开了在制造缺口尾部屏蔽结构期间在晶片和晶片之间改善晶片产量的方法。在平坦化和切口形成之前沉积Ta / Rh CMP停止层以确保用于尾部屏蔽结构的平坦表面。这些停止层可以在CMP之前被铺平或沉积。图案化的停止层产生最高的产量。

43. 发明申请

US20050241140A1 High milling resistance write pole fabrication method for perpendicular recording 失效
标题翻译：用于垂直记录的高铣削电阻写极制造方法
公开(公告)号：US20050241140A1
公开(公告)日：2005-11-03
申请号：US10836867
申请日：2004-04-30
申请人： Amanda Baer , Quang Le , Kim Lee , Aron Pentek , Douglas Werner , Sue Zhang
发明人： Amanda Baer , Quang Le , Kim Lee , Aron Pentek , Douglas Werner , Sue Zhang
IPC分类号： G11B5/127 , G11B5/187
CPC分类号： G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10T29/49021 , Y10T29/49043
摘要： A method for constructing a tapered write pole, the method including the use of a bilayer hard mask.
摘要翻译：一种用于构造锥形写入极的方法，该方法包括使用双层硬掩模。

44. 发明授权

US07515381B2 Method for fabricating a side shield for a flux guide layer for perpendicular magnetic recording 失效
标题翻译：用于制造用于垂直磁记录的磁通引导层的侧屏蔽的方法
公开(公告)号：US07515381B2
公开(公告)日：2009-04-07
申请号：US11317917
申请日：2005-12-22
申请人： Amanda Baer , Daniel Wayne Bedell , Quang Le , Aron Pentek
发明人： Amanda Baer , Daniel Wayne Bedell , Quang Le , Aron Pentek
IPC分类号： G11B5/147 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/3163
摘要： A magnetic head for use in a perpendicular recording system having a novel shield structure that provides exceptional magnetic shielding from extraneous magnetic fields such as from a write coil, shaping layer or return pole of the write head. The shield structure is constructed to have a bottom or leading surface that is generally coplanar with the bottom or leading surface of the shaping layer, but all or a portion of the shield structure is not as thick as the shaping layer so as to have a top surface that does not extend to the same elevation (in a trailing direction) as that of the shaping layer. Making the shields extend to a lower level than the shaping layer improves magnetic performance by reducing flux leakage from the write pole, and also provides manufacturing advantages, such as during the manufacturing of the write pole. These manufacturing advantages include the advantage of having the shields covered with a protective layer of, for example, alumina during the ion milling of the write pole.
摘要翻译：一种用于垂直记录系统的磁头，其具有新的屏蔽结构，其提供例如来自写入磁头的写入线圈，成形层或返回磁极的外部磁场的卓越的磁屏蔽。屏蔽结构被构造成具有与成形层的底部或前表面大致共面的底部或前表面，但是屏蔽结构的全部或一部分不像成形层那样厚，以便具有顶部表面不延伸到与成形层相同的高度（在拖尾方向上）。使屏蔽层延伸到比成形层更低的水平，通过减小来自写入极的磁通泄漏来提高磁性能，并且还提供制造优点，例如在写入磁极的制造期间。这些制造优点包括在写入极的离子铣削期间使屏蔽覆盖有例如氧化铝的保护层的优点。

45. 发明申请

US20080072417A1 Perpendicular magnetic write pole formation using an aluminum oxide wrap around mask 失效
标题翻译：使用氧化铝缠绕掩模的垂直磁性写入磁极形成
公开(公告)号：US20080072417A1
公开(公告)日：2008-03-27
申请号：US11525788
申请日：2006-09-21
申请人： Yimin Hsu , Vladimir Nikitin , Aron Pentek
发明人： Yimin Hsu , Vladimir Nikitin , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.
摘要翻译：一种用于制造用于垂直磁写头的写极的方法。该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层（硬掩模层）的水平设置的部分，从而在掩模结构的侧面形成垂直的硬掩模壁。然后使用离子磨机形成写柱，校准侧壁为形成良好定义的写极边缘提供了优异的掩模。然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此，在形成写入极之后，可以进行相对温和的清洁，例如TMAH蚀刻和NMP可以用于从写入极上去除剩余的掩模和氧化铝壁。

46. 发明授权

US07770283B2 Method of fabricating a magnetic head 有权
标题翻译：制造磁头的方法
公开(公告)号：US07770283B2
公开(公告)日：2010-08-10
申请号：US11347356
申请日：2006-02-03
申请人： Daniel Wayne Bedell , Vladimir Nikitin , Aron Pentek , Sue Siyang Zhang
发明人： Daniel Wayne Bedell , Vladimir Nikitin , Aron Pentek , Sue Siyang Zhang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.
摘要翻译：用于切割磁头的写入头元件的P1极的多步骤过程。在制造P2极尖之后的第一步骤中，在P2极尖的大致垂直侧表面上沉积有一层保护材料。此后，进行利用物质如氩的第一离子研磨步骤，通过写入间隙层研磨并陷入其下方的P1极层。然后，从P2极尖端的侧面去除再沉积材料，并且形成在P2极端部的侧表面上的保护材料在再沉积清洁步骤期间保护P2极尖。然后，从P2极端部的侧面除去保护材料，进行第二离子研磨工序，进一步切断P1极材料。

47. 发明申请

US20090195920A1 Main pole bridge structure 审中-公开
标题翻译：主梁桥结构
公开(公告)号：US20090195920A1
公开(公告)日：2009-08-06
申请号：US12012364
申请日：2008-01-31
申请人： Christian R. Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek
发明人： Christian R. Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek
IPC分类号： G11B33/14
CPC分类号： G11B25/043 , G11B33/1493
摘要： A method of reducing flux leakage between a main pole and a wrap around shield (WAS) is provided. A gap underneath a main pole is etched. Magnetic material is deposited in the gap. A layer of nonmagnetic material is deposited on the magnetic material, wherein the layer of nonmagnetic material reduces flux leakage between the main pole and the WAS.
摘要翻译：提供了一种减少主极和围绕护罩（WAS）之间的漏磁的方法。蚀刻主极下方的间隙。磁性材料沉积在间隙中。一层非磁性材料沉积在磁性材料上，其中非磁性材料层减少主极与WAS之间的漏磁。

48. 发明授权

US08259413B2 Write head with self-align layer and a method for making the same 有权
标题翻译：用自对准层写头，并制作相同的方法
公开(公告)号：US08259413B2
公开(公告)日：2012-09-04
申请号：US12347058
申请日：2008-12-31
申请人： Christian René Bonhôte , Quang Le , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek
发明人： Christian René Bonhôte , Quang Le , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek
IPC分类号： G11B5/127 , H01L43/08 , H01L43/12 , H01F10/08
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046
摘要： A system according to one embodiment includes a write pole having an end region positioned towards an air bearing surface, a first flare point, and a second flare point positioned between the air bearing surface and the first flare point; and a shield positioned above the write pole, wherein a cross sectional area of the write pole at a point between the first and second flare points along a plane passing through the write pole and oriented about parallel to the air bearing surface is greater than a cross sectional area of the end region of the write pole along a plane oriented parallel to the plane passing through the second flare point. Additional systems and methods are also presented.
摘要翻译：根据一个实施例的系统包括写入极，其具有朝向空气支撑表面定位的端部区域，第一扩口点和位于空气支承表面和第一扩张点之间的第二扩张点; 以及位于所述写入极上方的屏蔽件，其中所述写入极点在所述第一和第二扩张点之间的点沿着穿过所述写入极并平行于所述空气支承表面定向的平面的横截面面积大于十字所述写入极的端部区域沿着平行于通过所述第二扩张点的平面取向的平面的横截面积。还介绍了其他系统和方法。

49. 发明授权

US08161627B2 Method of making a write head lapping guide about aligned to a non-magnetic layer surrounding a write pole 有权
标题翻译：制作写头研磨导向器的方法，该方法与围绕写柱的非磁性层相对准
公开(公告)号：US08161627B2
公开(公告)日：2012-04-24
申请号：US12110705
申请日：2008-04-28
申请人： Christian Rene Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
发明人： Christian Rene Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/3133 , G11B5/3169 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method in one embodiment includes forming an electric lapping guide layer; forming a write pole; forming a first gap layer over the write pole; masking a portion of the first gap layer for defining a window over the write pole and at least a portion of the electric lapping guide layer; and forming a bump over the write pole in the window. Additional methods and systems are presented.
摘要翻译：一个实施例中的方法包括形成电研磨引导层; 形成写柱; 在所述写入极上形成第一间隙层; 掩蔽所述第一间隙层的一部分以限定所述写入极上的窗口和所述电动研磨引导层的至少一部分; 并在窗口上的写入极上形成凸块。介绍了其他方法和系统。

50. 发明申请

US20100165513A1 WRITE HEAD WITH SELF-ALIGN LAYER AND A METHOD FOR MAKING THE SAME 有权
标题翻译：具有自对准层的写头和其制造方法
公开(公告)号：US20100165513A1
公开(公告)日：2010-07-01
申请号：US12347058
申请日：2008-12-31
申请人： Christian Rene Bonhote , Quang Le , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek
发明人： Christian Rene Bonhote , Quang Le , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek
IPC分类号： G11B5/48 , B05D5/12
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046
摘要： A system according to one embodiment includes a write pole having an end region positioned towards an air bearing surface, a first flare point, and a second flare point positioned between the air bearing surface and the first flare point; and a shield positioned above the write pole, wherein a cross sectional area of the write pole at a point between the first and second flare points along a plane passing through the write pole and oriented about parallel to the air bearing surface is greater than a cross sectional area of the end region of the write pole along a plane oriented parallel to the plane passing through the second flare point. Additional systems and methods are also presented.
摘要翻译：根据一个实施例的系统包括写入极，其具有朝向空气支撑表面定位的端部区域，第一扩口点和位于空气支承表面和第一扩张点之间的第二扩张点; 以及位于所述写入极上方的屏蔽件，其中所述写入极点在所述第一和第二扩张点之间的点沿着穿过所述写入极并平行于所述空气支承表面定向的平面的横截面面积大于十字所述写入极的端部区域沿着平行于通过所述第二扩张点的平面取向的平面的横截面积。还介绍了其他系统和方法。

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