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41. 发明授权

US09238863B2 Method for blackening white fluoride spray coating, and fluoride spray coating covered member having a blackened layer on its surface 有权
标题翻译：黑色氟化物喷涂的黑化方法，氟表面涂层覆盖件，表面具有黑色层
公开(公告)号：US09238863B2
公开(公告)日：2016-01-19
申请号：US14373505
申请日：2013-01-16
申请人： TOCALO CO., LTD.
发明人： Yoshio Harada , Takema Teratani , Shinya Miki , Kenichiro Togoe
IPC分类号： B32B3/00 , C23C14/48 , C23C4/04 , C23C4/18
CPC分类号： C23C14/48 , C23C4/04 , C23C4/18 , Y10T428/24802
摘要： This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.
摘要翻译：本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分氟化物喷涂改为黑色，形成黑色离子注入层。

42. 发明申请

US20150116889A1 ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK 有权
标题翻译：静电切割机及其制造方法
公开(公告)号：US20150116889A1
公开(公告)日：2015-04-30
申请号：US14397297
申请日：2013-03-22
申请人： TOCALO CO., LTD.
发明人： Ryo Yamasaki , Mitsuharu Inaba , Kensuke Taguchi
IPC分类号： H01L21/683 , C23C4/12
CPC分类号： H01L21/6833 , C23C4/01 , C23C4/11 , C23C4/12 , H01L21/67103 , H01L21/6831 , H02N13/00
摘要： An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.
摘要翻译：公开了一种静电卡盘和制造方法，其中不存在使用粘合剂的缺点，自由度高。静电卡盘包括构成主卡盘主体的基板部分，形成在基板部分表面上的喷涂层的第一绝缘层，通过将导电浆料涂敷到第一绝缘层的表面而形成的电导体的加热器部分层，形成在第一绝缘层的表面上以覆盖加热器部分的喷涂层的第二绝缘层，通过热喷涂形成于第二绝缘层的表面上的电极部分和喷涂层的介电层形成到第二层的表面，以便覆盖电极部分，并且在不使用粘合剂的情况下降低体积电阻率。

43. 发明授权

US08896210B2 Plasma processing apparatus and method 有权
标题翻译：等离子体处理装置及方法
公开(公告)号：US08896210B2
公开(公告)日：2014-11-25
申请号：US13705712
申请日：2012-12-05
申请人： Tokyo Electron Limited , Tocalo Co., Ltd.
发明人： Masaru Nishino , Masatsugu Makabe , Nobuyuki Nagayama , Tatsuya Handa , Ryotaro Midorikawa , Keigo Kobayashi , Tetsuya Niya
IPC分类号： H01J7/24 , H05H1/46 , H01J37/32
CPC分类号： H05H1/46 , H01J37/32477 , H01J37/32495
摘要： A plasma processing apparatus includes a processing chamber; a lower electrode serving as a mounting table for mounting thereon a target object; and an upper electrode or an antenna electrode provided to be opposite to the lower electrode. The apparatus further includes a gas supply source for introducing a gas including a halogen-containing gas and an oxygen gas into the processing chamber and a high frequency power supply for applying a high frequency power for generating plasma to at least one of the upper electrode, the antenna electrode, or the lower electrode. Among inner surfaces of the processing chamber which are exposed to the plasma, at least a part of or all of the surfaces between a mounting position of the target object and the upper electrode, or the antenna electrode; or at least a part of or all of the surfaces of the upper electrode or the antenna electrode are coated with a fluorinated compound.
摘要翻译：等离子体处理装置包括处理室; 用作安装台的下电极，用于安装目标物体; 以及设置成与下电极相对的上电极或天线电极。该装置还包括用于将包含含卤素气体和氧气的气体引入处理室的气体供给源和用于将高频电力施加到上部电极中的至少一个的高频电源，天线电极或下电极。在暴露于等离子体的处理室的内表面中，目标物体的安装位置与上部电极或天线电极之间的至少一部分或全部表面; 或上部电极或天线电极的至少一部分或全部表面涂覆有氟化合物。

44. 发明授权

US12046459B2 Heater component 有权
公开(公告)号：US12046459B2
公开(公告)日：2024-07-23
申请号：US18057187
申请日：2022-11-18
申请人： TOCALO CO., LTD.
发明人： Shikou Abukawa , Kensuke Taguchi , Yu Asakimori , Ryutaro Kawamura
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H05B1/02 , H05B3/03 , H05B3/28
CPC分类号： H01J37/32724 , H01L21/6833 , H01L21/68757 , H05B1/0233 , H05B3/03 , H05B3/283 , H01J2237/3341 , H05B2203/013
摘要： A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.

45. 发明授权

US11955360B2 Electrostatic chuck and processing apparatus 有权
公开(公告)号：US11955360B2
公开(公告)日：2024-04-09
申请号：US17642083
申请日：2020-12-24
申请人： TOCALO Co., Ltd. , HITACHI HIGH-TECH CORPORATION
发明人： Takeshi Takabatake , Tomohiro Nakasuji , Akira Itoh , Kentaro Seto , Yutaka Omoto , Hiroho Kitada , Kazuumi Tanaka
IPC分类号： H01L21/683 , H01J37/32 , H01L21/687
CPC分类号： H01L21/6833 , H01J37/32715 , H01L21/68757
摘要： A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

46. 发明公开

US20230220531A1 NEW TUNGSTEN-BASED THERMAL SPRAY COATING AND MATERIAL FOR THERMAL SPRAYING TO OBTAIN IT 审中-公开
公开(公告)号：US20230220531A1
公开(公告)日：2023-07-13
申请号：US17796886
申请日：2021-03-04
申请人： TOCALO CO., LTD.
发明人： Kazuo HAMASHIMA , Masashi MORISASA , Shinsuke ANAI
IPC分类号： C23C4/06 , H01J37/32
CPC分类号： C23C4/06 , H01J37/32495 , C23C4/134
摘要： To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating.
A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.

47. 发明申请

US20230079853A1 HEATER COMPONENT 有权
公开(公告)号：US20230079853A1
公开(公告)日：2023-03-16
申请号：US18057187
申请日：2022-11-18
申请人： TOCALO CO., LTD.
发明人： Shikou ABUKAWA , Kensuke TAGUCHI , Yu ASAKIMORI , Ryutaro KAWAMURA
IPC分类号： H01J37/32 , H01L21/683 , H01L21/687 , H05B1/02 , H05B3/03 , H05B3/28
摘要： A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.

48. 发明申请

US20220090251A1 METHOD FOR FORMING THERMAL SPRAYED COATING 有权
公开(公告)号：US20220090251A1
公开(公告)日：2022-03-24
申请号：US17272281
申请日：2019-07-23
申请人： TOCALO CO., LTD.
发明人： Shinya MIKI , Masaya NAGAI
IPC分类号： C23C4/10 , C23C4/129
摘要： Provided is a method for forming a thermal sprayed coating, including a step of spraying a non-oxide ceramic material on a substrate to form a coating by a high velocity oxy-fuel spraying process. An average particle size of the non-oxide ceramic material is 0.1 to 5.0 μm, and a particle size distribution of the non-oxide ceramic material contains one or more peaks in each of: a particle size range of 0.1 μm or more and less than 1.0 μm; and a particle size range of 1.0 μm or more and less than 10.0 μm. The non-oxide ceramic material is dispersed in a solvent to prepare slurry 11, and the slurry 11 is fed from the exterior to flame 10 jetted from a thermal spray gun 2 to form a dense thermal sprayed coating structure.

49. 发明授权

US11174812B2 Sliding member and production method therefor 有权
公开(公告)号：US11174812B2
公开(公告)日：2021-11-16
申请号：US16545252
申请日：2019-08-20
申请人： TOYOTA MOTOR EAST JAPAN, INC. , TOYOTA JIDOSHA KABUSHIKI KAISHA , TOCALO Co., Ltd.
发明人： Ryo Koike , Kazuyoshi Manabe , Akihiro Kanno
IPC分类号： B32B15/00 , F02F3/10 , C23C4/134 , C23C4/08 , C10M103/04 , B32B15/01 , C10N50/08
摘要： A sliding member capable of improving friction characteristics under an environment of a lubricant containing Mo, and a production method therefor, is provided. The sliding member contains a sliding portion formed of a metallic material having a Ti-containing thermally sprayed coating on a surface layer part of the sliding portion. The sliding member slides under the environment of the lubricant containing Mo as an additive, in which active Ti exposed on a surface by sliding accelerates decomposition reaction of the additive contained in the lubricant to form a molybdenum disulfide-containing low-friction coating having low friction on the surface of the sliding portion.

50. 发明授权

US10793818B2 Culture container and cell culturing method and cell observation method using culture container 有权
公开(公告)号：US10793818B2
公开(公告)日：2020-10-06
申请号：US15753091
申请日：2016-08-19
申请人： TOKYO ELECTRON LIMITED , TOCALO CO., LTD.
发明人： Shinichi Gomi , Kenichi Kagawa , Yusuke Yoda , Shinya Miki , Tatsuya Hamaguchi
IPC分类号： C12M1/22 , C12M1/12 , G02B21/34 , C12M1/00 , C12M1/34 , C12N5/074 , G02B21/14 , C12M1/32 , C12Q1/04 , G01N21/03
摘要： The purpose of the present invention is to provide a culture container capable of preventing a concave meniscus without using a jig. In order to achieve this purpose, the present invention provides a culture container (1A) provided with: a base (3) having a concave portion (4); and a water-repellent layer (5) formed on an outer edge region (411) of the bottom (41) of the concave portion (4) and the inner circumferential surface (42) of the concave portion (4). One of the surfaces of the water-repellent layer (5) is exposed to the space in the concave portion (4).

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