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    • 32. 发明授权
    • Modified open cycle gas laser system
    • 改装开放循环气体激光系统
    • US3641453A
    • 1972-02-08
    • US3641453D
    • 1969-09-10
    • UNITED AIRCRAFT CORP
    • BIANCARDI FRANK RMELIKIAN GORKEN
    • H01S3/097H01S3/0979H01S3/04H01S3/09H01S3/22
    • H01S3/097H01S3/0979
    • A flowing gas ''''mixing'''' laser of the type which introduces a lasing gas into the laser chamber in proximity with the optical cavity, and provides excited energizing gas to the laser chamber separately, uses the cooling capacity of the liquefied lasing gas to improve the overall operation of the system. In one embodiment, the source of liquefied lasing gas is utilized as a coolant in a heat exchanger connected between the gas laser outflow and the inlet to the compressor used to cause gaseous flow through the laser. The compressor inlet temperature is reduced, thus permitting an increase in the capacity of the compressor and a reduction in the power of the prime mover which operates the compressor. In one variation of this embodiment, the lasing gas, from a liquefied source thereof is passed through the compressor inlet gas heat exchanger and is also utilized to cool the jacket of the laser chamber. In another variation of this embodiment, the lasing gas that is utilized as a coolant in a heat exchanger is vented to atmosphere, and the source of liquefied lasing gas also supplies the laser independently of the heat exchanger. In still another variation of this embodiment, a water cooled heat exchanger is used to precool the laser effluent before passing through the laser gas cooled heat exchanger. In another embodiment of the invention, the source of liquefied lasing gas is introduced in proximity with the laser chamber as a lasing gas and is separately used in heat exchangers to cool the inlet air and the gases leaving the laser chamber, and then vented to ambient. In each embodiment, the outflow of the compressor is vented to ambient, and the prime mover also powers an electric generator to operate a power supply that produces high-voltage DC current for a DC electric discharge plasma excitation means.
    • 一种流动气体“混合”激光器,其类型将激光气体引入到与光学腔体接近的激光室中,并且分别向激光器腔提供激发的激励气体,使用液化的激光气体的冷却能力来改善整体 系统的操作。 在一个实施例中,液化气体源被用作连接在气体激光出口和压缩机入口之间的热交换器中的冷却剂,用于使气体流过激光。 压缩机入口温度降低,从而允许增加压缩机的容量并降低操作压缩机的原动机的功率。 在该实施例的一个变型中,来自其液化源的激光气体通过压缩机入口气体热交换器,并且还用于冷却激光室的护套。 在该实施例的另一变型中,在热交换器中用作冷却剂的激光气体被排放到大气中,并且液化激发气体源也独立于热交换器供应激光。 在该实施例的又一变型中,水冷式热交换器用于在通过激光气体冷却的热交换器之前预冷却激光流出物。 在本发明的另一个实施例中,液化的激光气体源作为激光气体被引入激光室附近,并且分别用于热交换器以冷却离开激光室的入口空气和气体,然后排放到环境中 。 在每个实施例中,压缩机的流出被排放到环境中,并且原动机还为发电机供电以操作产生用于DC放电等离子体激发装置的高压DC电流的电源。
    • 34. 发明授权
    • Fluoride crystal, optical article, and production method
    • 氟化物晶体,光学制品和制造方法
    • US6270570B2
    • 2001-08-07
    • US4884598
    • 1998-03-27
    • CANON KK
    • OHBA TOMORUICHIZAKI TOSHIO
    • C01B9/08C01F11/22C03C3/32C30B11/00C30B29/12G02B1/02G03F7/20H01S3/034H01S3/0979H01S3/225C30B11/04
    • H01S3/034C30B11/00C30B29/12G02B1/02G03F7/70958H01S3/0979H01S3/225
    • An object of the present invention is to provide a fluoride crystal having a high transmittance with respect to an excimer laser and an excellent resistance with respect to a high output laser, and a production method therefore. The fluoride crystal of the present invention contains at least one kind of atom selected from the group consisting of Zn, Cd, Pb, Li, Bi and Na with a content of 10 ppm or less, and has an internal transmittance of 70% or more with respect to 135 nm wavelength light. The method of the present invention of producing a fluoride crystal comprises conducting a refining step of adding a scavenger to a calcium fluoride raw material and refining the raw material at least once, and a crystal growth step of further adding the scavenger to the refined raw material and growing a crystal by using a crucible lowering method, wherein the amount of the scavenger to be added in the first refining step is 0.04 to 0.1 mol % based on the raw material, and the total amount of the scavenger to be added in the subsequent refining steps and the crystal growth step is 10% to 50% based on the amount of the scavenger to be added in the first refining step.
    • 本发明的目的是提供一种相对于准分子激光器具有高透射率和相对于高输出激光器的优异电阻的氟化物晶体及其制造方法。 本发明的氟化物晶体含有选自Zn,Cd,Pb,Li,Bi和Na中的至少一种原子,含量为10ppm以下,内透射率为70%以上 相对于135nm波长的光。 本发明的氟化物晶体的制造方法包括进行将清除剂添加到氟化钙原料中并将原料精炼至少一次的精制工序,以及进一步向澄清原料添加清除剂的晶体生长步骤 并且通过使用坩埚降低方法生长晶体,其中在第一精炼步骤中添加的清除剂的量相对于原料为0.04〜0.1摩尔%,并且在随后的添加量中的清除剂的总量 精炼步骤和晶体生长步骤基于在第一精制步骤中添加的清除剂的量为10%至5​​0%。
    • 35. 发明授权
    • Circulation type gas purification apparatus and method of operating the
same
    • 循环式气体净化装置及其运行方法
    • US5277040A
    • 1994-01-11
    • US822608
    • 1992-01-15
    • Jin Mitsui
    • Jin Mitsui
    • H01S3/036H01S3/08H01S3/0979H01S3/225F25B19/00
    • H01S3/036H01S3/225
    • This invention relates to purification of a multicomponent gas while purifying and circulating a gas medium, such as a laser gas medium or the like. An object of the present invention is to provide a gas laser apparatus operating method and a gas laser apparatus in which it is easy to keep the laser output power constant for a long time. Disclosed is a method which performs laser oscillation while circulating a laser multicomponent gas medium containing a rare gas and in which the laser gas medium is circulated through an absorbent (10) which has been refrigerated to a temperature where all the components of the laser gas medium necessary for laser oscillation are not solidified.
    • 本发明涉及多元气体的净化,同时净化和循环诸如激光气体介质等的气体介质。 本发明的目的是提供一种能够长时间保持激光输出功率恒定的气体激光装置操作方法和气体激光装置。 公开了一种在包含稀有气体的激光多组分气体介质循环的同时进行激光振荡的方法,其中激光气体介质通过已冷却的吸收剂(10)循环到激光气体介质的所有组分 激光振荡所必需的不固化。