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31. 发明申请

US20090208966A1 METHOD FOR REMOVING A FLUID SUBSTANCE FROM A CLOSED SYSTEM 有权
标题翻译：从封闭系统中移除流体物质的方法
公开(公告)号：US20090208966A1
公开(公告)日：2009-08-20
申请号：US12412074
申请日：2009-03-26
申请人： Daniel L. KACIAN , Mark R. KENNEDY , Nick M. CARTER
发明人： Daniel L. KACIAN , Mark R. KENNEDY , Nick M. CARTER
IPC分类号： C12Q1/68 , G01N33/00
CPC分类号： B01L3/565 , B01L3/50825 , B01L2200/026 , B01L2300/044 , B01L2300/047 , B01L2300/0681 , B01L2300/069 , B01L2300/0887 , B65D41/0414 , B65D51/002 , B65D51/1616 , B65G2203/044 , H01L21/67784
摘要： A cap which can form an essentially leak-proof seal with an open-ended vessel capable of receiving and holding fluid specimens or other materials for analysis. To minimize potentially contaminating contact between a fluid sample present in the vessel and humans or the environment, the present invention features a cap having a frangible seal which is penetrable by a plastic pipette tip or other fluid transfer device. The cap further includes a filter for limiting dissemination of an aerosol or bubbles once the frangible seal has been pierced. The filter is positioned between the frangible seal and a retaining structure. The retaining structure is positioned on the cap above the filter and may be used to contain the filter within the cap. The material of the retaining structure may be penetrable by a fluid transfer device.
摘要翻译：可以与能够接收和保持流体样本或其他材料进行分析的开放式容器形成基本上防漏密封的盖。为了最小化容器中存在的流体样品与人类或环境之间的潜在的污染接触，本发明的特征在于具有可由塑料吸头或其他流体传送装置穿透的易碎密封件的盖。一旦破裂密封件被刺穿，盖子还包括用于限制气溶胶或气泡的传播的过滤器。过滤器位于易碎密封件和保持结构之间。保持结构定位在过滤器上方的帽上，并且可以用于将过滤器容纳在盖内。保持结构的材料可以被流体转移装置穿透。

32. 发明申请

US20090020392A1 Machining Line for Plate-Type Elements, Particularly Solar Cells, and Method of Machining Plate-Type Elements 审中-公开
标题翻译：板型元件，特别是太阳能电池的加工线及加工板型元件的方法
公开(公告)号：US20090020392A1
公开(公告)日：2009-01-22
申请号：US12014451
申请日：2008-01-15
申请人： Ewald KOENIG , Markus HILPERT , Klaus MESSMER
发明人： Ewald KOENIG , Markus HILPERT , Klaus MESSMER
IPC分类号： B65G47/22
CPC分类号： H01L21/67784 , B65G21/2036 , B65G49/064 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： The invention relates to a machining line for plate-type elements, particularly solar cells. According to the invention, a machining station and a positioning station for aligning the plate-type elements relative to a reference point with a predefined position tolerance are provided. The positioning station is connected to the input side of the machining station in the flow direction of the material, and conveying devices are provided for moving the plate-type elements from the positioning station to the machining station while maintaining the predefined position tolerance.
摘要翻译：本发明涉及一种用于板式元件，特别是太阳能电池的加工线。根据本发明，提供了一种用于将板型元件相对于参考点对准预定位置公差的加工台和定位台。定位站在材料的流动方向上连接到加工站的输入侧，并且提供输送装置，用于将板式元件从定位站移动到加工台，同时保持预定义的位置公差。

33. 发明授权

US07462572B2 Plasma treatment apparatus and method for plasma treatment 有权
标题翻译：等离子体处理装置及等离子体处理方法
公开(公告)号：US07462572B2
公开(公告)日：2008-12-09
申请号：US11950818
申请日：2007-12-05
申请人： Shunpei Yamazaki , Yasuyuki Arai , Yasuko Watanabe
发明人： Shunpei Yamazaki , Yasuyuki Arai , Yasuko Watanabe
IPC分类号： H01L21/26
CPC分类号： H01L21/67115 , C23C16/45519 , C23C16/45521 , C23C16/4557 , C23C16/4583 , C23C16/46 , C23C16/5093 , C23C16/513 , C23C16/54 , H01J37/32761 , H01L21/67069 , H01L21/67109 , H01L21/67748 , H01L21/67784 , H01L21/6838
摘要： A plasma treatment apparatus and a method for plasma treatment are provided that made possible to control accurately a distance between plasma and an object to be treated (hereinafter referred to as an object), and that facilitated a transportation of a substrate that a width is thin and grown in size. The plasma treatment apparatus of the present invention is provided with a gas supply means for introducing a processing gas into a place between a first electrode and a second electrode under an atmospheric pressure or around atmospheric pressure; a plasma generation means for generating plasma by applying a high frequency voltage to the first electrode or the second electrode under the condition that the processing gas is introduced; and, a transport means for transporting the object by floating the object by blowing the processing gas or a transporting gas to the object. An etching treatment; an ashing treatment; a thin film formation; or a cleaning treatment of components using the first electrode and the second electrode is carried out by moving a relative position between the first electrode and the second electrode, and the object.
摘要翻译：提供了等离子体处理装置和等离子体处理方法，其可以准确地控制等离子体和被处理物体之间的距离（以下称为对象），并且促进宽度较薄的基板的输送并长大。本发明的等离子体处理装置设置有用于在大气压或大气压下将处理气体引入第一电极和第二电极之间的位置的气体供给装置; 等离子体产生装置，用于在引入处理气体的条件下，通过向第一电极或第二电极施加高频电压来产生等离子体; 以及用于通过将处理气体或输送气体吹送到物体而使物体浮起来来运送物体的运送装置。蚀刻处理; 灰化治疗; 薄膜形成; 或者通过移动第一电极和第二电极之间的相对位置以及物体来执行使用第一电极和第二电极的部件的清洁处理。

34. 发明申请

US20070290517A1 Non-Contact Transport Apparatus 审中-公开
标题翻译：非接触运输装置
公开(公告)号：US20070290517A1
公开(公告)日：2007-12-20
申请号：US11754964
申请日：2007-05-29
申请人： Shigekazu Nagai , Akio Saitoh , Masahiko Someya , Masaru Saitoh , Yukihisa Yoshida
发明人： Shigekazu Nagai , Akio Saitoh , Masahiko Someya , Masaru Saitoh , Yukihisa Yoshida
IPC分类号： B65H29/00 , B65G49/07
CPC分类号： H01L21/6838 , H01L21/67784
摘要： A non-contact transport apparatus comprises a top plate with a supply port for supplying air thereto, a diffuser plate having a plurality of discharge holes for discharging air, and a sheet-shaped nozzle plate interposed between the top plate and the diffuser plate and having a plurality of nozzles therein. The top plate, the nozzle plate and the diffuser plate are stacked and integrally connected to one another through a plurality of connecting bolts. Air is supplied from the supply port and via flow passages to the plurality of nozzles. Air is directed to the outside from the plurality of discharge holes, via radially formed nozzles oriented in a radially outward direction.
摘要翻译：非接触输送装置包括：具有用于向其供给空气的供给口的顶板，具有多个用于排出空气的排出孔的扩散板，以及插入在顶板和扩散板之间的片状喷嘴板，多个喷嘴。顶板，喷嘴板和扩散板通过多个连接螺栓彼此堆叠并且一体地连接。空气从供给口供给，通过流路向多个喷嘴供给。空气通过沿径向向外的方向定向的径向形成的喷嘴从多个排出孔引导到外部。

35. 发明申请

US20070195653A1 Non-contact support platforms for distance adjustment 有权
标题翻译：用于距离调整的非接触式支撑平台
公开(公告)号：US20070195653A1
公开(公告)日：2007-08-23
申请号：US11578162
申请日：2005-04-13
申请人： Yuval Yassour , Arie Harnik , Hilel Richman
发明人： Yuval Yassour , Arie Harnik , Hilel Richman
IPC分类号： G11B11/00
CPC分类号： B65G49/065 , B24B37/30 , B65G2249/02 , B65G2249/04 , B65G2249/045 , F16C29/025 , H01L21/67784 , H01L21/6838 , H01L21/68714
摘要： An apparatus for supporting a stationary or moving substantially flat object without physical contact on an fluid-cushion. The object floats on a fluid cushion gap, the apparatus aimed for globally or locally adjusting the gap. The apparatus comprising: a first platform for supporting the object without contact, the platform having a substantially flat active surface comprised of one or more sectors, each sector comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets fluidically connected through a pressure flow restrictors to a higher-pressure manifold associated with the sector in which the basic cell lies, the higher-pressure manifold is fluidically connected through main supply pipeline to pressurized fluid supply and at least one of a plurality of fluid-evacuation channels fluidically connected to a lower-pressure manifold associated with the sector in which the basic cell lies having main evacuation pipeline; wherein the flow restrictor characteristically exhibiting fluidic return spring behavior; and wherein at least one pressure control valve is interposed with at least one of the two main pipelines of at least one sector for controlling pressure levels of at least one of the two manifolds of that sector.
摘要翻译：一种用于支撑静止或移动的基本平坦的物体而不在液垫上物理接触的装置。物体漂浮在液体缓冲间隙上，该装置旨在全局或局部调整间隙。该装置包括：用于在不接触的情况下支撑物体的第一平台，所述平台具有由一个或多个扇区组成的基本上平坦的有源表面，每个扇区包括多个基本单元中的至少一个，每个基本单元具有至少一个多个压力出口，其通过压力限流器流体连接到与基本单元所在的扇区相关联的高压歧管，高压歧管通过主供应管线流体连接到加压流体供应器，并且至少一个流体连接到与基本单元所在的具有主排空管线的扇区相关联的低压歧管的多个流体排出通道; 其中所述限流器特征性地表现出流体回流弹簧的性能; 并且其中至少一个压力控制阀插入有至少一个扇区的两个主管线中的至少一个，用于控制该扇区的两个歧管中的至少一个歧管的压力水平。

36. 发明申请

US20070040241A1 Wafer inspection device 失效
标题翻译：晶圆检查装置
公开(公告)号：US20070040241A1
公开(公告)日：2007-02-22
申请号：US10563499
申请日：2004-05-12
申请人： Michael Halama , Albert Kreh , Guenter Schmidt
发明人： Michael Halama , Albert Kreh , Guenter Schmidt
IPC分类号： H01L23/544
CPC分类号： H01L21/6838 , G01R31/2891 , H01L21/67784 , H01L21/682
摘要： The invention relates to a wafer inspection device. The device comprises an air-cushion stage which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles are provided for this purpose. At least one valve is connected to at least one electric control unit, the valve being configured in such a way that a normal pressure prevails in the air nozzles when the electric control unit delivers a corresponding signal.
摘要翻译：本发明涉及一种晶片检查装置。该装置包括气垫台，该气垫台可以彼此垂直的两个方向（X，Y）移位。为此目的提供了几个空气喷嘴。至少一个阀连接到至少一个电气控制单元，阀被配置成使得当电气控制单元输送相应的信号时，空气喷嘴中的正常压力占优势。

37. 发明申请

US20060284356A1 Support platform of non-contact transfer apparatus 有权
公开(公告)号：US20060284356A1
公开(公告)日：2006-12-21
申请号：US11454865
申请日：2006-06-19
申请人： Tae Lim , Hyun Jeon , Kwang Yoo , Ji Oh , Hyuk Yoon , Yang Moon
发明人： Tae Lim , Hyun Jeon , Kwang Yoo , Ji Oh , Hyuk Yoon , Yang Moon
IPC分类号： B23Q3/00
CPC分类号： H01L21/67784 , B65G51/03
摘要： There is provided a support platform of a non-contact transfer apparatus. The support platform includes a plurality of first holes for introducing air on a surface of the support platform, and a plurality of second holes for removing the air introduced through the first holes. At least one of a size and a number of the first holes varies in a direction from a central portion of the support platform to peripheral portions of the support platform, and the second holes are identically formed to one another.

38. 发明申请

US20060189170A1 Plasma treatment apparatus and method for plasma treatment 有权
标题翻译：等离子体处理装置及等离子体处理方法
公开(公告)号：US20060189170A1
公开(公告)日：2006-08-24
申请号：US11410234
申请日：2006-04-25
申请人： Shunpei Yamazaki , Yasuyuki Arai , Yasuko Watanabe
发明人： Shunpei Yamazaki , Yasuyuki Arai , Yasuko Watanabe
IPC分类号： H01L21/324
CPC分类号： H01L21/67115 , C23C16/45519 , C23C16/45521 , C23C16/4557 , C23C16/4583 , C23C16/46 , C23C16/5093 , C23C16/513 , C23C16/54 , H01J37/32761 , H01L21/67069 , H01L21/67109 , H01L21/67748 , H01L21/67784 , H01L21/6838
摘要： A plasma treatment apparatus and a method for plasma treatment are provided that made possible to control accurately a distance between plasma and an object to be treated (hereinafter referred to as an object), and that facilitated a transportation of a substrate that a width is thin and grown in size. The plasma treatment apparatus of the present invention is provided with a gas supply means for introducing a processing gas into a place between a first electrode and a second electrode under an atmospheric pressure or around atmospheric pressure; a plasma generation means for generating plasma by applying a high frequency voltage to the first electrode or the second electrode under the condition that the processing gas is introduced; and, a transport means for transporting the object by floating the object by blowing the processing gas or a transporting gas to the object. An etching treatment; an ashing treatment; a thin film formation; or a cleaning treatment of components using the first electrode and the second electrode is carried out by moving a relative position between the first electrode and the second electrode, and the object.
摘要翻译：提供了等离子体处理装置和等离子体处理方法，其可以准确地控制等离子体和被处理物体之间的距离（以下称为对象），并且促进宽度较薄的基板的输送并长大。本发明的等离子体处理装置设置有用于在大气压或大气压下将处理气体引入第一电极和第二电极之间的位置的气体供给装置; 等离子体产生装置，用于在引入处理气体的条件下，通过向第一电极或第二电极施加高频电压来产生等离子体; 以及用于通过将处理气体或输送气体吹送到物体而使物体浮起来来运送物体的运送装置。蚀刻处理; 灰化治疗; 薄膜形成; 或者通过移动第一电极和第二电极之间的相对位置以及物体来执行使用第一电极和第二电极的部件的清洁处理。

39. 发明申请

US20060045667A1 Substrate handling system and process for manufacturing large substrates 审中-公开
标题翻译：基板处理系统和制造大型基板的工艺
公开(公告)号：US20060045667A1
公开(公告)日：2006-03-02
申请号：US11180970
申请日：2005-07-13
申请人： Stephen Savas
发明人： Stephen Savas
IPC分类号： H01L21/677
CPC分类号： H01L21/67173 , H01L21/67236 , H01L21/67784
摘要： Air floatation system and method for simultaneously moving very large substrates into and out of a load locked chamber for vacuum processing. While the substrates are being processed, input and output load locks are cycling to atmospheric pressure and back to vacuum for loading and unloading the substrates. Following loading or unloading, valves between all chambers are opened and the substrates are moved in vacuum, nearly simultaneously and in line from load lock to process chambers and from the process chambers to output load lock. This minimizes both the total process time per substrate and the cost and size of the handling system. It permits the use of valves of minimum size and cost, minimizes the cost of the handling mechanism, prevents the handling time from adding to total process time, and the loading and unloading system is flexible for both in-line and side-loading configurations.
摘要翻译：用于同时将非常大的衬底移入和移出负载锁定室以进行真空处理的空气漂浮系统和方法。在正在处理衬底的同时，输入和输出负载锁定正在循环到大气压力并返回真空以装载和卸载衬底。加载或卸载后，打开所有腔室之间的阀门，并且基板在真空中几乎同时移动，并从装载锁定到处理室以及从处理室输出到输出负载锁定。这使得每个基底的总处理时间和处理系统的成本和尺寸最小化。它允许使用最小尺寸和成本的阀门，最小化处理机构的成本，防止处理时间增加到总处理时间，并且装载和卸载系统对于在线和侧向加载配置都是灵活的。

40. 发明授权

US06893612B2 Penetrable cap 有权
标题翻译：可穿透帽
公开(公告)号：US06893612B2
公开(公告)日：2005-05-17
申请号：US10093511
申请日：2002-03-08
申请人： Daniel L. Kacian , Mark R. Kennedy , Nick M. Carter
发明人： Daniel L. Kacian , Mark R. Kennedy , Nick M. Carter
IPC分类号： B65G47/88 , B01L3/14 , B01L99/00 , B65G49/07 , B65G51/03 , G11B5/84 , G11B7/26 , H01L21/67 , H01L21/677 , B01L3/02 , B65D41/20
CPC分类号： B01L3/565 , B01L3/50825 , B01L2200/026 , B01L2300/044 , B01L2300/047 , B01L2300/0681 , B01L2300/069 , B01L2300/0887 , B65D41/0414 , B65D51/002 , B65D51/1616 , B65G2203/044 , H01L21/67784
摘要： A cap which can form an essentially leak-proof seal with an open-ended vessel capable of receiving and holding fluid specimens or other materials for analysis. To minimize potentially contaminating contact between a fluid sample present in the vessel and humans or the environment, the cap has a frangible seal which is penetrable by a plastic pipette tip or other fluid transfer device. The cap further includes a filter for limiting dissemination of an aerosol or bubbles once the frangible seal has been pierced. The filter is positioned between the frangible seal and a retainer. The retainer is positioned on the cap above the filter and may be used to contain the filter within the cap. The material of the retainer may be penetrable by a fluid transfer device.
摘要翻译：可以与能够接收和保持流体样本或其他材料进行分析的开放式容器形成基本上防漏密封的盖。为了最小化存在于容器中的流体样品与人体或环境之间的潜在的污染接触，盖具有可被塑料移液管尖端或其它流体传送装置穿透的易碎密封。一旦破裂密封件被刺穿，盖子还包括用于限制气溶胶或气泡的传播的过滤器。过滤器位于易碎密封件和保持器之间。保持器定位在过滤器上方的帽上，并且可以用于将过滤器容纳在盖内。保持器的材料可以被流体输送装置穿透。

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