![Non-contact support platforms for distance adjustment](/abs-image/US/2007/08/23/US20070195653A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: Non-contact support platforms for distance adjustment
- 专利标题(中):用于距离调整的非接触式支撑平台
- 申请号:US11578162 申请日:2005-04-13
- 公开(公告)号:US20070195653A1 公开(公告)日:2007-08-23
- 发明人: Yuval Yassour , Arie Harnik , Hilel Richman
- 申请人: Yuval Yassour , Arie Harnik , Hilel Richman
- 国际申请: PCT/IL05/00390 WO 20050413
- 主分类号: G11B11/00
- IPC分类号: G11B11/00
摘要:
An apparatus for supporting a stationary or moving substantially flat object without physical contact on an fluid-cushion. The object floats on a fluid cushion gap, the apparatus aimed for globally or locally adjusting the gap. The apparatus comprising: a first platform for supporting the object without contact, the platform having a substantially flat active surface comprised of one or more sectors, each sector comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets fluidically connected through a pressure flow restrictors to a higher-pressure manifold associated with the sector in which the basic cell lies, the higher-pressure manifold is fluidically connected through main supply pipeline to pressurized fluid supply and at least one of a plurality of fluid-evacuation channels fluidically connected to a lower-pressure manifold associated with the sector in which the basic cell lies having main evacuation pipeline; wherein the flow restrictor characteristically exhibiting fluidic return spring behavior; and wherein at least one pressure control valve is interposed with at least one of the two main pipelines of at least one sector for controlling pressure levels of at least one of the two manifolds of that sector.
摘要(中):
一种用于支撑静止或移动的基本平坦的物体而不在液垫上物理接触的装置。 物体漂浮在液体缓冲间隙上,该装置旨在全局或局部调整间隙。 该装置包括:用于在不接触的情况下支撑物体的第一平台,所述平台具有由一个或多个扇区组成的基本上平坦的有源表面,每个扇区包括多个基本单元中的至少一个,每个基本单元具有至少一个 多个压力出口,其通过压力限流器流体连接到与基本单元所在的扇区相关联的高压歧管,高压歧管通过主供应管线流体连接到加压流体供应器,并且至少一个 流体连接到与基本单元所在的具有主排空管线的扇区相关联的低压歧管的多个流体排出通道; 其中所述限流器特征性地表现出流体回流弹簧的性能; 并且其中至少一个压力控制阀插入有至少一个扇区的两个主管线中的至少一个,用于控制该扇区的两个歧管中的至少一个歧管的压力水平。
公开/授权文献:
- US07604439B2 Non-contact support platforms for distance adjustment 公开/授权日:2009-10-20