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31. 发明授权

US06910510B2 Portable, cryogenic gas delivery apparatus 失效
标题翻译：便携式低温气体输送装置
公开(公告)号：US06910510B2
公开(公告)日：2005-06-28
申请号：US10620530
申请日：2003-07-16
申请人： Peter P. Gale , Michael Thomas Delich
发明人： Peter P. Gale , Michael Thomas Delich
IPC分类号： B65B1/20 , F17C7/02 , F17C7/04
CPC分类号： F17C7/04 , F17C2201/0104 , F17C2201/058 , F17C2203/0391 , F17C2203/0629 , F17C2205/0332 , F17C2205/0338 , F17C2205/0385 , F17C2205/0391 , F17C2221/011 , F17C2223/0123 , F17C2223/0161 , F17C2223/033 , F17C2223/035 , F17C2225/0123 , F17C2225/035 , F17C2227/0311 , F17C2250/0626 , F17C2250/0636 , F17C2270/025
摘要： A portable, cryogenic gas delivery apparatus includes a chamber which contains cryogenic material, such as oxygen, in both liquid and gas phases. A probe is mounted to move relative to the chamber in response to variations in pressure in the gas phase within the chamber. The probe has one part positioned within the chamber so that it is exposed to the pressure and temperature of the gas within the chamber and a second part located outside the chamber. The probe thus introduces heat from the ambient into the chamber. The probe preferably moves relative to the chamber in response to variations in pressure, moving away from the chamber to reduce the amount of thermal energy introduced into the chamber and toward the chamber to increase the amount of thermal energy introduced into the chamber. The apparatus includes a conserver which receives gas evaporating from the chamber and delivers it in efficient pulses to the end user in response to the user's inhalation.
摘要翻译：便携式低温气体输送装置包括在液相和气相中包含诸如氧的低温材料的室。安装探头以响应于腔室内的气相中的压力变化而相对于腔室移动。探针具有一部分位于腔室内，使得其暴露于腔室内的气体的压力和温度，以及位于腔室外部的第二部分。因此，探头将来自环境的热量引入腔室。探针优选地响应于压力变化而相对于腔室移动，远离腔室移动以减少引入腔室并朝向腔室的热能的量，以增加引入腔室的热能的量。该装置包括保存器，其接收从腔室蒸发的气体并响应于使用者的吸入将其以有效的脉冲传送给终端用户。

32. 发明授权

US06907740B2 Gas charging system for fill of gas storage and dispensing vessels 失效
公开(公告)号：US06907740B2
公开(公告)日：2005-06-21
申请号：US10625178
申请日：2003-07-23
申请人： Glenn M. Tom
发明人： Glenn M. Tom
IPC分类号： B01D8/00 , F17C1/00 , F17C5/06 , F17C7/00 , F17C7/04 , F17C9/02 , F17C13/02 , F17C13/04
CPC分类号： F17C5/06 , F17C1/00 , F17C7/00 , F17C13/025 , F17C13/04 , F17C2201/0104 , F17C2201/0109 , F17C2201/0114 , F17C2201/032 , F17C2201/054 , F17C2201/056 , F17C2201/058 , F17C2203/03 , F17C2203/0617 , F17C2203/0643 , F17C2203/0648 , F17C2205/0305 , F17C2205/0323 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0338 , F17C2205/0341 , F17C2205/0344 , F17C2205/035 , F17C2205/0382 , F17C2205/0385 , F17C2205/0391 , F17C2209/221 , F17C2221/01 , F17C2221/011 , F17C2221/012 , F17C2221/014 , F17C2221/017 , F17C2221/03 , F17C2223/0123 , F17C2223/033 , F17C2223/035 , F17C2225/0123 , F17C2225/036 , F17C2227/0157 , F17C2227/0178 , F17C2227/0302 , F17C2227/0341 , F17C2227/0353 , F17C2227/0369 , F17C2227/0388 , F17C2227/04 , F17C2227/044 , F17C2227/047 , F17C2250/01 , F17C2250/032 , F17C2250/043 , F17C2250/0443 , F17C2265/05 , F17C2270/025 , F17C2270/05 , F17C2270/0518 , Y02E60/321
摘要： An apparatus and method for charging a gas storage and dispensing vessel with gas to a predetermined pressure level, e.g., a gas to be employed in a semiconductor manufacturing operation such as a hydride, halide or organometallic reagent gas. In the gas charging, a source gas is liquefied, e.g., in a cryotrap, and then gasified in closed flow communication with the vessel to introduce the gas thereinto, and such liquefaction/gasification steps are carried out alternatively and repetitively, to charge the vessel in a step-wise, progressive fashion with gas, until a full fill state is achieved, with the contained gas at the predetermined pressure level.

33. 发明授权

US06857447B2 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases 有权
标题翻译：基于压力的气体输送系统和降低高压气体储存和输送相关风险的方法
公开(公告)号：US06857447B2
公开(公告)日：2005-02-22
申请号：US10166242
申请日：2002-06-10
申请人： W. Karl Olander , Matthew B. Donatucci , Luping Wang , Michael J. Wodjenski
发明人： W. Karl Olander , Matthew B. Donatucci , Luping Wang , Michael J. Wodjenski
IPC分类号： F17C7/00 , F17C5/00 , B08B9/027 , B08B5/00 , G05B11/01 , G06F15/00
CPC分类号： F17C13/04 , F17C5/00 , F17C2201/0109 , F17C2201/0119 , F17C2201/032 , F17C2201/056 , F17C2201/058 , F17C2205/0111 , F17C2205/0176 , F17C2205/0326 , F17C2205/0332 , F17C2205/0335 , F17C2205/0338 , F17C2205/0341 , F17C2205/0391 , F17C2205/0394 , F17C2221/012 , F17C2221/014 , F17C2221/016 , F17C2221/037 , F17C2221/05 , F17C2223/0123 , F17C2223/036 , F17C2225/0123 , F17C2225/033 , F17C2225/035 , F17C2225/038 , F17C2227/044 , F17C2227/045 , F17C2250/032 , F17C2250/043 , F17C2260/036 , F17C2260/044 , F17C2270/0518 , Y02E60/321 , Y10T137/0324 , Y10T137/0419 , Y10T137/2569 , Y10T137/4259 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762 , Y10T137/7793 , Y10T137/8158 , Y10T137/87249
摘要： Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.
摘要翻译：使用与气体歧管以选择性流动关系耦合的气体源分配气体的装置和方法。气体歧管包括用于将气体排放到气体使用区域的流动回路，并且气体源包括在超大气压下容纳气体的压力调节气体源容器。压力调节的气体源容器可以布置有在容器内或容器内的压力调节器，以及与容器流动关系的流量控制阀，使得从容器分配的气体在流过流量控制器之前流过调节器阀，并进入气体歧管。该装置和方法允许提高半导体工艺中使用的有毒或其他有害气体的储存和分配的安全性。

34. 发明申请

US20040118286A1 Rectangular parallelepiped fluid storage and dispensing vessel 有权
标题翻译：矩形平行六面体流体储存和分配容器
公开(公告)号：US20040118286A1
公开(公告)日：2004-06-24
申请号：US10314777
申请日：2002-12-09
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers
IPC分类号： B01D053/02 , B01D059/26 , B67D005/00 , B67D005/56
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

35. 发明申请

US20040065382A1 Monitoring of Ultra-high purity product storage tanks during transportation 有权
标题翻译：在运输过程中监测超高纯度产品储罐
公开(公告)号：US20040065382A1
公开(公告)日：2004-04-08
申请号：US10680267
申请日：2003-10-06
发明人： Vladimir Yliy Gershtein , Robert William Ford , John Frederick Cirucci
IPC分类号： B65B031/00
CPC分类号： F17C13/083 , F17C1/14 , F17C3/00 , F17C3/12 , F17C13/004 , F17C13/025 , F17C13/026 , F17C13/04 , F17C2201/0104 , F17C2201/035 , F17C2201/052 , F17C2201/054 , F17C2203/0617 , F17C2203/0643 , F17C2205/0107 , F17C2205/0126 , F17C2205/0157 , F17C2205/0308 , F17C2205/0311 , F17C2205/0323 , F17C2205/0329 , F17C2205/0352 , F17C2205/0379 , F17C2205/0391 , F17C2205/0394 , F17C2209/221 , F17C2209/228 , F17C2221/01 , F17C2221/012 , F17C2221/014 , F17C2221/016 , F17C2221/03 , F17C2221/031 , F17C2221/033 , F17C2221/037 , F17C2221/05 , F17C2223/0123 , F17C2223/0146 , F17C2223/0153 , F17C2223/0192 , F17C2223/033 , F17C2223/035 , F17C2223/043 , F17C2223/045 , F17C2223/047 , F17C2225/0123 , F17C2225/0153 , F17C2225/033 , F17C2225/035 , F17C2225/043 , F17C2225/045 , F17C2225/047 , F17C2227/0192 , F17C2227/03 , F17C2227/044 , F17C2250/043 , F17C2250/0439 , F17C2250/0447 , F17C2250/0626 , F17C2260/035 , F17C2270/0105 , F17C2270/0171 , F17C2270/0173 , F17C2270/0189 , Y02E60/321 , Y10T137/6877
摘要： System for the transportation and storage of a product which comprises a tank including cylindrical wall section and two ends, wherein the cylindrical wall section and two ends define a cylindrical tank periphery, and wherein the tank periphery has an interior and an exterior. The system utilizes a valve box that includes one or more side walls, a bottom wall, and a removable, sealable top cover which can be attached to the one or more side walls to seal the valve box, wherein the valve box side walls are sealably joined to the cylindrical wall. One or more process valves are disposed in the valve box, wherein each valve has a first and a second end, wherein each first end is connected to a pipe which passes through a wall of the valve box for introducing product into the tank or withdrawing product from the tank. A purge valve and pressure measurement means are installed in fluid communication with the valve box. The product in the tank is isolated from the atmosphere surrounding the tank when the valve box is sealed.
摘要翻译：一种用于运输和储存产品的系统，包括一个包括圆柱形壁部分和两个端部的罐，其中圆柱形壁部分和两个端部限定圆柱形罐周边，并且其中罐周边具有内部和外部。该系统利用一个阀箱，该阀箱包括一个或多个侧壁，底壁和可移除的可密封的顶盖，该顶盖可附接到一个或多个侧壁以密封阀箱，其中阀箱侧壁是可密封的连接到圆柱形壁。一个或多个过程阀设置在阀箱中，其中每个阀具有第一和第二端，其中每个第一端连接到通过阀箱的壁的管道，用于将产品引入罐或抽出物从坦克。清洗阀和压力测量装置安装成与阀箱流体连通。当阀箱密封时，罐中的产品与罐周围的气氛隔离。

36. 发明申请

US20040065371A1 Pressure vessel with an integrated control unit for the control of compressed fluid 失效
标题翻译：压力容器具有集成控制单元，用于控制压缩流体
公开(公告)号：US20040065371A1
公开(公告)日：2004-04-08
申请号：US10465979
申请日：2003-08-18
发明人： Arthur E Koschany , Jan Gobelsmann
IPC分类号： F17D001/00
CPC分类号： F17C13/04 , F17C1/06 , F17C1/16 , F17C13/02 , F17C2201/0109 , F17C2201/056 , F17C2203/0604 , F17C2203/0619 , F17C2203/0621 , F17C2203/0646 , F17C2203/066 , F17C2203/0663 , F17C2205/0317 , F17C2205/0323 , F17C2205/0326 , F17C2205/0329 , F17C2205/0332 , F17C2205/0335 , F17C2205/0338 , F17C2205/0341 , F17C2205/0391 , F17C2205/0394 , F17C2209/221 , F17C2221/011 , F17C2221/012 , F17C2221/033 , F17C2221/035 , F17C2223/0123 , F17C2223/036 , F17C2225/0123 , F17C2225/033 , F17C2227/048 , F17C2250/0626 , F17C2250/0636 , F17C2260/012 , F17C2260/042 , F17C2270/0168 , F17C2270/0184 , F17C2270/025 , F17C2270/0763 , F17C2270/0781 , Y02E60/321 , Y10T137/7808 , Y10T137/87917
摘要： A pressure vessel for storing a compressed gas comprises a closed pressure vessel housing which consists of an essentially cylindrical main part and of closing caps located on both sides. The pressure vessel also comprises an integrated control device for delivering the gas including a pressure reducer with a high-pressure part and a low-pressure part and including a controlled gas outlet. At least one of the closing caps is a part that is assembled with the cylindrical main part and the majority of the components of the control device are mounted on this part and are directed inside the vessels housing.
摘要翻译：用于储存压缩气体的压力容器包括由基本上圆柱形的主要部件和位于两侧的封闭盖组成的封闭的压力容器外壳。压力容器还包括用于输送气体的集成控制装置，包括具有高压部分和低压部分的减压器，并且包括受控气体出口。封闭盖中的至少一个是与圆柱形主要部件组装的部件，并且控制装置的大部分部件安装在该部件上并被引导到容器壳体内部。

37. 发明申请

US20040000338A1 Multiple regulator vacuum delivery valve assembly 有权
标题翻译：多调节器真空输送阀总成
公开(公告)号：US20040000338A1
公开(公告)日：2004-01-01
申请号：US10184987
申请日：2002-07-01
发明人： Douglas Charles Heiderman
IPC分类号： B65D083/00 , F16K031/12
CPC分类号： F16K1/305 , F16K1/307 , F17C13/04 , F17C2201/0109 , F17C2201/0114 , F17C2201/032 , F17C2201/058 , F17C2205/0329 , F17C2205/0335 , F17C2205/0338 , F17C2205/035 , F17C2205/0391 , F17C2260/036 , F17C2270/0518 , F17C2270/0745 , Y10T137/7781 , Y10T137/86372 , Y10T137/87917
摘要： This invention is directed to an apparatus for controlling the discharge of pressurized fluids from the outlet of a pressurized vessel, and particularly directed to multiple fluid regulating devices within the vessel for storing and controlling the flow of fluid or gases out of the vessel.
摘要翻译：本发明涉及一种用于控制加压流体从加压容器的出口排放的装置，特别涉及用于存储和控制流体或气体流出容器的容器内的多个流体调节装置。

38. 发明授权

US06660063B2 Sorbent-based gas storage and delivery system 失效
标题翻译：基于吸附剂的气体储存和输送系统
公开(公告)号：US06660063B2
公开(公告)日：2003-12-09
申请号：US10147145
申请日：2002-05-16
申请人： Glenn M. Tom , James V. McManus , Luping Wang , W. Karl Olander
发明人： Glenn M. Tom , James V. McManus , Luping Wang , W. Karl Olander
IPC分类号： B01D5304
CPC分类号： B01D53/0415 , B01D53/0407 , B01D53/053 , B01D2253/10 , B01D2253/102 , B01D2253/104 , B01D2253/106 , B01D2253/1085 , B01D2253/202 , B01D2258/0216 , B01D2259/40003 , B01D2259/4009 , B01D2259/40094 , B01D2259/40098 , B01D2259/4525 , B01D2259/455 , B01J20/20 , F17C7/00 , F17C11/00 , F17C13/04 , F17C13/045 , F17C2201/0109 , F17C2201/0114 , F17C2201/058 , F17C2205/0329 , F17C2205/0338 , F17C2205/0341 , F17C2205/035 , F17C2205/0385 , F17C2205/0391 , F17C2223/0123 , F17C2223/033 , F17C2223/035 , F17C2227/044 , F17C2250/043 , F17C2270/0518 , F17D1/04
摘要： A capacity increase and/or pressure decrease of gas in a gas storage and dispensing vessel is achieved by use of a physical adsorbent having sorptive affinity for the gas. Such approach enables conventional high pressure gas cylinders to be redeployed with contained sorbent, to achieve substantial enhancement of safety and capacity.
摘要翻译：通过使用对气体具有吸附亲和力的物理吸附剂来实现气体储存和分配容器中的气体的容量增加和/或压力降低。这种方法使传统的高压气瓶能够与所含的吸附剂重新部署，以实现安全性和容量的显着增强。

39. 发明申请

US20030213521A1 Intra-cylinder tubular pressure regulator 审中-公开
标题翻译：缸内管状压力调节器
公开(公告)号：US20030213521A1
公开(公告)日：2003-11-20
申请号：US10439565
申请日：2003-05-16
发明人： Neil Alexander Downie
IPC分类号： G05D016/06
CPC分类号： F17C13/04 , F17C13/123 , F17C2201/0104 , F17C2201/032 , F17C2201/054 , F17C2201/056 , F17C2205/0338 , F17C2205/0391 , F17C2223/0123 , F17C2223/035 , F17C2225/0123 , F17C2225/033 , F17C2225/038 , F17C2227/048 , F17C2260/036 , Y10T137/7816 , Y10T137/7819 , Y10T137/87917 , Y10T137/87925
摘要： A fluid control system for use with toxic or corrosive gases (for example) has been provided that includes a fluid pressure regulator comprising a fluid inlet; a fluid outlet; a first fluid flow path between the fluid inlet and the fluid outlet; a valve seat positioned in the first fluid flow path and dividing the fluid inlet and the fluid outlet; a valve element regulating flow through the valve seat; a generally cylindrical membrane defining an inflatable fluid cavity that moves axially, responsive to inflation; a wall portion of the cavity that moves responsive to inflation and deflation of the cavity; a second fluid flow path communicating between the cavity and a source of pressure outside the cavity; and a link transmitting the movement of the wall portion to the valve element, thereby moving the valve element with respect to the valve seat responsive to inflation and deflation of the cavity.
摘要翻译：已经提供了一种用于有毒或腐蚀性气体（例如）的流体控制系统，其包括包括流体入口的流体压力调节器; 流体出口; 流体入口和流体出口之间的第一流体流动路径; 阀座，其定位在第一流体流动路径中并且分隔流体入口和流体出口; 阀元件，调节通过阀座的流量; 限定可膨胀流体腔的大致圆柱形膜，其响应于膨胀而轴向移动; 所述空腔的壁部分响应于所述空腔的充气和放气而移动; 第二流体流动路径，其在所述空腔和所述空腔外部的压力源之间连通; 以及将壁部分移动到阀元件的连杆，从而响应于空腔的膨胀和放气，相对于阀座移动阀元件。

40. 发明申请

US20030126991A1 ADSORBENTS FOR LOW VAPOR PRESSURE FLUID STORAGE AND DELIVERY 有权
标题翻译：用于低蒸汽压力流体储存和运输的吸附剂
公开(公告)号：US20030126991A1
公开(公告)日：2003-07-10
申请号：US10043731
申请日：2002-01-10
发明人： Luping Wang , Doug Neugold
IPC分类号： B01D053/02
CPC分类号： F17C11/007 , F17C11/00 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10S95/90 , Y10S502/526
摘要： The invention relates to a fluid storage and delivery system utilizing a porous metal matrix that comprises at least one Group VIII metal or Group IB metal therein. In one aspect of the invention, such porous metal matrix forms a solid-phase metal adsorbent medium, characterized by an average pore diameter of from about 0.5 nm to about 2.0 nm and a porosity of from about 10% to about 30%. Such solid-phase metal adsorbent medium is particularly useful for sorptively storing and desoprotively dispensing a low vapor pressure fluid, e.g., ClF3, HF, GeF4, Br2, etc. In another aspect of the invention, such porous metal matrix forms a solid-phase metal sorbent, characterized by an average pore diameter of from about 0.25 nullm to about 500 nullm and a porosity of from about 15% to about 95%, which can effectively immobilize low vapor pressure liquefied gas and prevent the same from entering the fluid regulator as described in U.S. Pat. No. 6,089,027.
摘要翻译：本发明涉及一种利用多孔金属基质的流体储存和输送系统，该多孔金属基质包含至少一种第VIII族金属或IB族金属。在本发明的一个方面，这种多孔金属基质形成固相金属吸附剂介质，其特征在于平均孔径为约0.5nm至约2.0nm，孔隙率为约10％至约30％。这样的固相金属吸附剂介质特别适用于吸附储存和反向分配低蒸气压流体，例如ClF 3，HF，GeF 4，Br 2等。在本发明的另一方面，这种多孔金属基质形成固相金属吸附剂，其特征在于平均孔径为约0.25μm至约500μm，孔隙率为约15％至约95％，其可以有效地固定低蒸气压液化气体并防止其相同地进入流体调节器，如在美国专利中描述。 No. 6,089,027。

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