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31. 发明授权

US5512793A Piezoelectric and/or electrostrictive actuator having dummy cavities within ceramic substrate in addition to pressure chambers, and displacement adjusting layers formed aligned with the dummy cavities 失效
标题翻译：除了压力室之外，在陶瓷衬底内具有虚拟空腔的压电和/或电致伸缩致动器以及与虚拟空腔对准的位移调节层
公开(公告)号：US5512793A
公开(公告)日：1996-04-30
申请号：US382580
申请日：1995-02-02
申请人： Yukihisa Takeuchi , Koji Kimura
发明人： Yukihisa Takeuchi , Koji Kimura
IPC分类号： B41J2/045 , B41J2/055 , B41J2/14 , H01L41/09 , B41J2/03
CPC分类号： B41J2/14233 , H01L41/098 , B41J2002/14387
摘要： A piezoelectric and/or electrostrictive actuator including a ceramic substrate and piezoelectric and/or electrostrictive elements is disclosed. The ceramic substrate includes: a spacer plate having a plurality of windows which provide pressure chambers, the windows being formed in a row in the longitudinal direction of the spacer plate; a closure plate superposed on one of opposite major surfaces of the spacer plate so as to close one of opposite openings of each window; and a connecting plate superposed on the other major surface of the spacer plate so as to close the other opening of each window. The piezoelectric and/or electrostrictive elements are disposed on respective portions of the outer surface of the closure plate in alignment with the respective pressure chambers. The spacer plate has auxiliary windows formed adjacent to respective two outermost windows which are located at opposite ends of the row, the auxiliary windows providing dummy cavities within the ceramic substrate such that the dummy cavities are formed adjacent to respective two outermost pressure chambers, while displacement adjusting layers are integrally formed on respective portions of the outer surface of the closure plate which correspond to the auxiliary windows giving the dummy cavities.
摘要翻译：公开了一种包括陶瓷衬底和压电和/或电致伸缩元件的压电和/或电致伸缩致动器。陶瓷基板包括：间隔板，具有提供压力室的多个窗口，窗口沿间隔板的纵向方向成一行; 封闭板，叠置在间隔板的相对主表面之一上，以封闭每个窗口的相对开口中的一个; 以及重叠在隔板的另一个主表面上以连接每个窗口的另一个开口的连接板。压电和/或电致伸缩元件设置在封闭板的外表面的相应部分上，与相应的压力室对准。间隔板具有邻近相邻的两个最外窗形成的辅助窗，位于行的相对端，辅助窗在陶瓷衬底内提供虚拟空腔，使得虚拟空腔邻近相应的两个最外面的压力室形成，同时位移调整层一体地形成在封闭板的外表面的对应于提供虚拟空腔的辅助窗口的相应部分上。

32. 发明授权

US5504388A Piezoelectric/electrostrictive element having electrode film(s) with specified surface roughness 失效
标题翻译：具有指定表面粗糙度的电极膜的压电/电致伸缩元件
公开(公告)号：US5504388A
公开(公告)日：1996-04-02
申请号：US207041
申请日：1994-03-08
申请人： Koji Kimura , Satoshi Takemoto , Yukihisa Takeuchi
发明人： Koji Kimura , Satoshi Takemoto , Yukihisa Takeuchi
IPC分类号： H01L41/09 , H01L41/29 , H04R17/08 , H01L41/08
CPC分类号： H01L41/0973 , H01L41/0805 , H01L41/29 , H04R17/08
摘要： A piezoelectric/electrostrictive element is disclosed which includes at least one piezoelectric/electrostrictive portion each of which consists of a lower electrode film, a piezoelectric/electrostrictive film and an upper electrode film. In this element, at least the lower one of the electrode films has a surface roughness represented by maximum peak-to-valley roughness height Rmax. or Ry which is in a range of 3 .mu.m.about.14 .mu.m, and a surface roughness represented by centerline mean roughness Ra which is not larger than 2 .mu.m.
摘要翻译：公开了一种压电/电致伸缩元件，其包括至少一个压电/电致伸缩部分，每个压电/电致伸缩部分由下电极膜，压电/电致伸缩膜和上电极膜组成。在该元件中，至少下一个电极膜具有由最大峰谷粗糙度高度Rmax表示的表面粗糙度。或Ry为3μm的范围，以及不大于2μm的中心线平均粗糙度Ra表示的表面粗糙度。

33. 发明授权

US07861388B2 Method of manufacturing a cell driving type piezoelectric/electrostrictive actuator 失效
标题翻译：电池驱动型压电/电致伸缩致动器的制造方法
公开(公告)号：US07861388B2
公开(公告)日：2011-01-04
申请号：US11756758
申请日：2007-06-01
申请人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
发明人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
IPC分类号： H01L41/24 , H04R17/10
CPC分类号： B41J2/14209 , B41J2202/11 , F04B17/003 , F04B43/046 , G02B6/3538 , G02B6/3546 , G02B6/3564 , G02B6/3578 , H01L27/20 , H01L41/0831 , H01L41/273 , Y10T29/42 , Y10T29/49155 , Y10T156/107
摘要： A piezoelectric actuator capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell defined by two side walls, a substrate and a ceiling wall; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls comprising piezoelectric/electrostrictive devices, and the piezoelectric/electrostrictive devices being capable of changing a volume of the cell by displacement of the walls. Each of the piezoelectric/electrostrictive devices comprises a plurality of layered piezoelectric/electrostrictive bodies and electrodes which are alternately stacked, and end portions of the electrodes are embedded in the piezoelectric/electrostrictive bodies in at least the internal side of the cell.
摘要翻译：一种压电致动器，其能够以高电场强度驱动，获得较大的位移并且电极的导电可靠性高，并且包括：由两个侧壁，基板和顶壁限定的至少一个单元; 所述两个侧壁设置在所述基板上并被顶壁覆盖以限定一个单元，所述至少两个侧壁包括压电/电致伸缩装置，并且所述压电/电致伸缩装置能够通过位移来改变所述电池的体积的墙壁。压电/电致伸缩器件中的每一个包括交替堆叠的多个分层压电/电致伸缩体和电极，电极的端部至少在电池的内侧嵌入到压电/电致伸缩体中。

34. 发明授权

US07262545B2 Cell driving type piezoelectric/electrostrictive actuator and method of manufacturing the same 失效
标题翻译：电池驱动型压电/电致伸缩致动器及其制造方法
公开(公告)号：US07262545B2
公开(公告)日：2007-08-28
申请号：US10855448
申请日：2004-05-27
申请人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
发明人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
IPC分类号： B41J2/14 , B41J2/045
CPC分类号： B41J2/14209 , B41J2202/11 , F04B17/003 , F04B43/046 , G02B6/3538 , G02B6/3546 , G02B6/3564 , G02B6/3578 , H01L27/20 , H01L41/0831 , H01L41/273 , Y10T29/42 , Y10T29/49155 , Y10T156/107
摘要： A piezoelectric actuator 1 capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell 3 defined by two side walls 6, a substrate 2 and a ceiling wall 7; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls 6 comprising piezoelectric/electrostrictive devices 4, and the piezoelectric/electrostrictive devices 4 being capable of changing a volume of the cell 3 by displacement of the walls. Each of the piezoelectric/electrostrictive devices 4 comprises a plurality of layered piezoelectric/electrostrictive bodies 14 and electrodes 18, 19 which are alternately stacked, and end portions of the electrodes 18, 19 are embedded in the piezoelectric/electrostrictive bodies 14 in at least the internal side of the cell 3.
摘要翻译：一种能够以高电场强度驱动的压电致动器1，获得较大的位移并且电极的导电可靠性高，并且包括：由两个侧壁6，基板2和顶板限定的至少一个单元3 墙7; 两个侧壁设置在基板上并被顶壁覆盖以限定一个单元，至少两个侧壁6包括压电/电致伸缩装置4，并且压电/电致伸缩装置4能够改变细胞3通过置换壁。每个压电/电致伸缩器件4包括多个层叠的压电/电致伸缩体14和交替层叠的电极18,19，并且电极18,19的端部至少嵌入压电/电致伸缩体14中电池内侧3。

35. 发明授权

US07161281B2 Less-dust-generative piezoelectric/electrostrictive device and manufacturing method 失效
标题翻译：小生成压电/电致伸缩装置及其制造方法
公开(公告)号：US07161281B2
公开(公告)日：2007-01-09
申请号：US10678849
申请日：2003-10-03
申请人： Yukihisa Takeuchi , Koji Kimura , Tatsuo Kawaguchi
发明人： Yukihisa Takeuchi , Koji Kimura , Tatsuo Kawaguchi
IPC分类号： H01L41/08
CPC分类号： H01L41/0986 , H01L27/20 , H01L41/338 , H01L41/43
摘要： There is disclosed a piezoelectric/electrostrictive device being less-particle-generative and capable of continuously realizing a stable displacement operation over a long period of time or being large in displacement amount and high in generative force and the like. This less-dust-generative piezoelectric/electrostrictive device 1 comprises a plurality of piezoelectric/electrostrictive elements 31 including a plurality of piezoelectric/electrostrictive members 4 and at least one pair of electrodes formed on the side surface of each piezoelectric/electrostrictive member 4, and the members are set up on a thick ceramic substrate 2. In this less-dust-generative matrix-type piezoelectric/electrostrictive device 1, a plurality of piezoelectric/electrostrictive elements 31 substantially having pillar shapes are set up in a matrix form. The ceramic substrate 2 is formed integrally with the piezoelectric/electrostrictive elements 31. The side surface of each piezoelectric/electrostrictive member 4 on which the electrodes 18, 19 are formed are formed as a fired, but unprocessed face.
摘要翻译：公开了一种压电/电致伸缩装置，其具有较少的颗粒生成能力并且能够在长时间段内连续实现稳定的位移操作或具有大的位移量和高的生成力等。这种小生成压电/电致伸缩器件1包括多个压电/电致伸缩元件31，包括多个压电/电致伸缩元件4和形成在每个压电/电致伸缩元件4的侧表面上的至少一对电极，将构件设置在厚陶瓷基板2上。在这种较少粉尘的矩阵型压电/电致伸缩装置1中，基本上具有柱形的多个压电/电致伸缩元件31被设置成矩阵形式。陶瓷基板2与压电/电致伸缩元件31一体形成。形成有电极18,19的各压电/电致伸缩构件4的侧表面形成为烧制但未加工的面。

36. 发明申请

US20060197413A9 Actuator Device 有权
标题翻译：执行机构
公开(公告)号：US20060197413A9
公开(公告)日：2006-09-07
申请号：US10896769
申请日：2004-07-22
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
IPC分类号： H01L41/04
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
摘要翻译：致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。多个间隔件设置在第一板构件和基板之间，形成m个单元。每个致动器具有形成在基板上的空腔，振动部分和固定部分。第一板构件的刚性大于致动器的振动部的刚性。

37. 发明授权

US06968603B2 Method of producing a piezoelectric/electrostrictive device 失效
标题翻译：制造压电/电致伸缩器件的方法
公开(公告)号：US06968603B2
公开(公告)日：2005-11-29
申请号：US10122658
申请日：2002-04-15
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L41/08 , H01L41/083 , H01L41/09 , H01L41/22 , H01L41/338 , H02N2/00 , H04R17/00 , H01L41/04 , H01L41/18
CPC分类号： H01L41/0946 , H01L41/27 , Y10T29/42 , Y10T29/49789 , Y10T29/49798
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.
摘要翻译：压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。一对薄壁部分的内壁，可移动部分的内壁和固定部分的内壁都由一个孔形成。压电/电致伸缩装置还包括从可动部分的内壁延伸到固定部分的内壁的至少一个梁部分。

38. 发明授权

US06925693B2 Method of fabricating a piezoelectric/electrostrictive device 失效
标题翻译：制造压电/电致伸缩器件的方法
公开(公告)号：US06925693B2
公开(公告)日：2005-08-09
申请号：US09963696
申请日：2001-09-26
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
IPC分类号： H01L41/09 , H01L41/24 , H04R17/00
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49002 , Y10T29/4902 , Y10T29/49078 , Y10T29/49126 , Y10T29/49798 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.
摘要翻译：一种制造压电/电致伸缩器件的方法，包括驱动部分，可移动部分和用于保持驱动部分和可动部分的固定部分。驱动部分包括彼此面对的一对薄板部分，以及形成在至少一个薄板部分的外表面的至少一部分上的薄膜状压电/电致伸缩元件。形成包括构成薄板之一的至少一个陶瓷生片和至少形成有至少一个孔的至少一个陶瓷生片的陶瓷生坯层压体。将陶瓷生坯层压体烧结以制造陶瓷层压板。在陶瓷层叠体的薄板部分的外表面上通过成膜方法形成压电/电致伸缩元件。然后用形成在其上的压电/电致伸缩元件切割陶瓷层压体。

39. 发明申请

US20050168109A1 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US20050168109A1
公开(公告)日：2005-08-04
申请号：US10959420
申请日：2004-10-06
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
IPC分类号： B06B1/06 , H01L41/08 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/338 , H02N2/00 , H02N2/02 , H02N2/04
CPC分类号： H01L41/094 , H01L41/0831 , H01L41/0946 , H01L41/1132 , H01L41/273
摘要： A piezoelectric/electrostrictive device is provided, including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the thin plate sections. The piezoelectric/electrostrictive device also includes movable sections defined by at least first end portions of the thin plate sections and a material which is different from that of the thin plate section
摘要翻译：提供一种压电/电致伸缩器件，包括一对相互相对的薄板部分和用于支撑薄板部分的固定部分。压电/电致伸缩元件布置在每个薄板部分上。压电/电致伸缩装置还包括由薄板部分的至少第一端部限定的可移动部分和与薄板部分不同的材料

40. 发明申请

US20050001514A1 Cell driving type piezoelectric/electrostrictive actuator and method of manufacturing the same 失效
标题翻译：电池驱动型压电/电致伸缩致动器及其制造方法
公开(公告)号：US20050001514A1
公开(公告)日：2005-01-06
申请号：US10855448
申请日：2004-05-27
申请人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
发明人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , F04B9/00 , F04B17/00 , F04B43/04 , G02B6/35 , H01L27/20 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/273 , H01L41/339 , H02N2/00
CPC分类号： B41J2/14209 , B41J2202/11 , F04B17/003 , F04B43/046 , G02B6/3538 , G02B6/3546 , G02B6/3564 , G02B6/3578 , H01L27/20 , H01L41/0831 , H01L41/273 , Y10T29/42 , Y10T29/49155 , Y10T156/107
摘要： A piezoelectric actuator 1 capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell 3 defined by two side walls 6, a substrate 2 and a ceiling wall 7; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls 6 comprising piezoelectric/electrostrictive devices 4, and the piezoelectric/electrostrictive devices 4 being capable of changing a volume of the cell 3 by displacement of the walls. Each of the piezoelectric/electrostrictive devices 4 comprises a plurality of layered piezoelectric/electrostrictive bodies 14 and electrodes 18, 19 which are alternately stacked, and end portions of the electrodes 18, 19 are embedded in the piezoelectric/electrostrictive bodies 14 in at least the internal side of the cell 3.
摘要翻译：一种能够以高电场强度驱动的压电致动器1，获得较大的位移并且电极的导电可靠性高，并且包括：由两个侧壁6，基板2和顶板限定的至少一个单元3 墙7; 两个侧壁设置在基板上并被顶壁覆盖以限定一个单元，至少两个侧壁6包括压电/电致伸缩装置4，并且压电/电致伸缩装置4能够改变细胞3通过置换壁。每个压电/电致伸缩器件4包括多个层叠的压电/电致伸缩体14和交替层叠的电极18,19，并且电极18,19的端部至少嵌入压电/电致伸缩体14中电池内侧3。

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