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31. 发明申请

US20090179000A1 Method of manufacturing inkjet printhead and inkjet printhead manufactured using the same 有权
标题翻译：制造使用其制造喷墨打印头和喷墨打印头的方法
公开(公告)号：US20090179000A1
公开(公告)日：2009-07-16
申请号：US12213767
申请日：2008-06-24
申请人： Jong-jin Park , Su-min Kim , Jin-baek Kim , Yong-ung Ha , Yong-seop Yoon , Byung-ha Park
发明人： Jong-jin Park , Su-min Kim , Jin-baek Kim , Yong-ung Ha , Yong-seop Yoon , Byung-ha Park
IPC分类号： G11B5/127 , G03C1/73 , C08G61/02
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , G03F7/0233 , G03F7/0385 , G03F7/0392 , Y10T29/49401
摘要： A method of manufacturing an inkjet printhead, in which a solvent included in a positive photoresist composition or in a non-photosensitive soluble polymer composition which is used to form a sacrificial layer has a different polarity from that of a solvent included in a negative photoresist composition that is used to form at least one of a channel forming layer and a nozzle layer.
摘要翻译：一种制造喷墨打印头的方法，其中包括在正性光致抗蚀剂组合物中的溶剂或用于形成牺牲层的非感光性可溶性聚合物组合物中的溶剂与负性光致抗蚀剂组合物中包含的溶剂的极性不同用于形成通道形成层和喷嘴层中的至少一个。

32. 发明授权

US08293123B2 Method of manufacturing inkjet printhead and inkjet printhead manufactured using the same 有权
标题翻译：制造使用其制造喷墨打印头和喷墨打印头的方法
公开(公告)号：US08293123B2
公开(公告)日：2012-10-23
申请号：US12213767
申请日：2008-06-24
申请人： Jong-jin Park , Su-min Kim , Jin-baek Kim , Yong-ung Ha , Yong-seop Yoon , Byung-ha Park
发明人： Jong-jin Park , Su-min Kim , Jin-baek Kim , Yong-ung Ha , Yong-seop Yoon , Byung-ha Park
IPC分类号： G01D15/00
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , G03F7/0233 , G03F7/0385 , G03F7/0392 , Y10T29/49401
摘要： A method of manufacturing an inkjet printhead, in which a solvent included in a positive photoresist composition or in a non-photosensitive soluble polymer composition which is used to form a sacrificial layer has a different polarity from that of a solvent included in a negative photoresist composition that is used to form at least one of a channel forming layer and a nozzle layer.
摘要翻译：一种制造喷墨打印头的方法，其中包括在正性光致抗蚀剂组合物中的溶剂或用于形成牺牲层的非感光性可溶性聚合物组合物中的溶剂与负性光致抗蚀剂组合物中包含的溶剂的极性不同用于形成通道形成层和喷嘴层中的至少一个。

33. 发明授权

US06947197B2 Micromirror actuator 有权
标题翻译：微镜执行器
公开(公告)号：US06947197B2
公开(公告)日：2005-09-20
申请号：US10015953
申请日：2001-12-17
申请人： Yong-seop Yoon , Young-hoon Min , Ki-deok Bae
发明人： Yong-seop Yoon , Young-hoon Min , Ki-deok Bae
IPC分类号： G02B26/08 , G02B6/35 , G02B26/00
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/3546 , G02B6/358 , G02B6/3584
摘要： A micromirror actuator having a micromirror, which is operative using an electrostatic force with a low voltage and wherein an electrostatic force opposite to the driving force of the micromirror is blocked, and a method for manufacturing the same, are provided. The micromirror actuator includes a substrate, a trench in which at least one electrode is formed, supporting posts installed at opposite sides of the trench, a torsion bar supported by the supporting posts, and the micromirror including a driving unit which faces the trench when the micromirror is in a horizontal state, and a reflecting unit, which is elastically rotated about the torsion bar, to reflect an optical signal. The actuator also includes a shielding electrode installed to face the reflecting unit when the micromirror is in a horizontal state and to block an electrostatic force occurring between the reflecting unit and the electrode.
摘要翻译：一种具有微镜的微镜致动器，其使用具有低电压的静电力操作，并且其中阻止与微反射镜的驱动力相反的静电力，并提供其制造方法。微反射镜致动器包括基板，形成有至少一个电极的沟槽，安装在沟槽的相对侧的支撑柱，由支撑柱支撑的扭力杆，并且微反射镜包括当所述沟槽朝向沟槽时的驱动单元微镜处于水平状态，并且反射单元围绕扭杆弹性旋转以反射光信号。致动器还包括当微镜处于水平状态时安装成面向反射单元的屏蔽电极，并且阻挡反射单元和电极之间产生的静电力。

34. 发明授权

US07329553B2 Method of fabricating one-way transparent optical system 有权
标题翻译：制造单向透明光学系统的方法
公开(公告)号：US07329553B2
公开(公告)日：2008-02-12
申请号：US11290412
申请日：2005-12-01
申请人： Yong-seop Yoon , Byoung-ho Cheong , Seok-whan Chung
发明人： Yong-seop Yoon , Byoung-ho Cheong , Seok-whan Chung
IPC分类号： H01L21/00
CPC分类号： H01L51/5281 , G02B1/11 , G02B5/3025 , H01L33/44
摘要： A method of fabricating a one-way transparent optical system by which external light is effectively intercepted and internal light passes nearly without loss is provided. The method includes: forming a photoresist on an upper surface of a transparent substrate; heating and carbonizing the photoresist to form a black body layer; patterning the black body layer to form a plurality of light-absorbing materials on the transparent substrate; and forming protrusion structures having a shape of a convex lens shape for refracting incident light toward a corresponding light-absorbing material of the light-absorbing materials, on the transparent substrate on which the light-absorbing materials are formed.
摘要翻译：提供了一种制造单向透明光学系统的方法，其中外部光被有效地截获并且内部光线几乎没有损失地通过。该方法包括：在透明基板的上表面上形成光致抗蚀剂; 加热和碳化光致抗蚀剂以形成黑体层; 图案化黑体层以在透明基板上形成多个光吸收材料; 以及在其上形成有光吸收材料的透明基板上形成具有用于将入射光折射到相应的光吸收材料的光吸收材料的凸透镜形状的突起结构。

35. 发明授权

US07042137B2 Actuator using organic film membrane and manufacturing method thereof 有权
公开(公告)号：US07042137B2
公开(公告)日：2006-05-09
申请号：US10448337
申请日：2003-05-30
申请人： Yong-seop Yoon
发明人： Yong-seop Yoon
IPC分类号： H01L41/08
CPC分类号： H01L41/0973 , H02N1/006
摘要： An actuator using an organic film membrane is provided and includes a substrate having a cavity with a bottom portion at a predetermined depth in the upper center, an organic film membrane attached on the upper surface of the substrate to close the upper portion of the cavity, and a driving electrode arranged on the organic film membrane. The driving electrode is driven by a piezoelectricity force or an electrostatic force. The membrane of the actuator can be easily fabricated, and the size of the actuator can be reduced while improving a yield.

36. 发明授权

US06894819B2 Micromirror actuator and method of manufacturing the same 失效
标题翻译：微镜致动器及其制造方法
公开(公告)号：US06894819B2
公开(公告)日：2005-05-17
申请号：US10437012
申请日：2003-05-14
申请人： Yong-seop Yoon
发明人： Yong-seop Yoon
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： G02B26/0841 , B81B3/0062 , Y10S359/904
摘要： A micromirror actuator includes a first substrate, at least one lower electrode, a micromirror, a two part second substrate, an upper electrode, a pair of support posts, and torsion bars. In the first substrate, a trench having a predetermined shape is formed. The lower electrode is formed in the trench. The micromirror faces the trench to be operative to pivot due to electrostatic forces and selectively to reflect incident light depending on pivoting positions thereof. The parts of the second substrate are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevent the deformation of the micromirror. The upper electrode is formed on a portion of the second substrate on the first substrate and applies power to the micromirror. The pair of support posts protrude from the first substrate beside both sides of the trench. The torsion bars connect both sides of the micromirror to the pair of support posts.
摘要翻译：微镜致动器包括第一基板，至少一个下电极，微镜，二部分第二基板，上电极，一对支撑柱和扭杆。在第一衬底中形成具有预定形状的沟槽。下电极形成在沟槽中。微镜面向沟槽以由于静电力而可操作地枢转并且选择性地反射其入射光，这取决于其枢转位置。第二基板的部分分别形成在第一基板的一部分上并且在微反射镜的下方，并且防止微镜的变形。上电极形成在第一基板上的第二基板的一部分上，并向微镜施加电力。一对支撑柱从沟槽两侧的第一基板突出。扭杆将微镜的两侧连接到一对支撑柱。

37. 发明授权

US06490073B2 Microactuator for optical switching and method for fabricating the same 有权
标题翻译：光开关微致动器及其制造方法
公开(公告)号：US06490073B2
公开(公告)日：2002-12-03
申请号：US09842648
申请日：2001-04-27
申请人： Yong-seop Yoon
发明人： Yong-seop Yoon
IPC分类号： G02B2608
CPC分类号： G02B6/357 , G02B6/3512 , G02B6/3546 , G02B6/358 , G02B6/3584
摘要： A microactuator includes a wafer; a lower electrode formed on an upper surface of the wafer; a side electrode formed on the upper surface of the wafer in a perpendicular relation with the lower electrode; a pair of supporting posts protruding from the upper surface of the wafer, spaced from the lower electrode at a predetermined distance, respectively; a reflector spaced from the side electrode at a predetermined distance, and facing the lower electrode; and a pair of torsion springs disposed between the reflector and the supporting posts, and elastically supporting the reflector enabling pivoting movement of the reflector. By employing the side electrode, the microactuator can be driven with a low voltage. Also, since the side electrode serves as a stopper, the microactuator can pivot the reflector at an exact desired angle, without having to use a separate device.
摘要翻译：微致动器包括晶片; 形成在所述晶片的上表面上的下电极; 与所述下电极垂直的方式形成在所述晶片的上表面上的侧电极; 从所述晶片的上表面突出的一对支撑柱，分别与所述下电极隔开预定距离; 与所述侧电极隔开预定距离并且面向所述下电极的反射器; 以及设置在所述反射器和所述支撑柱之间的一对扭转弹簧，并且弹性地支撑所述反射器，使得所述反射器能够枢转运动。通过使用侧电极，可以以低电压驱动微致动器。此外，由于侧电极用作止动器，微致动器可以以确切的所需角度枢转反射器，而不必使用单独的装置。

38. 发明授权

US5978128A Deformable mirror device 失效
标题翻译：可变形镜装置
公开(公告)号：US5978128A
公开(公告)日：1999-11-02
申请号：US128441
申请日：1998-08-04
申请人： Yong-seop Yoon
发明人： Yong-seop Yoon
IPC分类号： H04N5/74 , G02B26/08
CPC分类号： G02B26/0841
摘要： A deformable mirror device for changing a proceeding path of an incident light includes a substrate, a pair of posts protruding from the upper surface of the substrate and spaced a predetermined distance from each other, an electrode formed on the upper surface of the substrate, a reflection mirror arranged to face the electrode by being supported by the posts, and first and second support pieces having predetermined rigidities for supporting the reflection mirror. The support pieces are connected between the reflection mirror and the posts so that an inclination of the reflection mirror can be adjusted by an electrostatic attraction between the electrode and the reflection mirror. The electrode is arranged to be offset from the reflection mirror such that a magnitude of the forces applied to the electrode at the positions between each of the first and second support pieces and the reflection mirror differ from each other. Therefore, in the deformable mirror device, the path of light can be easily changed with a low driving voltage.
摘要翻译：用于改变入射光的前进路径的可变形反射镜装置包括基板，从基板的上表面突出并且彼此隔开预定距离的一对柱，形成在基板的上表面上的电极，反射镜，被布置为通过由柱支撑而面对电极;以及第一和第二支撑件具有用于支撑反射镜的预定刚度。支撑件连接在反射镜和柱之间，使得可以通过电极和反射镜之间的静电吸引来调节反射镜的倾斜度。电极被布置成从反射镜偏移，使得在第一和第二支撑件和反射镜之间的位置处施加到电极的力的大小彼此不同。因此，在可变形反射镜装置中，能够以低的驱动电压容易地改变光的路径。

39. 发明申请

US20060115914A1 Method of fabricating one-way transparent optical system 有权
标题翻译：制造单向透明光学系统的方法
公开(公告)号：US20060115914A1
公开(公告)日：2006-06-01
申请号：US11290412
申请日：2005-12-01
申请人： Yong-seop Yoon , Byoung-ho Cheong , Seok-whan Chung
发明人： Yong-seop Yoon , Byoung-ho Cheong , Seok-whan Chung
IPC分类号： H01L21/00
CPC分类号： H01L51/5281 , G02B1/11 , G02B5/3025 , H01L33/44
摘要： A method of fabricating a one-way transparent optical system by which external light is effectively intercepted and internal light passes nearly without loss is provided. The method includes: forming a photoresist on an upper surface of a transparent substrate; heating and carbonizing the photoresist to form a black body layer; patterning the black body layer to form a plurality of light-absorbing materials on the transparent substrate; and forming protrusion structures having a shape of a convex lens shape for refracting incident light toward a corresponding light-absorbing material of the light-absorbing materials, on the transparent substrate on which the light-absorbing materials are formed.
摘要翻译：提供了一种制造单向透明光学系统的方法，其中外部光被有效地截获并且内部光线几乎没有损失地通过。该方法包括：在透明基板的上表面上形成光致抗蚀剂; 加热和碳化光致抗蚀剂以形成黑体层; 图案化黑体层以在透明基板上形成多个光吸收材料; 以及在其上形成有光吸收材料的透明基板上形成具有用于将入射光折射到相应的光吸收材料的光吸收材料的凸透镜形状的突起结构。

40. 发明授权

US06815361B1 Method of fabricating anti-stiction micromachined structures 有权
标题翻译：制造抗静电微加工结构的方法
公开(公告)号：US06815361B1
公开(公告)日：2004-11-09
申请号：US09976316
申请日：2001-10-15
申请人： Ki-deok Bae , Yong-seop Yoon
发明人： Ki-deok Bae , Yong-seop Yoon
IPC分类号： H01L21302
CPC分类号： B81B3/0005
摘要： A method of fabricating micro-electromechanical system (MEMS) structures that can prevent stiction between a microstructure and a substrate or adjacent structures after etching for releasing the microstructure is provided. In a micromaching process for fabricating a microstructure suspended above a substrate using a sacrificial layer, the fabricating method includes stacking an anti-stiction layer, which can be removed by dry etching, before or after stacking a sacrificial layer.
摘要翻译：提供了一种制造微机电系统（MEMS）结构的方法，其可以防止微蚀结构与衬底或相邻结构之间的粘结，在蚀刻后释放微结构。在用于使用牺牲层制造悬浮在衬底上的微结构的微加工方法中，制造方法包括在层叠牺牲层之前或之后堆叠可通过干法蚀刻去除的抗静电层。

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