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    • 1. 发明授权
    • Micromirror actuator
    • 微镜执行器
    • US06947197B2
    • 2005-09-20
    • US10015953
    • 2001-12-17
    • Yong-seop YoonYoung-hoon MinKi-deok Bae
    • Yong-seop YoonYoung-hoon MinKi-deok Bae
    • G02B26/08G02B6/35G02B26/00
    • G02B6/357G02B6/3518G02B6/3546G02B6/358G02B6/3584
    • A micromirror actuator having a micromirror, which is operative using an electrostatic force with a low voltage and wherein an electrostatic force opposite to the driving force of the micromirror is blocked, and a method for manufacturing the same, are provided. The micromirror actuator includes a substrate, a trench in which at least one electrode is formed, supporting posts installed at opposite sides of the trench, a torsion bar supported by the supporting posts, and the micromirror including a driving unit which faces the trench when the micromirror is in a horizontal state, and a reflecting unit, which is elastically rotated about the torsion bar, to reflect an optical signal. The actuator also includes a shielding electrode installed to face the reflecting unit when the micromirror is in a horizontal state and to block an electrostatic force occurring between the reflecting unit and the electrode.
    • 一种具有微镜的微镜致动器,其使用具有低电压的静电力操作,并且其中阻止与微反射镜的驱动力相反的静电力,并提供其制造方法。 微反射镜致动器包括基板,形成有至少一个电极的沟槽,安装在沟槽的相对侧的支撑柱,由支撑柱支撑的扭力杆,并且微反射镜包括当所述沟槽朝向沟槽时的驱动单元 微镜处于水平状态,并且反射单元围绕扭杆弹性旋转以反射光信号。 致动器还包括当微镜处于水平状态时安装成面向反射单元的屏蔽电极,并且阻挡反射单元和电极之间产生的静电力。