会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 36. 发明申请
    • Through Glass Via Manufacturing Process
    • 通过玻璃制造工艺
    • US20110229687A1
    • 2011-09-22
    • US12727775
    • 2010-03-19
    • Shiqun GuXia LiYiming Li
    • Shiqun GuXia LiYiming Li
    • B32B3/10B44C1/22
    • H01L23/15H01L21/486H01L23/49827H01L2924/0002H05K3/0041Y10T428/24273H01L2924/00
    • Fabrication of a through glass via in a relatively thick glass substrate includes patterning a through glass via hard mask on a surface of the glass substrate. The fabrication also includes wet etching a portion of the glass substrate, through the hard mask, to create a partial through glass via. The wet etching may involve applying a vapor of an oxide etch chemical, such as HF and XeF6, or applying a wet oxide etch chemical, such as HF and XeF6. The fabrication further includes passivating the etched partial through glass via, removing bottom passivation from the partial through glass via, and repeating the etching, passivating and removing to create the through glass via. The resulting through glass via has a scalloped side wall, a vertical profile and a high aspect ratio.
    • 在相对厚的玻璃基板中制造直通玻璃通孔包括在玻璃基板的表面上通过硬掩模图案化通孔玻璃。 该制造还包括通过硬掩模湿法蚀刻玻璃基底的一部分,以产生部分透过玻璃通孔。 湿蚀刻可以包括施加氧化物蚀刻化学品的蒸气,例如HF和XeF 6,或者施加湿氧化物蚀刻化学品,例如HF和XeF 6。 该制造还包括钝化蚀刻的部分通过玻璃通孔,从部分通过玻璃通孔去除底部钝化,并重复蚀刻,钝化和去除以产生通孔玻璃通孔。 所产生的通过玻璃通孔具有扇形侧壁,垂直轮廓和高纵横比。
    • 37. 发明申请
    • THROUGH-SILICON VIA FABRICATION WITH ETCH STOP FILM
    • 通过硅胶制成的薄膜
    • US20110227230A1
    • 2011-09-22
    • US12727750
    • 2010-03-19
    • Shiqun GuYiming LiUrmi Ray
    • Shiqun GuYiming LiUrmi Ray
    • H01L23/48H01L21/768
    • H01L21/76898
    • For a semiconductor wafer substrate having an inter layer dielectric, a through-silicon via may be formed in the substrate by first depositing an etch stop film on top of the inter layer dielectric, followed by etching an opening through the etch stop film, the interlayer dielectric, and into the substrate. A dielectric liner is then deposited over the etch stop film and into the opening. For some embodiments, the dielectric liner may be etched away except for those portions adhering to the sidewall of the opening. Then a conductive material may be deposited into the opening and on the etch stop film. The excess conductive material may then be removed, and for some embodiments the etch stop film may also be removed.
    • 对于具有层间电介质的半导体晶片衬底,可以在衬底中形成通硅通孔,首先在层间电介质的顶部上沉积蚀刻停止膜,然后蚀刻通过蚀刻停止膜,中间层 电介质,并进入衬底。 然后将电介质衬垫沉积在蚀刻停止膜上并进入开口中。 对于一些实施例,除了粘附到开口的侧壁上的那些部分之外,电介质衬垫可被蚀刻掉。 然后可以将导电材料沉积到开口中和蚀刻停止膜上。 然后可以除去过量的导电材料,并且对于一些实施例,也可以去除蚀刻停止膜。