会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 39. 发明授权
    • Method for manufacturing optical waveguide and optical waveguide manufactured by the method
    • 通过该方法制造光波导和光波导的方法
    • US08938135B2
    • 2015-01-20
    • US12678547
    • 2008-09-18
    • Tatsuya MakinoMasatoshi YamaguchiAtsushi Takahashi
    • Tatsuya MakinoMasatoshi YamaguchiAtsushi Takahashi
    • G02B6/12G02B1/12G02B6/138G02B6/136G03F7/32
    • G02B6/138G02B6/1221G02B6/136G03F7/322
    • The present invention relates to a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern and a step for carrying out development in an alkaline developer containing a divalent or higher-valent metal ion and a production process for an optical waveguide comprising a step for forming a photosensitive resin layer comprising a photosensitive resin composition on a substrate, a step for exposing a desired pattern, a step for carrying out development in an alkaline developer and a step for carrying out washing with a cleaning liquid containing a divalent or higher-valent metal ion or an acid aqueous solution.Capable of being provided are a production process for an optical waveguide which is excellent in a transparency and a reliability and an optical waveguide produced by the above production process.
    • 光波导的制造方法技术领域本发明涉及一种光波导的制造方法,其包括在基板上形成感光性树脂组合物的感光性树脂层的工序,曝光所需图案的工序和在含有 二价以上的金属离子和光波导的制造方法,其特征在于,包括在基板上形成感光性树脂组合物的感光性树脂层的工序,曝光所需图案的工序,碱性显影工序 显影剂和用含有二价或更高价金属离子或酸性水溶液的清洗液进行洗涤的步骤。 能够提供透光性和可靠性优异的光波导的制造方法以及通过上述制造方法制造的光波导。