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    • 3. 发明授权
    • Optical waveguide and method for manufacturing the same
    • 光波导及其制造方法
    • US08620127B2
    • 2013-12-31
    • US12808537
    • 2008-12-11
    • Masatoshi YamaguchiTomoaki ShibataTakeshi OohashiAtsushi Takahashi
    • Masatoshi YamaguchiTomoaki ShibataTakeshi OohashiAtsushi Takahashi
    • G02B6/10
    • G02B6/138G02B6/1221
    • The invention provides an optical waveguide including a resin substrate containing an inorganic filler, and at least a UV-absorbing layer, a lower cladding layer, a patterned core layer, and an upper cladding layer laminated above the resin substrate in this order, wherein the core layer has been patterned through light exposure and development, and the UV-absorbing layer has a thickness of 10 to 50 μm, and a method for producing an optical waveguide, including a step of forming a UV-absorbing layer on a resin substrate containing an inorganic filler; a step of forming a lower cladding layer on the UV-absorbing layer; a step of forming a core layer on the lower cladding layer; a step of subjecting the core layer to light exposure to thereby transfer a pattern having a given shape to the core layer; a step of developing the core layer to thereby form a core pattern; and a step of forming an upper cladding layer on the patterned core layer. According to the present invention, an optical waveguide having a high-resolution core pattern can be produced.
    • 本发明提供了一种光波导,其包括含有无机填料的树脂基材,以及至少层叠在树脂基板上方的UV吸收层,下包层,图案化芯层和上包层,其中, 核心层通过曝光和显影进行图案化,并且UV吸收层的厚度为10至50μm,以及制造光波导的方法,包括在树脂基板上形成UV吸收层的步骤,所述树脂基板含有 无机填料; 在UV吸收层上形成下包层的步骤; 在下包层上形成芯层的步骤; 对芯层进行曝光的步骤,从而将具有给定形状的图案转印到芯层; 显影核心层从而形成芯图案的步骤; 以及在图案化芯层上形成上包层的步骤。 根据本发明,可以制造具有高分辨率芯图案的光波导。