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31. 发明授权

US6154470A Molecular fluorine (F.sub.2) laser with narrow spectral linewidth 失效
标题翻译：具有窄光谱线宽的分子氟（F2）激光
公开(公告)号：US6154470A
公开(公告)日：2000-11-28
申请号：US317527
申请日：1999-05-24
申请人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
发明人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
IPC分类号： H01S3/223 , H01S3/03 , H01S3/08 , H01S3/098 , H01S3/106 , H01S3/137 , H01S3/225
CPC分类号： H01S3/225 , H01S3/08004 , H01S3/08036 , H01S3/1062 , H01S3/2258
摘要： A molecular fluorine (F.sub.2) laser is provided wherein the gas mixture comprises molecular fluorine for generating a spectral emission including two or three closely spaced lines around 157 nm. An etalon provides line selection such that the output beam only includes one of these lines. The etalon may also serve to outcouple the beam and/or narrow the selected line. Alternatively, a prism provides the line selection and the etalon narrows the selected line. The etalon may be a resonator reflector which also selects a line, while another element outcouples the beam. The etalon plates, preferably uncoated, comprise a material that is transparent at 157 nm, such as CaF.sub.2, MgF.sub.2, LiF.sub.2, BaF.sub.2, SrF.sub.2, quartz and fluorine doped quartz. The etalon plates are separated by spacers comprising a material having a low thermal expansion constant, such as invar, zerodur.RTM., ultra low expansion glass, and quartz. A gas such as helium or a solid such as CaF.sub.2 that does not absorb radiation 157 nm fills the gap between the etalon plates, or the gap is evacuated. The gas mixture preferably further includes neon as a buffer gas. Another etalon may be used for line narrowing. One or more of a highly reflective mirror, a high finesse etalon or a prism with a highly reflective back surface may serve as a highly reflective resonator reflector. Any of one or more etalons, a prism, a brewster plate and a highly or partially reflective mirror may seal the laser discharge chamber.
摘要翻译：提供分子氟（F2）激光器，其中气体混合物包含用于产生包括在157nm附近的两个或三个紧密间隔的线的光谱发射的分子氟。标准具提供线选择，使得输出光束仅包括这些线之一。标准具还可用于将光束外耦合和/或使所选择的线变窄。或者，棱镜提供线选择并且标准具缩小所选行。标准具可以是也选择一条线的谐振器反射器，而另一个元件将光束耦合。优选未涂覆的标准具板包括在157nm下透明的材料，例如CaF 2，MgF 2，LiF 2，BaF 2，SrF 2，石英和氟掺杂的石英。标准具板由包括具有低热膨胀常数的材料的间隔物分离，例如invar，zerodur TM，超低膨胀玻璃和石英。诸如氦气或诸如CaF 2的不吸收辐射的固体的气体157nm填充了标准具板之间的间隙，或间隙被排空。气体混合物优选还包括作为缓冲气体的氖。另一种标准具可用于线窄。高反射镜，高精度标准具或具有高反射背面的棱镜中的一个或多个可以用作高反射谐振器反射器。一个或多个标准具，棱镜，布鲁斯特板和高度或部分反射镜中的任何一个可以密封激光放电室。

32. 发明授权

US09083140B2 High-power CW fiber-laser 有权
标题翻译：大功率CW光纤激光器
公开(公告)号：US09083140B2
公开(公告)日：2015-07-14
申请号：US13074593
申请日：2011-03-29
申请人： John D. Minelly , Sergei V. Govorkov , Luis A. Spinelli , Douglas Anthon , Jay Michael Ingalls
发明人： John D. Minelly , Sergei V. Govorkov , Luis A. Spinelli , Douglas Anthon , Jay Michael Ingalls
IPC分类号： H01S3/30 , H01S3/042 , H01S3/067 , H01S3/0941 , H01S3/04 , H01S3/08 , H01S3/094 , H01S3/105 , H01S3/106 , H01S3/16 , H01S3/17 , H01S5/40
CPC分类号： H01S3/042 , H01S3/0407 , H01S3/06704 , H01S3/06733 , H01S3/0804 , H01S3/08059 , H01S3/094015 , H01S3/09415 , H01S3/105 , H01S3/1062 , H01S3/1618 , H01S3/173 , H01S5/4012 , H01S2301/03
摘要： A CW fiber-laser includes a gain fiber having a reflector proximity-coupled to one end, with the other end left uncoated. A laser resonator is defined by the reflector and the uncoated end of the gain-fiber. Pump-radiation from two fast-axis diode-laser bar stacks is combined and focused into the uncoated end of the gain-fiber for energizing the fiber. Laser radiation resulting from the energizing is delivered from the uncoated end of the gain-fiber and separated from the pump-radiation by a dichroic mirror.
摘要翻译： CW光纤激光器包括增益光纤，其具有与一端近似耦合的反射器，另一端未被涂覆。激光谐振器由反射器和增益光纤的未涂覆端限定。来自两个快轴二极管激光棒叠层的泵浦辐射被组合并聚焦到增益光纤的未涂覆端，用于激励光纤。由激励产生的激光辐射从增益光纤的未涂覆端传送并通过分色镜与泵浦辐射分离。

33. 发明授权

US08170073B2 Optically-pumped external-cavity surface-emitting semiconductor lasers with front-cooled gain-structures 有权
标题翻译：具有前冷增益结构的光泵浦外腔表面发射半导体激光器
公开(公告)号：US08170073B2
公开(公告)日：2012-05-01
申请号：US12558315
申请日：2009-09-11
申请人： Sergei V. Govorkov , R. Russel Austin
发明人： Sergei V. Govorkov , R. Russel Austin
IPC分类号： H01S3/04
CPC分类号： H01S5/183 , H01S3/07 , H01S3/08054 , H01S3/0816 , H01S3/083 , H01S3/1062 , H01S3/1066 , H01S5/0213 , H01S5/0217 , H01S5/02484 , H01S5/041 , H01S5/14
摘要： A semiconductor gain-structure functions as a gain-element in a laser-resonator. The gain-structure is bonded to a diamond heat-spreader that is peripherally cooled by a heat-sink configured to allow access to the gain-structure by laser-radiation circulating in the laser-resonator. In one example, the gain-structure is used as a transmissive gain-structure in a traveling-wave ring-resonator. In another example, the gain-structure surmounts mirror-structure which functions as an end-mirror of a standing-wave laser-resonator.
摘要翻译：半导体增益结构在激光谐振器中用作增益元件。增益结构被结合到金刚石散热器，该金刚石散热器通过被配置为允许通过在激光谐振器中循环的激光辐射而进入增益结构的散热器周边地冷却。在一个示例中，增益结构用作行波环形谐振器中的透射增益结构。在另一示例中，增益结构超越了用作驻波激光谐振器的端镜的镜面结构。

34. 发明授权

US07724785B2 Multiple pulsed-laser system for silicon crystallization 有权
标题翻译：用于硅结晶的多脉冲激光系统
公开(公告)号：US07724785B2
公开(公告)日：2010-05-25
申请号：US11824220
申请日：2007-06-29
申请人： Luis A. Spinelli , Sergei V. Govorkov
发明人： Luis A. Spinelli , Sergei V. Govorkov
IPC分类号： H01S3/11 , H01S3/10
CPC分类号： H01S3/117 , H01S3/2383
摘要： Multiple laser resonators share a common acousto-optic Q-switch. The Q-switch is driven by a radio-frequency (RF) transducer that causes an acoustic wave to propagate in the Q-switch. Turning off the RF transducer discontinues propagation of the acoustic wave and causes each of the laser resonators to deliver an optical pulse. The finite velocity of the acoustic wave causes the pulses to be delivered temporally spaced apart.
摘要翻译：多个激光谐振器共享一个普通的声光Q开关。 Q开关由射频（RF）传感器驱动，导致声波在Q开关中传播。关闭RF传感器中断声波的传播，并使每个激光谐振器传送光脉冲。声波的有限速度导致脉冲在时间上间隔地传送。

35. 发明申请

US20090190218A1 High power and high brightness diode-laser array for material processing applications 失效
标题翻译：大功率和高亮度二极管 - 激光器阵列用于材料加工应用
公开(公告)号：US20090190218A1
公开(公告)日：2009-07-30
申请号：US12322601
申请日：2009-02-04
申请人： Sergei V. Govorkov , Sol Peter DiJaili , Douglas William Anthon , Luis A. Spinelli
发明人： Sergei V. Govorkov , Sol Peter DiJaili , Douglas William Anthon , Luis A. Spinelli
IPC分类号： G02B27/14 , H01S3/04 , G02B27/28 , G02B27/10 , G02B27/30
CPC分类号： B23K26/0613 , G02B19/0014 , G02B19/0028 , G02B19/0057 , G02B27/0905 , G02B27/0994 , G02B27/283 , H01S5/005 , H01S5/0071 , H01S5/02248 , H01S5/02252 , H01S5/02272 , H01S5/02484 , H01S5/4012 , H01S5/4018 , H01S5/4025 , H01S5/4043 , H01S5/4056 , H01S5/4087
摘要： Arrangements for combination and fast-axis alignment of fast-axes of diode-laser beams are disclosed. Alignment arrangements include providing each diode-laser with a corresponding alignable fast-axis collimating lens, providing individually alignable mirrors for steering an re-orienting beams from each diode-laser, and providing single diode-laser slab-modules in which the diode-laser beams can be pre-aligned to a common propagation-axis direction, and in which edges and surfaces of the slabs can be used to align the fast and slow-axes of the beams. Beam combination methods include combination by dichroic elements, polarization-sensitive elements, and optical fiber bundles.
摘要翻译：公开了二极管激光束快轴的组合和快速对准的布置。对准布置包括为每个二极管激光器提供相应的可对准的快轴准直透镜，提供用于转向来自每个二极管激光器的重定向光束的单独对准的反射镜，并提供单个二极管激光板模块，其中二极管激光器梁可以预先对齐到公共传播轴方向，并且其中板的边缘和表面可以用于对准梁的快轴和慢轴。光束组合方法包括二色性元件，偏振敏感元件和光纤束的组合。

36. 发明授权

US07515346B2 High power and high brightness diode-laser array for material processing applications 失效
公开(公告)号：US07515346B2
公开(公告)日：2009-04-07
申请号：US11488578
申请日：2006-07-18
申请人： Sergei V. Govorkov , Douglas William Anthon
发明人： Sergei V. Govorkov , Douglas William Anthon
IPC分类号： G02B27/30 , H01S3/04
CPC分类号： B23K26/0613 , G02B19/0014 , G02B19/0028 , G02B19/0057 , G02B27/0905 , G02B27/0994 , G02B27/283 , H01S5/005 , H01S5/0071 , H01S5/02248 , H01S5/02252 , H01S5/02272 , H01S5/02484 , H01S5/4012 , H01S5/4018 , H01S5/4025 , H01S5/4043 , H01S5/4056 , H01S5/4087
摘要： Arrangements for combination and fast-axis alignment of fast-axes of diode-laser beams are disclosed. Alignment arrangements include providing each diode-laser with a corresponding alignable fast-axis collimating lens, providing individually alignable mirrors for steering an re-orienting beams from each diode-laser, and providing single diode-laser slab-modules in which the diode-laser beams can be pre-aligned to a common propagation-axis direction, and in which edges and surfaces of the slabs can be used to align the fast and slow-axes of the beams. Beam combination methods include combination by dichroic elements, polarization-sensitive elements, and optical fiber bundles.

37. 发明申请

US20090080467A1 Pulse repetition frequency-multipler for fiber lasers 审中-公开
标题翻译：用于光纤激光器的脉冲重复频率乘法器
公开(公告)号：US20090080467A1
公开(公告)日：2009-03-26
申请号：US11903638
申请日：2007-09-24
申请人： Andrei Starodoumov , Sergei V. Govorkov , Luis A. Spinelli
发明人： Andrei Starodoumov , Sergei V. Govorkov , Luis A. Spinelli
IPC分类号： H01S3/067
CPC分类号： H01S3/06754 , G02B6/29352 , H01S3/005
摘要： MOPA laser apparatus includes a master oscillator and a preamplifier providing a train of optical pulses. The pulse train is input to a fiber optic device arranged to multiply the pulse-repetition frequency (PRF) of the input pulse train. The PRF multiplying device divides each pulse in the into train into two pulses and delays one pulse relative to the other, some portion of one of the pulses and a portion of the other are delivered by the fiber optic PRF multiplying device as an output pulse-train having a PRF equal to twice the PRF of the input pulse train.
摘要翻译： MOPA激光装置包括主振荡器和提供一列光脉冲的前置放大器。脉冲串被输入到布置成乘以输入脉冲序列的脉冲重复频率（PRF）的光纤装置。 PRF乘法装置将串列中的每个脉冲分成两个脉冲并相对于另一个脉冲延迟一个脉冲，一个脉冲的一部分和另一个的一部分由光纤PRF乘法装置输出作为输出脉冲 - 列车的PRF等于输入脉冲串PRF的两倍。

38. 发明授权

US07403550B1 Quasi-CW UV laser with low peak pulse-power 失效
标题翻译：具有低峰值脉冲功率的准CW UV激光器
公开(公告)号：US07403550B1
公开(公告)日：2008-07-22
申请号：US11715630
申请日：2007-03-08
申请人： Luis A. Spinelli , Sergei V. Govorkov , R. Russel Austin
发明人： Luis A. Spinelli , Sergei V. Govorkov , R. Russel Austin
IPC分类号： H01S3/10 , H01S3/13
CPC分类号： H01S3/0057 , Y10S372/70
摘要： An in vivo screening assay for identifying an agent that interferes with T cell activation and/or -differentiation and/or modulation of other inflammatory effector cells.
摘要翻译：用于鉴定干扰T细胞活化和/或其他炎症效应细胞的分化和/或调节的药剂的体内筛选测定。

39. 发明授权

US07244028B2 Laser illuminated projection displays 失效
标题翻译：激光照明投影显示屏
公开(公告)号：US07244028B2
公开(公告)日：2007-07-17
申请号：US11011736
申请日：2004-12-14
申请人： Sergei V. Govorkov , Luis A. Spinelli , Juan L. Chilla , Andrea Caprara , Murray K. Reed
发明人： Sergei V. Govorkov , Luis A. Spinelli , Juan L. Chilla , Andrea Caprara , Murray K. Reed
IPC分类号： G03B21/14
CPC分类号： G03B21/62 , G02B26/101 , G02B27/48 , G03B21/10 , G03B21/56 , H04N9/3152 , H04N9/3161
摘要： A projection video display includes at least one laser for delivering a light beam. The display includes a beam homogenizer and a condenser lens. A scanning arrangement is provided for scanning the light in beam in a particular pattern over the condenser lens in a manner that effectively increases the beam divergence. The scanned beam is homogenized by a beam homogenizer and a spatial light modulator is arranged to receive the homogenized scanned light beam and spatially modulate the beam in accordance with a component of an image to be displayed. Projection optics are projecting the homogenized scanned light beam onto a screen. The scanning provides that the homogenized scanned light beam at the screen has a coherence radius less than the original coherence radius of the beam. The reduced coherence radius contributes to minimizing speckle contrast in the image displayed on the screen. The screen includes one or more features providing a further contribution to minimizing speckle contrast in the displayed image. In one example, the screen includes a transparent cell containing a liquid having light scattering particles in suspension.
摘要翻译：投影视频显示器包括用于传送光束的至少一个激光器。显示器包括光束均化器和聚光透镜。提供了一种扫描装置，用于以有效地增加光束发散的方式在聚光透镜上以特定图案扫描光束中的光。扫描的光束通过光束均化器均质化，并且空间光调制器被布置成接收均匀化的扫描光束，并且根据要显示的图像的分量对光束进行空间调制。投影光学器件将均匀化的扫描光束投影到屏幕上。扫描提供了屏幕上的均匀化扫描光束的相干半径小于光束的原始相干半径。减小的相干半径有助于最小化屏幕上显示的图像中的斑点对比度。屏幕包括一个或多个特征，为减少显示图像中的散斑对比度提供进一步的贡献。在一个示例中，屏幕包括含有悬浮液中具有光散射颗粒的液体的透明单元。

40. 发明授权

US06970492B2 DUV and VUV laser with on-line pulse energy monitor 有权
标题翻译： DUV和VUV激光器在线脉冲能量监测器
公开(公告)号：US06970492B2
公开(公告)日：2005-11-29
申请号：US10438240
申请日：2003-05-14
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
IPC分类号： H01S3/00 , H01S3/034 , H01S3/225 , H01S3/22 , H01S3/08
CPC分类号： H01S3/225 , H01S3/0014 , H01S3/034 , H01S3/2258
摘要： A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F2) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse energy stabilization to the same degree of accuracy, which is crucial for stability of exposure dose and other process parameters in microlithography and industrial applications.
摘要翻译：用于与产生具有低于200nm的波长的输出光束的准分子或分子氟（F 2 N 2）激光谐振器耦合的光束参数监测单元包括在线激光脉冲能量检测器。这反过来又允许输出脉冲能量稳定达到相同的准确度，这对于微光刻和工业应用中的曝光剂量和其它工艺参数的稳定性至关重要。

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