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    • 31. 发明授权
    • Apparatus and method for forming aperture of vertical cavity surface emitting laser by selective oxidation
    • 通过选择性氧化形成垂直腔表面发射激光的孔径的装置和方法
    • US06495381B2
    • 2002-12-17
    • US09751938
    • 2001-01-02
    • Young-jin SongSeung-ho Nam
    • Young-jin SongSeung-ho Nam
    • H01S308
    • H01S5/18311H01S5/0042H01S5/0201
    • An apparatus and method for forming an aperture of a vertical cavity surface emitting laser (VCSEL) by selective oxidation, in which resonance peak variations during the formation of the aperture can be measured using an optical spectrum analyzer, so that the size of the aperture can be precisely adjusted. The aperture forming apparatus includes: a furnace having a first window and a second window for transmitting light, and a stage for supporting a wafer for the VCSEL with a pre-oxide layer where an aperture is to be formed; a light source placed outside the furnace, for emitting light through the first window onto the top of the wafer seated on the stage; and an optical spectrum analyzer for detecting the light intensity by receiving light reflecting from the top of the wafer for the VCSEL and passing through the second window.
    • 一种用于通过选择性氧化形成垂直腔表面发射激光器(VCSEL)的孔径的装置和方法,其中可以使用光谱分析仪测量在形成孔径期间的共振峰值变化,使得孔径尺寸 精确调整。 孔形成装置包括:具有用于透射光的第一窗口和第二窗口的炉,以及用于将VCSEL的晶片支撑在其上将形成孔的预氧化物层的台; 位于炉外的光源,用于通过第一窗口将光发射到位于台架上的晶片的顶部; 以及光谱分析器,用于通过接收从用于VCSEL的晶片顶部反射并穿过第二窗口的光来检测光强度。
    • 32. 发明授权
    • CMOS image sensor for photosensitivity and brightness ratio
    • CMOS图像传感器,用于光敏度和亮度比
    • US08053855B2
    • 2011-11-08
    • US11129435
    • 2005-05-16
    • Seung-ho NamJin-hwan KimGee-young Sung
    • Seung-ho NamJin-hwan KimGee-young Sung
    • H01L31/0232
    • H01L27/14623H01L27/14627H01L27/14643H01L27/148
    • A CMOS image sensor for improving light sensitivity and peripheral brightness ratio, and a method for fabricating the same. The CMOS image sensor includes a substrate on which a light sensor and device isolating insulation films are formed, in which the top of the substrate is coated with a plurality of metal layers and oxide films; a plurality of reflective layers formed inside the metal layers, each being spaced apart; a color filter embedded in a groove formed by etching the oxide films inside the reflective layers by a predetermined thickness; a plurality of protrusions formed on both sides of the top of the color filter, each arranged at a predetermined distance from one another; a flat layer formed on the top of the protrusions and the oxide films; and a micro-lens formed on the top of the flat layer. The reflective layer disposed at the top of the photodiode is made of a material having a high reflectance and low absorptivity. Therefore, light incident on the virtual focus plane on the top portion of the reflective layer converges on the photodiode, and thus, the light sensitivity of the sensor is greatly improved.
    • 一种用于提高光敏度和外围亮度比的CMOS图像传感器及其制造方法。 CMOS图像传感器包括其上形成有光传感器和器件隔离绝缘膜的衬底,其中衬底的顶部涂覆有多个金属层和氧化物膜; 形成在所述金属层内的多个反射层,各反射层间隔开; 嵌入在通过在反射层内蚀刻预定厚度的氧化膜形成的凹槽中的滤色器; 多个突起,形成在滤色器的顶部的两侧,每个突起彼此以预定距离布置; 在突起的顶部和氧化物膜上形成的平坦层; 以及形成在平坦层顶部的微透镜。 设置在光电二极管顶部的反射层由具有高反射率和低吸收率的材料制成。 因此,入射到反射层顶部的虚拟聚焦平面上的光会聚在光电二极管上,从而大大提高了传感器的光灵敏度。
    • 34. 发明申请
    • CMOS image sensor for improving photosensitivity and brightness ratio and a method thereof
    • 用于提高光敏度和亮度比的CMOS图像传感器及其方法
    • US20050253212A1
    • 2005-11-17
    • US11129435
    • 2005-05-16
    • Seung-ho NamJin-hwan KimGee-young Sung
    • Seung-ho NamJin-hwan KimGee-young Sung
    • H01L27/14H01L27/146H01L27/148H01L31/0216H04N5/335H04N5/357H04N5/369H04N5/374H01L31/062
    • H01L27/14623H01L27/14627H01L27/14643H01L27/148
    • A CMOS image sensor for improving light sensitivity and peripheral brightness ratio, and a method for fabricating the same. The CMOS image sensor includes a substrate on which a light sensor and device isolating insulation films are formed, in which the top of the substrate is coated with a plurality of metal layers and oxide films; a plurality of reflective layers formed inside the metal layers, each being spaced apart; a color filter embedded in a groove formed by etching the oxide films inside the reflective layers by a predetermined thickness; a plurality of protrusions formed on both sides of the top of the color filter, each arranged at a predetermined distance from one another; a flat layer formed on the top of the protrusions and the oxide films; and a micro-lens formed on the top of the flat layer. The reflective layer disposed at the top of the photodiode is made of a material having a high reflectance and low absorptivity. Therefore, light incident on the virtual focus plane on the top portion of the reflective layer converges on the photodiode, and thus, the light sensitivity of the sensor is greatly improved.
    • 一种用于提高光敏度和外围亮度比的CMOS图像传感器及其制造方法。 CMOS图像传感器包括其上形成有光传感器和器件隔离绝缘膜的衬底,其中衬底的顶部涂覆有多个金属层和氧化物膜; 形成在所述金属层内的多个反射层,各反射层间隔开; 嵌入在通过在反射层内蚀刻预定厚度的氧化膜形成的凹槽中的滤色器; 多个突起,形成在滤色器的顶部的两侧,每个突起彼此以预定距离布置; 在突起的顶部和氧化物膜上形成的平坦层; 以及形成在平坦层顶部的微透镜。 设置在光电二极管顶部的反射层由具有高反射率和低吸收率的材料制成。 因此,入射到反射层顶部的虚拟聚焦平面上的光会聚在光电二极管上,从而大大提高了传感器的光灵敏度。
    • 35. 发明授权
    • Silicon optoelectronic device and light emitting apparatus using the same
    • 硅光电子器件和使用其的发光装置
    • US06930330B2
    • 2005-08-16
    • US10122421
    • 2002-04-16
    • Byoung-lyong ChoiSeung-ho NamEun-kyung LeeJae-ho YouJun-young Kim
    • Byoung-lyong ChoiSeung-ho NamEun-kyung LeeJae-ho YouJun-young Kim
    • H01L33/24H01L31/10H01L33/06H01L33/34H01L33/00
    • H01L33/34B82Y10/00H01L31/0232H01L31/035281
    • A silicon optoelectronic device and a light-emitting apparatus using the silicon optoelectronic device are provided. The silicon optoelectronic device includes: a substrate based on an n-type or p-type silicon; a doped region formed on one surface of the substrate and doped to an ultra-shallow depth with a predetermined dopant to be an opposite type from that of the substrate to provide a photoelectrical conversion effect by quantum confinement in a p-n junction between the doped region and the substrate; and first and second electrodes formed on the substrate to be electrically connected to the doped region. The silicon optoelectronic device may further include a control layer formed on one surface of the substrate to act as a mask in forming the doped region and to limit the depth of the doped region to be ultra-shallow. The silicon optoelectronic device has excellent efficiency and can be used as either a light-emitting device or a light-receiving device. Since the optoelectronic device uses silicon as a base material, it can be manufactured at low cost.
    • 提供硅光电子器件和使用硅光电子器件的发光设备。 硅光电子器件包括:基于n型或p型硅的衬底; 掺杂区域形成在衬底的一个表面上并掺杂到具有预定掺杂剂的超浅深度以与衬底相反的类型,以通过量子限制在掺杂区域和掺杂区域之间的pn结中提供光电转换效应 基材; 以及形成在所述基板上以电连接到所述掺杂区域的第一和第二电极。 硅光电子器件还可以包括形成在衬底的一个表面上的控制层,以在形成掺杂区域中用作掩模,并且将掺杂区域的深度限制为超浅。 硅光电子器件具有优异的效率,可用作发光器件或光接收器件。 由于光电器件使用硅作为基材,所以可以以低成本制造。