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    • 33. 发明授权
    • Method of manufacturing thin film transistor and thin film transistor substrate
    • 制造薄膜晶体管和薄膜晶体管基板的方法
    • US08119463B2
    • 2012-02-21
    • US12507725
    • 2009-07-22
    • Jae Bon KooIn-Kyu YouSeongdeok AhnKyoung Ik Cho
    • Jae Bon KooIn-Kyu YouSeongdeok AhnKyoung Ik Cho
    • H01L21/00H01L21/84
    • H01L29/78603H01L27/1266H01L29/66757H01L29/78618
    • Provided is a method of manufacturing a thin film transistor that can improve self-alignment. In this method, a semiconductor layer comprising a first doped region, a second doped region and a channel region is formed on a sacrificial layer on a first substrate. Next, the semiconductor layer is separated from the first substrate and is then coupled on a second substrate. Next, a dielectric layer is formed on the second substrate and the semiconductor layer, and a first photoresist layer is formed on the dielectric layer. Thereafter, the first photoresist layer is exposed to light from a rear surface of the second substrate by using the first doped region and the second doped region as a mask, to form a first mask pattern. Next, a gate electrode overlapping the channel region is formed on the dielectric layer by using the first mask pattern as a mask, and a source electrode and a drain electrode connected to the first doped region and the second doped region, respectively are formed to complete a thin film transistor.
    • 提供了一种可以改善自对准的薄膜晶体管的制造方法。 在该方法中,在第一衬底上的牺牲层上形成包括第一掺杂区域,第二掺杂区域和沟道区域的半导体层。 接下来,半导体层与第一衬底分离,然后耦合在第二衬底上。 接下来,在第二基板和半导体层上形成电介质层,在电介质层上形成第一光致抗蚀剂层。 此后,通过使用第一掺杂区域和第二掺杂区域作为掩模,将第一光致抗蚀剂层从第二基板的后表面曝光,以形成第一掩模图案。 接下来,通过使用第一掩模图案作为掩模在介电层上形成与沟道区重叠的栅电极,分别形成连接到第一掺杂区和第二掺杂区的源电极和漏极,以完成 薄膜晶体管。
    • 40. 发明授权
    • Flat panel display and fabrication method thereof
    • 平板显示器及其制造方法
    • US07180236B2
    • 2007-02-20
    • US10694941
    • 2003-10-29
    • Jae Bon KooSang-Il Park
    • Jae Bon KooSang-Il Park
    • H05B33/00
    • H01L21/02422H01L21/02532H01L21/02672H01L27/1229H01L27/1277H01L27/3262H01L29/04
    • A flat panel display with a plurality of pixels. Each pixel has at least a first transistor and a second transistor and a semiconductor layer of the first transistor has a mobility which is different from a semiconductor layer of the second transistor.A method for fabricating a flat panel display including at least a first transistor and a second transistor by forming an amorphous silicon film on an insulating substrate and crystallizing the amorphous silicon film into a polysilicon film that is divided into at least a first region having a first mobility and a second region having a second mobility. The method further involves forming a semiconductor layer for the first transistor from the region with the first mobility and the second transistor from the region with the second mobility by patterning the polysilicon film, where the first mobility is different from the second mobility.
    • 具有多个像素的平板显示器。 每个像素具有至少第一晶体管和第二晶体管,并且第一晶体管的半导体层具有不同于第二晶体管的半导体层的迁移率。 一种用于制造平板显示器的方法,所述平板显示器至少包括第一晶体管和第二晶体管,通过在绝缘基板上形成非晶硅膜并将所述非晶硅膜结晶成多晶硅膜,所述多晶硅膜被划分为至少第一区域,所述第一区域具有第一 移动性和具有第二移动性的第二区域。 该方法还包括通过对第一迁移率不同于第二迁移率的多晶硅膜进行构图而从具有第二迁移率的区域形成具有第一迁移率的区域的第一晶体管的半导体层和第二晶体管。