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    • 32. 发明申请
    • Method for fabricating semiconductor device
    • 制造半导体器件的方法
    • US20060292843A1
    • 2006-12-28
    • US11323525
    • 2005-12-29
    • Seung-Bum KimKi-Won Nam
    • Seung-Bum KimKi-Won Nam
    • H01L21/465
    • H01L21/76897
    • Provided is a method for fabricating a semiconductor device, capable of increasing a contact open margin and minimizing a shoulder loss of a gate line. The method includes: forming a gate line on a substrate, the gate line including a first hard mask and a second hard mask; forming an inter-layer insulating layer over the substrate and the gate line; stacking a contact mask and an anti-reflective coating layer on the inter-layer insulating layer, the contact mask defining a contact region; and etching the contact mask and the anti-reflective coating layer until the first and second hard masks are exposed.
    • 提供了一种制造半导体器件的方法,其能够增加接触开口边缘并最小化栅极线的肩部损耗。 该方法包括:在衬底上形成栅极线,栅极线包括第一硬掩模和第二硬掩模; 在衬底和栅极线上形成层间绝缘层; 在所述层间绝缘层上层叠接触掩模和抗反射涂层,所述接触掩模限定接触区域; 以及蚀刻所述接触掩模和所述抗反射涂层,直到暴露所述第一和第二硬掩模。
    • 36. 发明申请
    • INTELLIGENT EMERGENCY SIGNAL TRANSMISSION SYSTEM USING MOBILE PHONE AND METHOD THEREOF
    • 使用移动电话的智能应急信号传输系统及其方法
    • US20120295575A1
    • 2012-11-22
    • US13574927
    • 2011-01-25
    • Ki-Won Nam
    • Ki-Won Nam
    • H04W4/22
    • H04W76/50G08B25/016G08B25/08H04M11/04H04W4/90
    • An intelligent emergency signal transmission system using a mobile phone and a method thereof are disclosed. According to the intelligent emergency signal transmission system using a mobile phone and the method thereof, even though the user does not separately perform a key operation, the information indicating that the user is in the emergency situation can be transmitted to the mobile phone of the third party by determining whether a pre-registered voice is input. In addition, a call connection with mobile phones to a plurality of third parties registered with the mobile phone of the user can be automatically performed to transmit the emergency signals. Therefore, the third parties can rapidly recognize the emergency situation of the user. In addition, the help request signal can be rapidly transmitted to the third party positioned near the user who is in the emergency situation so that the emergency situation can be effectively overcome.
    • 公开了一种使用移动电话的智能应急信号传输系统及其方法。 根据使用移动电话的智能应急信号传输系统及其方法,即使用户不单独执行密钥操作,可以将表示用户处于紧急情况的信息发送到第三方的移动电话 通过确定是否输入预先注册的语音来进行。 此外,可以自动执行向用户的移动电话登记的多个第三方的移动电话的呼叫连接以发送紧急信号。 因此,第三方可以快速识别用户的紧急情况。 此外,可以将帮助请求信号迅速地发送到位于紧急情况下的用户附近的第三方,从而可以有效地克服紧急情况。
    • 40. 发明授权
    • Method for fabricating semiconductor device capable of decreasing critical dimension in peripheral region
    • 制造能够减小外围区域临界尺寸的半导体器件的方法
    • US07563721B2
    • 2009-07-21
    • US11654460
    • 2007-01-17
    • Kyung-Won LeeKi-Won Nam
    • Kyung-Won LeeKi-Won Nam
    • H01L21/461
    • H01L21/31144H01L21/31116H01L21/32139H01L27/10894
    • A method for fabricating a semiconductor device where a critical dimension in a peripheral region is decreased. The method includes the steps of: forming a silicon nitride layer on a substrate including a cell region and a peripheral region; forming a silicon oxynitride layer on the silicon nitride layer; forming a line-type photoresist pattern on the silicon oxynitride layer such that the photoresist pattern in the cell region has a width larger than that of a final pattern structure and the photoresist pattern in the peripheral region has a width that reduces an incidence of pattern collapse; etching the silicon oxynitride layer and the silicon nitride layer until widths of a remaining silicon oxynitride layer and a remaining silicon nitride layer are smaller than the width of the photoresist pattern used as an etch mask through suppressing generation of polymers; and over-etching the remaining silicon nitride layer.
    • 一种半导体器件的制造方法,其中周边区域的临界尺寸减小。 该方法包括以下步骤:在包括单元区域和周边区域的基板上形成氮化硅层; 在氮化硅层上形成氧氮化硅层; 在氮氧化硅层上形成线型光致抗蚀剂图案,使得单元区域中的光致抗蚀剂图案的宽度大于最终图案结构的宽度,并且周边区域中的光致抗蚀剂图案具有减小图案崩溃的发生率的宽度 ; 通过抑制聚合物的产生,蚀刻硅氧氮化物层和氮化硅层,直到剩余的氮氧化硅层和剩余的氮化硅层的宽度小于用作蚀刻掩模的光致抗蚀剂图案的宽度; 并过剩蚀刻剩余的氮化硅层。