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    • 33. 发明授权
    • Semiconductor device and method of manufacturing such a device
    • 半导体装置及其制造方法
    • US07989844B2
    • 2011-08-02
    • US10545736
    • 2004-02-12
    • Rob Van DalenPrabhat AgarwalJan Willem SlotboomGerrit Elbert Johannes Koops
    • Rob Van DalenPrabhat AgarwalJan Willem SlotboomGerrit Elbert Johannes Koops
    • H01L29/732H01L29/737
    • H01L29/66242H01L29/7378
    • The invention relates to a semiconductor device with a substrate (11) and a semiconductor body (12) with a heterojunction bipolar, in particular npn, transistor with an emitter region (1), a base region (2) and a collector region (3), which are provided with, respectively, a first, a second and a third connection conductor (4, 5, 6), and wherein the bandgap of the base region (2) is smaller than that of the collector region (3) or of the emitter region (1), for example by the use of a silicon-germanium mixed crystal instead of pure silicon in the base region (2). Such a device is characterized by a very high speed, but its transistor shows a relatively low BVeeo. In a device (10) according to the invention the doping flux of the emitter region (1) is locally reduced by a further semiconductor region (20) of the second conductivity type which is embedded in the emitter region (1). In this way, on the one hand, a low-impedance emitter contact is ensured, while locally the Gummel number is increased without the drawbacks normally associated with such an increase. In this way, the hole current in the, npn, transistor is increased and thus the gain is decreased. The relatively high gain of a Si—Ge transistor is responsible for the low BVCeOf which is consequently avoided in a device (10) according to the invention. Preferably the further semiconductor region (20) is recessed in the emitter region (1) and said emitter region (1) preferably comprises a lower doped part that borders on the base region (2) and that is situated below the further semiconductor region (20). The invention also comprises a method of manufacturing a semiconductor device (10) according to the invention.
    • 本发明涉及具有衬底(11)和具有异质结双极性的半导体本体(12)的半导体器件,特别是具有发射极区域(1),基极区域(2)和集电极区域(3)的npn晶体管 ),其分别设置有第一,第二和第三连接导体(4,5,6),并且其中所述基极区域(2)的带隙小于所述集电极区域(3)的带隙或 的发射极区域(1),例如通过在基极区域(2)中使用硅 - 锗混合晶体代替纯硅。 这种器件的特点是非常高的速度,但其晶体管显示相对较低的BVeeo。 在根据本发明的器件(10)中,发射极区域(1)的掺杂通量被嵌入在发射极区域(1)中的第二导电类型的另外的半导体区域(20)局部地减小。 以这种方式,一方面,确保了低阻抗发射极接触,而局部地增加了Gummel数量,而没有通常与这种增加相关联的缺点。 以这种方式,npn晶体管中的空穴电流增加,因此增益降低。 Si-Ge晶体管的相对高的增益负责在本发明的器件(10)中避免的低BVCeOf。 优选地,另外的半导体区域(20)凹陷在发射极区域(1)中,并且所述发射极区域(1)优选地包括在基极区域(2)上接合并位于另外的半导体区域(20)下方的下部掺杂部分 )。 本发明还包括制造根据本发明的半导体器件(10)的方法。
    • 38. 发明申请
    • Semiconductor Device and Method of Manufacturing such a Device
    • 半导体装置及其制造方法
    • US20090114950A1
    • 2009-05-07
    • US11597533
    • 2005-05-19
    • Prabhat AgarwalJan Willem SlotboomGerben Doornbos
    • Prabhat AgarwalJan Willem SlotboomGerben Doornbos
    • H01L21/336H01L21/8249H01L21/8232H01L29/78H01L29/80H01L21/8234H01L21/8248
    • H01L21/8249
    • The invention relates to a semiconductor device (10) comprising a substrate (11) and a semiconductor body (1) of silicon having a semiconductor layer structure comprising, in succession, a first and a second semiconductor layer (2, 3), and having a surface region of a first conductivity type which is provided with a field effect transistor (M) with a channel of a second conductivity type, opposite to the first conductivity type, wherein the surface region is provided with source and drain regions (4A, 4B) of the second conductivity type for the field effect transistor (M) and with—interposed between said source and drain regions—a channel region (3A) with a lower doping concentration which forms part of the second semiconductor layer (3) and with a buried first-conductivity-type semiconductor region (2A), buried below the channel region (3A), with a doping concentration that is much higher than that of the channel region (3A) and which forms part of the first semiconductor layer (2). According to the invention, the semiconductor body (1) is provided not only with the field effect transistor (M) but also with a bipolar transistor (B) with emitter, base and collector regions (5A, 5B, 5C) of respectively the second, the first and the second conductivity type, and the emitter region (5A) is formed in the second semiconductor layer (3) and the base region (5B) is formed in the first semiconductor layer (2). In this way a Bi(C)MOS IC (10) is obtained which is very suitable for high-frequency applications and which is easy to manufacture using a method according to the invention. Preferably the first semiconductor layer (2) comprises Si—Ge and is delta-doped, whereas the second semiconductor layer (3) comprises strained Si.
    • 本发明涉及一种半导体器件(10),它包括具有半导体层结构的硅衬底(12)和半导体本体(1),半导体层结构依次包括第一和第二半导体层(2,3),并且具有 具有与第一导电类型相反的具有第二导电类型的沟道的场效应晶体管(M)的第一导电类型的表面区域,其中所述表面区域设置有源极和漏极区域(4A,4B) )和用于场效应晶体管(M)的第二导电类型,并且插入在所述源极和漏极区之间 - 具有较低掺杂浓度的沟道区(3A),其形成第二半导体层(3)的一部分,并且具有 埋入第一导电型半导体区域(2A),其掺杂在沟道区域(3A)的下方,掺杂浓度比沟道区域(3A)的掺杂浓度高得多,并且形成第一半导体层(2)的一部分, 。 根据本发明,半导体本体(1)不仅设置有场效应晶体管(M),而且还具有双极晶体管(B),发射极,基极和集电极区域(5A,5B,5C)分别为第二 第一和第二导电类型和发射极区域(5A)形成在第二半导体层(3)中,并且基极区域(5B)形成在第一半导体层(2)中。 以这种方式获得了非常适合于高频应用并且易于使用根据本发明的方法制造的Bi(C)MOS IC(10)。 优选地,第一半导体层(2)包括Si-Ge并且是δ掺杂的,而第二半导体层(3)包括应变Si。
    • 39. 发明申请
    • IMPLEMENTATION OF AVALANCHE PHOTO DIODES IN (BI) CMOS PROCESSES
    • (BI)CMOS工艺中的AVALANCHE照相二极管的实现
    • US20090065704A1
    • 2009-03-12
    • US12298206
    • 2007-04-10
    • Anco HeringaThomas FrachPrabhat Agarwal
    • Anco HeringaThomas FrachPrabhat Agarwal
    • G01T1/20H01L27/00H01L21/00
    • H01L31/115H01L27/1446H01L31/107H01L31/1804Y02E10/547Y02P70/521
    • A radiation detector (46) includes a semiconductor layer(s) (12) formed on a substrate (14) and a scintillator (30) formed on the semiconductor layer(s) (12). The semiconductor layer(s) (12) includes an n−doped region (16) disposed adjacent to the substrate (14), and a p−doped region (18) disposed adjacent to the n−doped region (16). A trench (20) is formed within the semiconductor layer(s) (12) and around the p−doped region (18) and is filled with a material (22) that reduces pn junction curvature at the edges of the pn junction, which reduces breakdown at the edges. The scintillator (30) is disposed over and optically coupled to the p−doped regions (18). The radiation detector (46) further includes at least one conductive electrode (24) that electrically contacts the n−doped region.
    • 辐射检测器(46)包括形成在衬底(14)上的半导体层(12)和形成在半导体层(12)上的闪烁体(30)。 半导体层(12)包括邻近衬底(14)设置的n掺杂区域(16)和邻近于n掺杂区域(16)设置的p掺杂区域(18)。 沟槽(20)形成在半导体层(12)内并且围绕p掺杂区域(18)并且填充有减小pn结边缘处的pn结曲率的材料(22),其中 减少边缘的破坏。 闪烁体(30)设置在p掺杂区域(18)上并且光耦合到p掺杂区域(18)。 辐射检测器(46)还包括与n掺杂区域电接触的至少一个导电电极(24)。
    • 40. 发明申请
    • Low Voltage Differential Signalling Driver with Pre-Emphasis
    • 具有预加重功能的低压差分信号驱动器
    • US20090045852A1
    • 2009-02-19
    • US12092556
    • 2005-11-04
    • Prabhat Agarwal
    • Prabhat Agarwal
    • H03K3/00
    • H04L25/026H03K19/018528
    • There is provided a LVDS driver arranged to receive an input signal which switches between two voltage levels. The driver comprises a pre-emphasis block (405) for generating a pre-emphasis signal having a first voltage level for a time period T1 after each switch of the input signal, and a second voltage level at all other times, a differential pair of outputs for generating a differential output voltage across a load resistor (RI); and a driver circuit (401) comprising two parallel branches, each branch being connected to one output and each branch being arranged to receive the pre-emphasis signal. The driver is arranged so that the total current flowing through the driver circuit is constant, and during time period T1, the total current flowing through the driver circuit flows through the load resistor, thereby producing a differential output voltage and at all other times, only some of the total current flowing through the driver circuit flows through the load resistor, thereby reducing the differential output voltage.
    • 提供了一个LVDS驱动器,其布置成接收在两个电压电平之间切换的输入信号。 驱动器包括预加重块(405),用于在输入信号的每次切换之后产生具有第一电压电平的时间段T1的预加重信号,以及在所有其他时间的第二电压电平的差分对 用于产生负载电阻(RI)两端的差分输出电压的输出; 以及包括两个并行分支的驱动器电路(401),每个分支连接到一个输出端,每个分支被布置成接收预加重信号。 驱动器被布置成使得流过驱动器电路的总电流是恒定的,并且在时间段T1期间,流过驱动器电路的总电流流过负载电阻器,从而产生差分输出电压,并且在所有其他时间仅仅 流过驱动电路的一部分总电流流过负载电阻,从而降低差分输出电压。