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    • 31. 发明授权
    • Electromagnetic actuator
    • 电磁执行器
    • US07358629B2
    • 2008-04-15
    • US10569778
    • 2004-08-27
    • Masami YamamotoAkihiro ItoMasato TanakaShinji MorinagaTetsuya Iwamoto
    • Masami YamamotoAkihiro ItoMasato TanakaShinji MorinagaTetsuya Iwamoto
    • H02K37/14H02K1/00
    • H02K37/16H02K1/141
    • The rotational torque of an electromagnetic actuator having a stator and rotor, such as a stepping motor, is increased.The electromagnetic actuator includes a rotor (30) having multiple magnetic poles (Nr1, Nr2, Nr3, Nr4, Nr5, Sr1, Sr2, Sr3, Sr4, Sr5) on a circumferential surface (31) and a plurality of stators (10, 20) in an electromagnet form. The stator (10, 20) has a pair of magnetic poles (13, 14, 23, 24) facing the circumferential surface (31) of the rotor (30), and an auxiliary yoke (40, 50) made of a soft magnetic material member extending in a circumferential direction (A) over an angular range (γ1, γ2) larger than a spread angle (α) of the magnetic poles (Nr, Sr) of the rotor (30) in the circumferential direction (A) is provided between the pair of magnetic poles (13, 14, 23, 24).
    • 具有诸如步进电机的定子和转子的电磁致动器的转矩增加。 电磁致动器包括具有多个磁极(Nr 1,N 2,N 3,N 3,N 4)的转子(30) / SUB,Nr 5,Sr 1,Sr 2,Sr 3,Sr 4, / SUB>,Sr 5),并且以电磁体形式存在多个定子(10,20)。 定子(10,20)具有面对转子(30)的圆周面(31)的一对磁极(13,14,23,24)和由软磁体制成的辅助磁轭(40,50) 材料构件在大于圆周方向(A)上的转子(30)的磁极(Nr,Sr)的扩展角(α)的角度范围(γ1,γ2)上沿圆周方向(A)延伸, 设置在所述一对磁极(13,14,23,24)之间。
    • 32. 发明申请
    • SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
    • 基板处理装置和基板处理方法
    • US20080066783A1
    • 2008-03-20
    • US11857686
    • 2007-09-19
    • Masato Tanaka
    • Masato Tanaka
    • B08B5/04
    • H01L21/67051H01L21/67028
    • A substrate treatment apparatus according to the present invention includes: a plate to be positioned in spaced opposed relation to one surface of a substrate and having a plurality of outlet ports and a plurality of suction ports provided in an opposed surface thereof to be opposed to the one surface of the substrate; a rinse liquid supplying unit which supplies a rinse liquid containing deionized water to the outlet ports of the plate; a suction unit which evacuates the suction ports of the plate; a drying promoting fluid supplying unit which supplies a drying promoting fluid to the one surface of the substrate to promote drying of the substrate; a substrate holding unit to be positioned on the other surface of the substrate opposite from the one surface for holding the substrate; and a supply controlling unit which controls the rinse liquid supplying unit to discharge the rinse liquid from the outlet ports toward the one surface of the substrate to seal a space defined between the one surface and the opposed surface with the rinse liquid, and controls the drying promoting fluid supplying unit to supply the drying promoting fluid to the one surface with the space between the one surface and the opposed surface kept in a liquid sealed state to replace the rinse liquid present between the one surface and the opposed surface with the drying promoting fluid.
    • 根据本发明的基板处理装置包括:板,其被定位成与基板的一个表面间隔开的相对关系,并且具有多个出口和设置在其相对表面中的多个吸入口,以与 衬底的一个表面; 冲洗液供给单元,其向所述板的出口供给含有去离子水的冲洗液; 抽吸单元,其抽吸板的吸入口; 干燥促进液体供给单元,其将干燥促进流体供给到所述基板的一个表面,以促进所述基板的干燥; 基板保持单元,其定位在与所述基板的与所述一个表面相反的另一表面上,用于保持所述基板; 以及供给控制单元,其控制所述冲洗液供给单元,将所述冲洗液从所述出口朝向所述基板的一个表面排出,以用所述冲洗液密封在所述一个表面和所述相对面之间限定的空间,并控制所述干燥 促进流体供应单元将一个表面和相对表面之间的空间保持在液体密封状态下将干燥促进流体供应到一个表面,以用干燥促进流体替换存在于一个表面和相对表面之间的冲洗液体 。
    • 35. 发明授权
    • Method for manufacturing phosphonate esters
    • 膦酸酯的制备方法
    • US07166737B2
    • 2007-01-23
    • US10853312
    • 2004-05-26
    • Li-Biao HanFarzad MirzaeiMasato Tanaka
    • Li-Biao HanFarzad MirzaeiMasato Tanaka
    • C07F9/655
    • C07F9/657181C07F9/4015
    • The present invention relates to a new manufacturing method for phosphonate esters, which have utility as a carbon-carbon binding formation agent, as well as a synthesis intermediate for biologically active substances such as medical drugs and agri-chemicals.Specifically the present invention relates to a new industrially advantageous manufacturing method for phosphonate esters in which the phosphonate esters of the subject can be efficiently obtained with a high yield rate through a simple operation while having barely any side reaction or sub-product.More specifically, the present invention pertains to a manufacturing method for phosphonate esters in which secondary phosphonate esters and alkene compounds are reacted in a transition metal catalyst. In addition the present invention relates to a new manufacturing method for allylphosphonate esters in which secondary cyclic phosphonate esters and 1,3-diene compounds are reacted in a palladium catalyst.
    • 本发明涉及一种可用作碳 - 碳结合形成剂的膦酸酯的新制备方法,以及用于生物活性物质如医药和农药的合成中间体。 具体而言,本发明涉及一种新的工业上有利的膦酸酯的制造方法,其中通过简单的操作,几乎没有任何副反应或副产物,可以以高产率有效地获得受试者的膦酸酯。 更具体地说,本发明涉及膦酸酯的制备方法,其中次膦酸酯和烯烃化合物在过渡金属催化剂中反应。 此外,本发明涉及烯丙基膦酸酯的新制备方法,其中二次环状膦酸酯和1,3-二烯化合物在钯催化剂中反应。
    • 37. 发明授权
    • Limit cycle autotuning method and heat/cool control apparatus
    • 限位循环自动调节方式和加热/冷却控制装置
    • US07003379B2
    • 2006-02-21
    • US10759983
    • 2004-01-16
    • Masato Tanaka
    • Masato Tanaka
    • G05B13/00
    • G05B13/024G05B5/01
    • In a limit cycle autotuning method, the first limit cycle of alternately outputting a heat-side manipulated variable set point and a cool-side manipulated variable set point is generated. The first control response corresponding to the first limit cycle is detected. The second limit cycle is generated by changing one of the heat-side manipulated variable set point and the cool-side manipulated variable set point on the basis of predetermined change instruction information for instructing which one of the heat-side manipulated variable set point and the cool-side manipulated variable set point is to be changed after the first limit cycle and a predetermined manipulated variable change ratio indicating the degree of the change. The second control response corresponding to the second limit cycle is detected. The control parameter for each of the heat mode and the cool mode is calculated on the basis of the detected first and second control responses. A heat/cool control apparatus is also disclosed.
    • 在极限循环自动调谐方法中,产生交替输出加热侧操作变量设定点和冷侧操作变量设定点的第一限制循环。 检测对应于第一限制周期的第一控制响应。 第二极限循环是通过根据用于指示热侧操作变量设定点和冷侧操作变量设定点中的哪一个的预定变更指示信息来改变加热侧操作量设定点和冷侧操作变量设定点之一来生成的 在第一极限循环之后要改变冷侧操作变量设定点,并且指示改变程度的预定操作变量变化率。 检测对应于第二限制循环的第二控制响应。 基于检测到的第一和第二控制响应来计算加热模式和冷模式中的每一个的控制参数。 还公开了一种加热/冷却控制装置。
    • 39. 发明申请
    • Control method and apparatus
    • 控制方法和装置
    • US20050240288A1
    • 2005-10-27
    • US11113442
    • 2005-04-22
    • Masato Tanaka
    • Masato Tanaka
    • G05B11/01G05B11/32G05B11/42
    • G05B11/32G05B11/42
    • In a control method, when a state quantity serving as a specific reference is defined as a reference state quantity, and a state quantity which is controlled to maintain a relative quantity with respect to the reference state quantity at a specified value is defined as a follow-up state quantity, one of a plurality of control computation input values input to a controller of at least two controllers respectively forming control loops, which controls the follow-up state quantity is transformed, into an internal input value, and the internal input value is input to the controller which controls the follow-up state quantity. At least the two controllers calculate manipulated variables, respectively, and the calculated manipulated variables are output to controlled systems of corresponding control loops. The internal input value is calculated by setting the internal input value as the sum of a first element for the reference state quantity and a second element for the relative quantity, an element of the control computation input value which corresponds to the reference state quantity as the first element, and a value obtained by multiplying an element of the control computation input value which corresponds to the relative quantity as the second element. A control apparatus is also disclosed.
    • 在控制方法中,当将用作特定基准的状态量定义为基准状态量时,将被控制为将相对于基准状态量的相对量保持在规定值的状态量定义为以下 输入到分别形成控制回路的至少两个控制器的控制器的多个控制计算输入值中的一个控制计算输入值被变换为内部输入值,并且内部输入值 被输入到控制跟踪状态量的控制器。 至少两个控制器分别计算操纵变量,并将计算的操作变量输出到相应控制回路的受控系统。 内部输入值是通过将内部输入值设定为基准状态量的第一要素与相对量的第二要素之和,将与基准状态量对应的控制运算输入值的要素设为 第一元素,以及通过将对应于相对量的控制计算输入值的元素乘以作为第二元素而获得的值。 还公开了一种控制装置。
    • 40. 发明授权
    • Control apparatus having a limit cycle auto-tuning function
    • 具有极限循环自整定功能的控制装置
    • US06959219B2
    • 2005-10-25
    • US10436830
    • 2003-05-13
    • Masato Tanaka
    • Masato Tanaka
    • G05B11/36G05B5/01G05B13/02
    • G05B13/024G05B5/01
    • A control apparatus includes a manipulated variable output unit, calculation unit, first lower limit setting unit, first upper limit setting unit, second lower limit setting unit, second upper limit setting unit, and controlling element. The manipulated variable output unit outputs first and second manipulated variables to an object to be controlled. The calculation unit calculates a limit cycle auto-tuning control parameter. The controlling element performs feedback control calculation based on the control parameter for the deviation between a set point and a controlled variable to calculate the first manipulated variable, and outputs the calculated first manipulated variable to the object. In executing limit cycle auto-tuning, the calculation unit outputs to the object the second manipulated variable having the second lower limit value as the lower limit value and the second upper limit value as the upper limit value, calculates the control parameter of the controlling element on the basis of a control response corresponding to the manipulated variable output, and sets the calculated control parameter in the controlling element.
    • 控制装置包括操作量可变输出单元,计算单元,第一下限设定单元,第一上限设定单元,第二下限设定单元,第二上限设定单元以及控制单元。 操纵变量输出单元将第一和第二操作变量输出到要控制的对象。 计算单元计算极限循环自整定控制参数。 控制元件基于设定点和受控变量之间的偏差的控制参数进行反馈控制计算,以计算第一操作变量,并将计算出的第一操作变量输出到对象。 在执行极限循环自整定时,计算单元向对象输出具有第二下限值作为下限值和第二上限值的第二操作变量作为上限值,计算控制元件的控制参数 基于对应于操作变量输出的控制响应,并将计算出的控制参数设置在控制元件中。