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    • 33. 发明授权
    • Plasma processing method and apparatus
    • 等离子体处理方法和装置
    • US06311638B1
    • 2001-11-06
    • US09500520
    • 2000-02-09
    • Nobuo IshiiYasuyoshi YasakaMakoto AndoNaohisa Goto
    • Nobuo IshiiYasuyoshi YasakaMakoto AndoNaohisa Goto
    • C23C1600
    • H01J37/32266C23C16/511H01J37/32174H01J37/3299
    • A plasma processing apparatus has a vacuum vessel, a high-frequency power generator that generates a high-frequency wave, a waveguide for propagating the high-frequency wave generated by the high-frequency power generator into the vacuum vessel to produce a plasma by ionizing a processing gas supplied into the vacuum vessel and to process a semiconductor wafer supported on a support table in the vacuum vessel. A reflection coefficient measuring unit 5 is combined with a waveguide 35 to take data on a ratio &Ggr;0 of advancing wave from the high-frequency power generator 4 and reflected wave from the plasma and phase &thgr; of reflection coefficient. Factors dominating the electron density of the plasma including the output power of the microwave power generator are controlled on the basis of the measured data, whereby the electron density is controlled and stable processing is ensured.
    • 等离子体处理装置具有真空容器,产生高频波的高频发电机,将由高频发电机产生的高频波传播到真空容器中的波导,通过电离产生等离子体 供应到真空容器中并处理支撑在真空容器中的支撑台上的半导体晶片的处理气体。 反射系数测量单元5与波导35组合以获取来自高频发生器4的前进波的比率&Ggr; 0的数据和来自反射系数的等离子体和相位θ的反射波的数据。 基于测量数据控制包括微波功率发生器的输出功率的等离子体的电子密度的因素,由此控制电子密度并确保稳定的处理。
    • 35. 发明授权
    • Corrugated board manufacturing system
    • 波纹板制造系统
    • US6032713A
    • 2000-03-07
    • US914146
    • 1997-08-19
    • Hiroshi IshibuchiKazukiyo KounoKuniaki WakusawaKouji HattoriYukuharu SekiMakoto Ando
    • Hiroshi IshibuchiKazukiyo KounoKuniaki WakusawaKouji HattoriYukuharu SekiMakoto Ando
    • B31F1/24B31F1/28B32B31/00B31F1/00B31F1/20
    • B32B38/1841B31F1/2813B31F1/2831Y10T156/1016
    • A first tension adjustor for adjusting the tension of a liner and a pitch measuring device for measuring the corrugation pitch of a first core board of a single-faced corrugated board are used. A first tension controller operates so that the tension acting on the liner is adjusted on the basis of the corrugation pitch of the first core board of the single-faced corrugated board. Further, a second tension adjustor for adjusting the tension of the single-faced corrugated board and a phase shift measuring device for measuring a phase shift between the corrugations of the first core board of the single-faced corrugated board and the corrugations of a second core board to be laminated to the first core board are used. A second tension controller operates so that the tension acting on the single-faced corrugated board is adjusted on the basis of the phase shift measured by the phase shift measuring device. According to this construction it is possible to prevent a pitch shift and a phase shift of core board corrugations and there can be obtained a corrugated board of high quality.
    • 使用用于调节衬套的张力的第一张力调节器和用于测量单面波纹板的第一芯板的波纹间距的俯仰测量装置。 第一张力控制器操作,使得基于单面瓦楞纸板的第一芯板的波纹间距来调节作用在衬套上的张力。 此外,用于调节单面波纹板的张力的第二张力调节器和用于测量单面瓦楞纸板的第一芯板的波纹与第二芯的波纹之间的相移的相移测量装置 使用层压到第一核心板的板。 第二张力控制器的操作使得基于由相移测量装置测量的相移来调节作用在单面瓦楞纸板上的张力。 根据这种结构,可以防止芯板波纹的间距偏移和相移,并且可以获得高质量的瓦楞纸板。
    • 36. 发明授权
    • High-speed ISA bus control system for changing command cycle execution
speed by selectively using ISA bus controller and high-speed bus
controller
    • 高速ISA总线控制系统,通过选择使用ISA总线控制器和高速总线控制器来改变命令循环执行速度
    • US5625847A
    • 1997-04-29
    • US429646
    • 1995-04-27
    • Makoto AndoAkihito Nagae
    • Makoto AndoAkihito Nagae
    • G06F13/42G06F13/00
    • G06F13/423
    • A system controller is provided with an ISA bus controller that executes a command cycle at a speed complying with the standards for ISA buses and a high-speed bus controller that executes a command cycle at a higher speed. When an I/O device that can operate at higher speeds than that of the ISA bus for a PCMCIA controller and IDE interface, a high-speed bus controller is used in place of the ISA bus controller. The high-speed bus controller executes a command cycle at a speed corresponding to the performance of the addressed I/O device. When a busy signal (an inactive IORDY signal) indicating that data transfer is not in time is outputted from the I/O device side, the cycle width of the command is lengthened. There are a synchronous sampling mode and an asynchronous sampling mode for the IORDY signal. The cycle from when IORDY goes off until the command goes off is set in a programmable manner.
    • 系统控制器具有ISA总线控制器,该ISA总线控制器以符合ISA总线标准的速度和以更高速度执行命令循环的高速总线控制器执行命令循环。 当可以以比PCMCIA控制器和IDE接口的ISA总线更高的速度工作的I / O设备时,使用高速总线控制器来代替ISA总线控制器。 高速总线控制器以与寻址的I / O设备的性能相对应的速度执行命令循环。 当从I / O设备侧输出指示数据传输不及时的忙信号(无效IORDY信号)时,命令的周期宽度变长。 对于IORDY信号,有一个同步采样模式和一个异步采样模式。 从IORDY熄灭直到命令关闭的循环是以可编程的方式设置的。