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31. 发明申请

US20070258799A1 Turning device for heavy object 有权
标题翻译：用于重物的车削装置
公开(公告)号：US20070258799A1
公开(公告)日：2007-11-08
申请号：US10590176
申请日：2005-03-23
申请人： Shuji Akiyama , Toshihiro Yudate , Hiroshi Yamada , Nobuhiro Kameda
发明人： Shuji Akiyama , Toshihiro Yudate , Hiroshi Yamada , Nobuhiro Kameda
IPC分类号： H01L21/67
CPC分类号： F16H1/46 , F16H1/32 , G01R31/2887 , H02K7/116
摘要： A compact turning device for a heavy object, comprising a turning arm joined to the heavy object and a drive device drivingly turning the turning arm. The drive device further comprises a motor incorporating a rotor shaft connected to the rotating input part of a planetary gear type speed reducer on a same axis (A). Also, the turning arm is installed by joining its first plane to the plane of the planetary gear type speed reducer forming the rotating output part and its second plane orthogonal to the first plane to the heavy object. The turning arm and the drive device are disposed within the width (D) of the heavy object in the axis (A) direction of the turning pivot of the turning arm. The planetary gear type speed reducer of the drive device may be disposed in two front and rear stages.
摘要翻译：一种用于重物的紧凑型转动装置，包括连接到重物的转动臂和驱动转动转动臂的驱动装置。驱动装置还包括电动机，该马达包括与同轴线（A）上的行星齿轮式减速器的旋转输入部分连接的转子轴。此外，通过将其第一平面连接到行星齿轮减速器的平面而将转动臂安装成形成与第一平面垂直的旋转输出部分及其第二平面到重物体。旋转臂和驱动装置设置在转动臂的转动枢轴的轴线（A）方向上的重物体的宽度（D）内。驱动装置的行星齿轮式减速器可以设置在两个前级和后级。

32. 发明授权

US06721626B2 Wafer transfer system, wafer transfer method and automatic guided vehicle system 失效
标题翻译：晶圆转印系统，晶片转印方式和自动导向系统
公开(公告)号：US06721626B2
公开(公告)日：2004-04-13
申请号：US10184980
申请日：2002-07-01
申请人： Masaru Tomita , Shuji Akiyama
发明人： Masaru Tomita , Shuji Akiyama
IPC分类号： G06F700
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67294 , Y10S414/137 , Y10S414/141
摘要： A central position of a wafer 10 set on a place table 41 is calculated, a turn angle of the place table 41 when the wafer 10 is in the predetermined orientation is calculated based on the calculation result of the central position and positional information of an ID mark 11 received in advance and the quantity of expanding and contracting a transfer arm 30 and the turn angle of a turntable 39 are calculated for setting the wafer 10 such that the ID mark 11 is in the predetermined position and orientation to an OCR 43, and the turn angle of the place table 41 calculated based on the turn angle of the turntable 39 is corrected, the place table 41 is turned only by the corrected turn angle and the wafer 10 is turned and transferred to the OCR 43 by the transfer unit 3.
摘要翻译：计算设置在位置台41上的晶片10的中心位置，基于中心位置的计算结果和ID的位置信息来计算晶片10处于预定取向时的位置台41的转角计算出接收到的标记11，并且计算转印臂30的伸展和收缩量以及转盘39的转动角度，以设置晶片10，使得ID标记11位于OCR43的预定位置和方向上，以及基于转台39的转角计算的位置台41的转角被校正，位置台41仅通过修正的转角转动，并且晶片10转动并由转印单元3传送到OCR 43 。

33. 发明授权

US5798651A Probe system 失效
标题翻译：探测系统
公开(公告)号：US5798651A
公开(公告)日：1998-08-25
申请号：US661405
申请日：1996-06-07
申请人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
发明人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
IPC分类号： G01R31/01 , G01R31/28 , G01R31/02
CPC分类号： G01R31/01 , G01R31/2887
摘要： A probe system according to the present invention has a plurality of exploration portions disposed in a line, spaced apart from one another for predetermined distances and each having a test head, for establishing electrical connection between the test head and electrodes of a subject of exploration so as to explore electrical characteristics of the subject of exploration, a conveyance passage running parallel to the line of the exploration portions, a retainer portion on which a plurality of the subjects of exploration are placed, which is facing to the conveyance passage and which is capable of elevating vertical with respect to the conveyance passage at a position above the conveyance passage, and delivery and acceptance unit arranged capable of moving along the conveyance passage and arranged to deliver and accept the subjects of exploration between the retainer portion and each of the exploration portions.
摘要翻译：根据本发明的探针系统具有多个探测部分，其设置成一条线，彼此间隔开预定距离，并且每个具有测试头，用于建立测试头与探测对象的电极之间的电连接。为了探索探测对象的电气特性，平行于探测部分的线路延伸的输送通道，放置有多个探测对象的保持器部分，其面向输送通道并且能够在输送通道上方的位置相对于输送通道垂直升降;以及输送接收单元，其布置成能够沿着输送通道移动并且布置成输送和接受保持器部分和每个勘探部分之间的探测对象。

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