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1. 发明申请

US20080018355A1 RELIABILITY EVALUATION TEST APPARATUS, RELIABILITY EVALUATION TEST SYSTEM, CONTACTOR, AND RELIABILITY EVALUATION TEST METHOD 失效
标题翻译：可靠性评估测试仪器，可靠性评估测试系统，接触器和可靠性评估测试方法
公开(公告)号：US20080018355A1
公开(公告)日：2008-01-24
申请号：US11769432
申请日：2007-06-27
申请人： Kiyoshi TAKEKOSHI , Hisatomi Hosaka , Junichi Hagihara , Kunihiko Hatsushika , Takamasa Usui , Hisashi Kaneko , Nobuo Hayasaka , Yoshiyuki Ido
发明人： Kiyoshi TAKEKOSHI , Hisatomi Hosaka , Junichi Hagihara , Kunihiko Hatsushika , Takamasa Usui , Hisashi Kaneko , Nobuo Hayasaka , Yoshiyuki Ido
IPC分类号： G01R31/26
CPC分类号： G01R31/2862 , G01R1/0433 , G01R1/0491 , G01R31/2831 , G01R31/286 , G01R31/2865 , G01R31/2867 , G01R31/287 , G01R31/2886
摘要： A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.
摘要翻译：本发明的可靠性评价试验装置包括晶片存储部，其以形成在晶片上的多个器件的电极焊盘和接触器的凸块完全电接触的状态存储晶片。晶片存储部分向/从测量部分发送/接收测试信号，并具有密封和隔热结构。晶片存储部分具有压力接触器的压力机构和将与接触器完全接触的晶片直接加热到预定高温的加热机构。在加速条件下评估形成在半导体晶片上的互连膜和绝缘膜的可靠性。

2. 发明申请

US20070290699A1 Probe card 失效
标题翻译：探针卡
公开(公告)号：US20070290699A1
公开(公告)日：2007-12-20
申请号：US11710223
申请日：2007-02-23
申请人： Jun Mochizuki , Hisatomi Hosaka
发明人： Jun Mochizuki , Hisatomi Hosaka
IPC分类号： G01R1/067
CPC分类号： G01R1/07371 , G01R1/06733 , H01L2924/00013 , Y10T29/49204 , H01L2224/29099
摘要： The present invention provides a probe card that can examine an object with small electrode spacing. A probe supporting plate is provided to a lower face side of a printed wiring board of a probe card. A plurality of probes are supported by the probe supporting plate. The probes comprise an upper contact, a lower contact, and a main body portion. An upper end portion of the upper contact protrudes toward an upper side of the probe supporting plate and contacts a terminal of the printed wiring board. A lower end portion of the lower contact protrudes toward a lower side of the probe supporting plate. On the probe supporting plate, a through-hole and a concave portion are formed to lock the probes, and the probes can be inserted and removed freely against the probe supporting plate from above.
摘要翻译：本发明提供一种可以检查具有小电极间距的物体的探针卡。探针支撑板设置在探针卡的印刷电路板的下表面侧。多个探针由探针支撑板支撑。探针包括上触点，下触点和主体部分。上接触件的上端部朝向探针支撑板的上侧突出并与印刷线路板的端子接触。下接触件的下端部朝向探针支撑板的下侧突出。在探针支撑板上形成通孔和凹部来锁定探针，并且可以从上方将探针自由地插入和移除探针支撑板。

3. 发明申请

US20070124932A1 PROBE WITH TRAPEZOIDAL CONTACTOR AND DEVICE BASED ON APPLICATION THEREOF, AND METHOD OF PRODUCING THEM 失效
标题翻译：基于应用的探测器和设备的探测及其生产方法
公开(公告)号：US20070124932A1
公开(公告)日：2007-06-07
申请号：US11671346
申请日：2007-02-05
申请人： Hisatomi HOSAKA , Kiyoshi Takekoshi
发明人： Hisatomi HOSAKA , Kiyoshi Takekoshi
IPC分类号： H01L21/44
CPC分类号： G01R1/06738 , G01R1/06727 , G01R1/06744 , G01R1/06755 , G01R1/07342 , G01R1/0735 , G01R3/00 , Y10T29/49155 , Y10T29/49204 , Y10T29/49208 , Y10T29/49213 , Y10T29/49218 , Y10T29/49222
摘要： A probe is disclosed, comprising a beam 4B, which has a front end 4b1, an intermediate portion 4b2 and a base end 4b3, the front end being a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe; and a substantially trapezoidal contactor 4A, which is fixed to the leading end 4b1 of the beam.
摘要翻译：公开了一种探针，其包括具有前端部4b 1，中间部分4 b 2和基端部4 b 3的梁4B，前端是用于通过接触器接触测试对象的部分，基端是用于固定探针的部分; 以及大致梯形的接触器4A，其固定在梁的前端部4b 1上。

4. 发明授权

US5798651A Probe system 失效
标题翻译：探测系统
公开(公告)号：US5798651A
公开(公告)日：1998-08-25
申请号：US661405
申请日：1996-06-07
申请人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
发明人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
IPC分类号： G01R31/01 , G01R31/28 , G01R31/02
CPC分类号： G01R31/01 , G01R31/2887
摘要： A probe system according to the present invention has a plurality of exploration portions disposed in a line, spaced apart from one another for predetermined distances and each having a test head, for establishing electrical connection between the test head and electrodes of a subject of exploration so as to explore electrical characteristics of the subject of exploration, a conveyance passage running parallel to the line of the exploration portions, a retainer portion on which a plurality of the subjects of exploration are placed, which is facing to the conveyance passage and which is capable of elevating vertical with respect to the conveyance passage at a position above the conveyance passage, and delivery and acceptance unit arranged capable of moving along the conveyance passage and arranged to deliver and accept the subjects of exploration between the retainer portion and each of the exploration portions.
摘要翻译：根据本发明的探针系统具有多个探测部分，其设置成一条线，彼此间隔开预定距离，并且每个具有测试头，用于建立测试头与探测对象的电极之间的电连接。为了探索探测对象的电气特性，平行于探测部分的线路延伸的输送通道，放置有多个探测对象的保持器部分，其面向输送通道并且能够在输送通道上方的位置相对于输送通道垂直升降;以及输送接收单元，其布置成能够沿着输送通道移动并且布置成输送和接受保持器部分和每个勘探部分之间的探测对象。

5. 发明授权

US07750655B2 Multilayer substrate and probe card 失效
标题翻译：多层基板和探针卡
公开(公告)号：US07750655B2
公开(公告)日：2010-07-06
申请号：US11597476
申请日：2005-05-24
申请人： Jun Mochizuki , Hisatomi Hosaka
发明人： Jun Mochizuki , Hisatomi Hosaka
IPC分类号： G01R31/02 , G01R31/26
CPC分类号： G01R1/07342 , G01R1/0458 , G01R1/07307 , G01R1/07357 , H05K1/0271 , H05K1/0306 , H05K3/4688 , H05K2201/068 , H05K2201/09036
摘要： It is an object of the present invention to dramatically reduce thermal deformation without using any special material in a multilayer substrate and a probe card.According to the present invention, in a probe card including at least one circuit board connected in an electrically conductive manner to a probe brought into electrical contact with an inspection object, the circuit board includes a base layer and a surface layer stacked on at least an inspection object side surface of the base layer. The surface layer has a higher coefficient of thermal expansion than that of the base layer, and grooves dividing the surface layer into a plurality of areas are provided in the surface layer.
摘要翻译：本发明的目的是在多层基板和探针卡中不使用任何特殊材料的情况下显着地减少热变形。根据本发明，在包括至少一个电路板的探针卡中，所述至少一个电路板以导电方式连接到与检查对象电接触的探针，所述电路板包括基底层和至少层叠在所述基底层上的表面层检查对象侧表面的基层。表面层的热膨胀系数比基层的热膨胀系数高，在表层设置表面层分割为多个区域的槽。

6. 发明授权

US07256592B2 Probe with trapezoidal contractor and device based on application thereof, and method of producing them 失效
标题翻译：基于应用的梯形承包商和装置的探头及其制造方法
公开(公告)号：US07256592B2
公开(公告)日：2007-08-14
申请号：US10502099
申请日：2002-12-11
申请人： Hisatomi Hosaka , Kiyoshi Takekoshi
发明人： Hisatomi Hosaka , Kiyoshi Takekoshi
IPC分类号： G01R31/02
CPC分类号： G01R1/06738 , G01R1/06727 , G01R1/06744 , G01R1/06755 , G01R1/07342 , G01R1/0735 , G01R3/00 , Y10T29/49155 , Y10T29/49204 , Y10T29/49208 , Y10T29/49213 , Y10T29/49218 , Y10T29/49222
摘要： A probe is disclosed, comprising a beam, which has a front end, an intermediate portion and a base end. The leading end is a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe. The probe includes a substantially trapezoidal contactor, which is fixed to the leading end of the beam.
摘要翻译：公开了一种探针，其包括具有前端，中间部分和基端的梁。前端是用于通过接触器与测试对象接触的部分，基端是用于固定探针的部分。探头包括大致梯形的接触器，其被固定到梁的前端。

7. 发明申请

US20070126444A1 PROBE WITH TRAPEZOIDAL CONTACTOR AND DEVICE BASED ON APPLICATION THEREOF, AND METHOD OF PRODUCING THEM 审中-公开
公开(公告)号：US20070126444A1
公开(公告)日：2007-06-07
申请号：US11671369
申请日：2007-02-05
申请人： Hisatomi Hosaka , Kiyoshi Takekoshi
发明人： Hisatomi Hosaka , Kiyoshi Takekoshi
IPC分类号： G01R31/02
CPC分类号： G01R1/06738 , G01R1/06727 , G01R1/06744 , G01R1/06755 , G01R1/07342 , G01R1/0735 , G01R3/00 , Y10T29/49155 , Y10T29/49204 , Y10T29/49208 , Y10T29/49213 , Y10T29/49218 , Y10T29/49222
摘要： A probe is disclosed, comprising a beam 4B, which has a front end 4b1, an intermediate portion 4b2 and a base end 4b3, the front end being a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe; and a substantially trapezoidal contactor 4A, which is fixed to the leading end 4b1 of the beam.

8. 发明申请

US20050162179A1 Probe with trapezoidal contactor and device based on application thereof, and method of producing them 失效
标题翻译：基于应用的梯形接触器和装置的探头及其制造方法
公开(公告)号：US20050162179A1
公开(公告)日：2005-07-28
申请号：US10502099
申请日：2002-12-11
申请人： Hisatomi Hosaka , Kiyoshi Takekoshi
发明人： Hisatomi Hosaka , Kiyoshi Takekoshi
IPC分类号： G01R31/26 , G01R1/067 , G01R1/073 , G01R3/00 , H01L21/66 , G01R31/02
CPC分类号： G01R1/06738 , G01R1/06727 , G01R1/06744 , G01R1/06755 , G01R1/07342 , G01R1/0735 , G01R3/00 , Y10T29/49155 , Y10T29/49204 , Y10T29/49208 , Y10T29/49213 , Y10T29/49218 , Y10T29/49222
摘要： A probe is disclosed, comprising a beam 4B, which has a front end 4b1, an intermediate portion 4b2 and a base end 4b3, the front end being a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe; and a substantially trapezoidal contactor 4A, which is fixed to the leading end 4b1 of the beam.
摘要翻译：公开了一种探针，其包括具有前端部4b 1，中间部分4 b 2和基端部4 b 3的梁4B，前端是用于通过接触器接触测试对象的部分，基端是用于固定探针的部分; 以及大致梯形的接触器4A，其固定在梁的前端部4b 1上。

9. 发明申请

US20050156613A1 Probe card 审中-公开
标题翻译：探针卡
公开(公告)号：US20050156613A1
公开(公告)日：2005-07-21
申请号：US11031152
申请日：2005-01-10
申请人： Hisatomi Hosaka
发明人： Hisatomi Hosaka
IPC分类号： H01L21/66 , G01R1/073 , G01R31/02
CPC分类号： G01R1/07342
摘要： A probe card of this invention includes a contactor, printed wiring board, interposer, connecting member, and reinforcing member. The interposer is arranged between the contactor and printed wiring board to bring the contactor and printed wiring board into contact with each other flexibly and electrically. The connecting member integrates the contactor, printed wiring board, and interposer. The reinforcing member reinforces the printed wiring board integrated through the connecting member.
摘要翻译：本发明的探针卡包括接触器，印刷线路板，插入件，连接件和加强件。插入器布置在接触器和印刷线路板之间，以使接触器和印刷电路板彼此灵活和电气地接触。连接构件集成了接触器，印刷电路板和插入器。加强构件加强通过连接构件一体化的印刷线路板。

10. 发明授权

US07474110B2 Probe card 失效
公开(公告)号：US07474110B2
公开(公告)日：2009-01-06
申请号：US11710223
申请日：2007-02-23
申请人： Jun Mochizuki , Hisatomi Hosaka
发明人： Jun Mochizuki , Hisatomi Hosaka
IPC分类号： G01R31/02
CPC分类号： G01R1/07371 , G01R1/06733 , H01L2924/00013 , Y10T29/49204 , H01L2224/29099
摘要： The present invention provides a probe card that can examine an object with small electrode spacing. A probe supporting plate is provided to a lower face side of a printed wiring board of a probe card. A plurality of probes are supported by the probe supporting plate. The probes comprise an upper contact, a lower contact, and a main body portion. An upper end portion of the upper contact protrudes toward an upper side of the probe supporting plate and contacts a terminal of the printed wiring board. A lower end portion of the lower contact protrudes toward a lower side of the probe supporting plate. On the probe supporting plate, a through-hole and a concave portion are formed to lock the probes, and the probes can be inserted and removed freely against the probe supporting plate from above.

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