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31. 发明授权

US5952775A Image-forming apparatus having vent tubes 失效
标题翻译：具有放气管的图像形成装置
公开(公告)号：US5952775A
公开(公告)日：1999-09-14
申请号：US479372
申请日：1995-06-07
申请人： Yasue Sato , Shinichi Kawate , Kazuyuki Ueda
发明人： Yasue Sato , Shinichi Kawate , Kazuyuki Ueda
IPC分类号： H01J9/18 , H01J9/24 , H01J9/385 , H01J29/02 , H01J29/08 , H01J29/86 , H01J29/87 , H01J31/08 , H01J31/12 , H01J28/70
CPC分类号： H01J9/242 , H01J29/028 , H01J29/864 , H01J31/127 , H01J9/385 , H01J2329/8625
摘要： An image-forming apparatus has a rear plate including electron-emitting devices formed thereon, a face plate including a fluorescent film formed thereon and being disposed to face the rear plate, flat plate spacers disposed between the rear plate and the face plate, and an outer frame surrounding peripheral edges of the rear plate and the face plate. Electrons emitted from the electron-emitting devices are irradiated to the fluorescent film to thereby display an image under condition where an inner space of a container constructed by the rear plate, the face plate and the outer frame is evacuated through a vent tube into a depressurized state. The vent tube is attached to a side of the outer frame that is positioned across an imaginary extension of the flat-plate spacer in the longitudinal direction thereof, or to the face plate or the rear plate in the vicinity of that side of the outer frame. With such arrangements, evacuation conductance is increased to reduce an evacuation time, and a higher vacuum level is achieved in the container so that an image can be stably displayed for a long time.
摘要翻译：图像形成装置具有包括形成在其上的电子发射器件的后板，包括形成在其上并设置成面向后板的荧光膜的面板，设置在后板和面板之间的平板间隔件，外框围绕后板和面板的周边边缘。从电子发射器件发射的电子被照射到荧光膜上，从而在由后板，面板和外框架构成的容器的内部空间通过排气管排出到减压的状态下显示图像州。排气管附接到外框架的横向于平板隔离件的纵向方向的假想延伸部分的侧面，或者连接到外框架的该侧附近的面板或后板。通过这样的布置，提高排气电导以减少排气时间，并且在容器中实现更高的真空度，使得图像可以长时间稳定地显示。

32. 发明授权

US08174198B2 Image display apparatus and method for driving the same 失效
标题翻译：图像显示装置及其驱动方法
公开(公告)号：US08174198B2
公开(公告)日：2012-05-08
申请号：US12400162
申请日：2009-03-09
申请人： Hisanori Tsuda , Yasue Sato
发明人： Hisanori Tsuda , Yasue Sato
IPC分类号： H05B37/00
CPC分类号： G09G3/22 , G09G2320/048
摘要： An image display apparatus includes a rear plate including electron-emitting devices, a face plate including an anode electrode, a voltage applying unit configured to apply a voltage to the anode electrode, a switching unit configured to switch between a display state of displaying an image and a non-display state of displaying no image, and a timing unit. The timing unit measures a non-display time, which is an amount of time that the switching unit allows the non-display state to continue. After the timing unit has measured a certain non-display time, the voltage applying unit applies, to the anode electrode, a second voltage lower than a first voltage to be applied in the display state, to enable the electron-emitting devices to emit electrons.
摘要翻译：图像显示装置包括：背板，包括电子发射器件;面板包括阳极电极;施加电压单元，被配置为向阳极施加电压;开关单元，被配置为在显示图像的显示状态以及不显示图像的非显示状态，以及定时单元。定时单元测量非显示时间，这是切换单元允许非显示状态继续的时间量。在定时单元测量了一定的非显示时间之后，电压施加单元向阳极施加低于要在显示状态下施加的第一电压的第二电压，以使电子发射器件能够发射电子。

33. 发明授权

US07679279B2 Image display device having a sealed container with an exhaust pipe 失效
标题翻译：图像显示装置具有带有排气管的密封容器
公开(公告)号：US07679279B2
公开(公告)日：2010-03-16
申请号：US11834339
申请日：2007-08-06
申请人： Masaru Kamio , Yasue Sato , Kazuyuki Seino , Hiromasa Mitani
发明人： Masaru Kamio , Yasue Sato , Kazuyuki Seino , Hiromasa Mitani
IPC分类号： H01J1/62
CPC分类号： H01J29/865 , H01J9/241 , H01J9/42
摘要： An image display device includes a sealed container having an interior which is maintained at a lower pressure than an atmospheric pressure, a phosphor disposed in the interior of the sealed container, an electron-emitting device disposed in the interior of the sealed container, to emit an electron to the phosphor, and a getter disposed in the interior of the sealed container. In addition, an exhaust pipe is in communication with the interior of the sealed container, and bellows connects the exhaust pipe to the sealed container. The exhaust pipe has, inside thereof, a breakable vacuum isolating member formed from glass film.
摘要翻译：图像显示装置包括具有保持在比大气压力低的内部的密封容器，设置在密封容器内部的荧光体，设置在密封容器内部的电子发射器件，以发射与磷光体的电子，以及设置在密封容器的内部的吸气剂。此外，排气管与密封容器的内部连通，波纹管将排气管连接到密封容器。排气管内部具有由玻璃膜形成的可破坏真空隔离构件。

34. 发明授权

US07301269B2 Image display apparatus provided with an ion pump assembly arranged within an external container 失效
标题翻译：具有布置在外部容器内的离子泵组件的图像显示装置
公开(公告)号：US07301269B2
公开(公告)日：2007-11-27
申请号：US11210766
申请日：2005-08-25
申请人： Ihachiro Gofuku , Masaru Kamio , Hisanori Tsuda , Yasue Sato , Yoshiyuki Shimada , Hiromasa Mitani , Kazuyuki Seino , Takashi Nishimura
发明人： Ihachiro Gofuku , Masaru Kamio , Hisanori Tsuda , Yasue Sato , Yoshiyuki Shimada , Hiromasa Mitani , Kazuyuki Seino , Takashi Nishimura
IPC分类号： H01J17/24 , H01J19/70 , H01J61/26
CPC分类号： H01J7/18 , H01J7/14 , H01J9/385 , H01J29/845 , H01J29/94 , H01J31/127 , H01J41/12 , H01J2329/943
摘要： Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container is composed of a non-electroconductive material; and an electroconductive film is formed on an external surface of the vacuum container on a side on which the ion pump container is mounted or on an internal surface of the ion pump container. The image display apparatus achieves: a reduction in weight of the ion pump; an improvement in compatibility to the vacuum container; and the prevention of an adverse effect of discharge inside the ion pump on image display.
摘要翻译：提供一种图像显示装置，包括：真空容器，其包括电子源和与电子源相对的阳极电极; 以及离子泵，其配置成通过真空容器连通，其中：离子泵容器由非导电材料构成; 并且在真空容器的安装有离子泵容器的一侧的外表面上或离子泵容器的内表面上形成导电膜。图像显示装置实现：离子泵的重量减少; 改善与真空容器的相容性; 并防止离子泵内的放电的不良影响对图像显示。

35. 发明授权

US06846213B2 Electron source, image display device manufacturing apparatus and method, and substrate processing apparatus and method 失效
标题翻译：电子源，图像显示装置的制造装置和方法以及基板处理装置和方法
公开(公告)号：US06846213B2
公开(公告)日：2005-01-25
申请号：US09797568
申请日：2001-03-05
申请人： Yasue Sato
发明人： Yasue Sato
IPC分类号： H01J1/30 , H01J9/02 , H01L21/302 , H01L21/3065 , H01L21/683 , H01J9/44
CPC分类号： H01J9/027 , H01J2201/3165
摘要： An electron source/image display device manufacturing apparatus according to this invention includes (A) a support which supports a substrate having a first major surface and a second major surface on which a conductor is arranged, and includes a plurality of electrostatic chucks each having a conductive member, (B) a vessel which has a gas inlet port and an exhaust port, and covers part of the first major surface, (C) a valve connected to the inlet port to introduce gas into the vessel, (D) an exhaust system connected to the exhaust port to exhaust the gas from the vessel, and (E) a power supply for applying a predetermined potential difference between the conductor and the conductive member. This apparatus arrangement enables easy, stable processing in the “forming” and “activation” steps.
摘要翻译：根据本发明的电子源/图像显示装置制造装置包括：（A）支撑基板，其具有第一主表面和布置有导体的第二主表面，并且包括多个静电卡盘，每个静电卡盘具有导电构件，（B）具有气体入口和排气口并且覆盖第一主表面的一部分的容器，（C）连接到入口以将气体引入容器的阀，（D）排气连接到排气口以排出来自容器的气体的系统，以及（E）用于在导体和导电构件之间施加预定电位差的电源。该装置结构能够在“成形”和“激活”步骤中实现容易且稳定的处理。

36. 发明申请

US20080174227A1 Gas Measuring Method Inside a Sealed Container 失效
标题翻译：密封容器内的气体测量方法
公开(公告)号：US20080174227A1
公开(公告)日：2008-07-24
申请号：US11834339
申请日：2007-08-06
申请人： Masaru Kamio , Yasue Sato , Kazuyuki Seino , Hiromasa Mitani
发明人： Masaru Kamio , Yasue Sato , Kazuyuki Seino , Hiromasa Mitani
IPC分类号： H01J1/62 , H01J9/26
CPC分类号： H01J29/865 , H01J9/241 , H01J9/42
摘要： In order to be capable of high-precision gas measurement and evaluating influences of a gas on an electron source, and to predict a life of an image display device with high precision for a short period of time, there is provided a sealed container which is capable of maintaining an inside thereof to a lower pressure than an atmospheric pressure, and is used for an image display device including in the inside: a phosphor; an electron-emitting device for causing the phosphor to emit light; and a getter, the sealed container including an exhaust pipe having a breakable vacuum isolating member on at least one side of the image display device. Accordingly, after the exhaust pipe is connected to a gas measuring apparatus, by vacuum-exhausting the gas measuring apparatus and breaking the breakable vacuum isolating member, it is possible to perform a gas measurement on the image display device by using a measuring chamber having an orifice having a known conductance and installed in part of an exhaust channel of the gas measuring apparatus for vacuum-exhausting the image display device.
摘要翻译：为了能够高精度气体测量和评估气体对电子源的影响，并且能够在短时间内高精度地预测图像显示装置的寿命，因此提供了一种密封容器能够将其内部保持在比大气压更低的压力下，并且用于包括在内部的图像显示装置：磷光体; 用于使荧光体发光的电子发射器件; 和吸气剂，所述密封容器包括在图像显示装置的至少一侧上具有可破坏的真空隔离构件的排气管。因此，在排气管连接到气体测量装置之后，通过对气体测量装置进行真空排气和破坏可破坏的真空隔离构件，可以通过使用具有下述方式的测量室对图像显示装置进行气体测量具有已知电导率的孔，并且安装在气体测量装置的排气通道的一部分中，用于真空排出图像显示装置。

37. 发明授权

US07108573B2 Sealed container, manufacturing method therefor, gas measuring method, and gas measuring apparatus 失效
标题翻译：密封容器，其制造方法，气体测量方法和气体测量装置
公开(公告)号：US07108573B2
公开(公告)日：2006-09-19
申请号：US10682960
申请日：2003-10-14
申请人： Masaru Kamio , Yasue Sato , Kazuyuki Seino , Hiromasa Mitani
发明人： Masaru Kamio , Yasue Sato , Kazuyuki Seino , Hiromasa Mitani
IPC分类号： F23Q23/08 , F23Q23/10 , H01J9/42
CPC分类号： H01J29/865 , H01J9/241 , H01J9/42
摘要： In order to be capable of high-precision gas measurement and evaluating influences of a gas on an electron source, and to predict a life of an image display device with high precision for a short period of time, there is provided a sealed container which is capable of maintaining an inside thereof to a lower pressure than an atmospheric pressure, and is used for an image display device including in the inside: a phosphor; an electron-emitting device for causing the phosphor to emit light; and a getter, the sealed container including an exhaust pipe having a breakable vacuum isolating member on at least one side of the image display device. Accordingly, after the exhaust pipe is connected to a gas measuring apparatus, by vacuum-exhausting the gas measuring apparatus and breaking the breakable vacuum isolating member, it is possible to perform a gas measurement on the image display device by using a measuring chamber having an orifice having a known conductance and installed in part of an exhaust channel of the gas measuring apparatus for vacuum-exhausting the image display device.
摘要翻译：为了能够高精度气体测量和评估气体对电子源的影响，并且能够在短时间内高精度地预测图像显示装置的寿命，因此提供了一种密封容器能够将其内部保持在比大气压更低的压力下，并且用于包括在内部的图像显示装置：磷光体; 用于使荧光体发光的电子发射器件; 和吸气剂，所述密封容器包括在图像显示装置的至少一侧上具有可破坏的真空隔离构件的排气管。因此，在排气管连接到气体测量装置之后，通过对气体测量装置进行真空排气和破坏可破坏的真空隔离构件，可以通过使用具有下述方式的测量室对图像显示装置进行气体测量具有已知电导率的孔，并且安装在气体测量装置的排气通道的一部分中，用于真空排出图像显示装置。

38. 发明授权

US6025115A Processing method for etching a substrate 失效
标题翻译：蚀刻基板的加工方法
公开(公告)号：US6025115A
公开(公告)日：2000-02-15
申请号：US429288
申请日：1995-04-25
申请人： Toshiyuki Komatsu , Yasue Sato , Shin-Ichi Kawate
发明人： Toshiyuki Komatsu , Yasue Sato , Shin-Ichi Kawate
IPC分类号： C23C16/04 , G03F1/00 , G03F7/00 , G03F7/004 , G03F7/20 , G03F7/26 , G03F7/36 , G03F7/38 , H01L21/02 , H01L21/033 , H01L21/285 , H01L21/308 , H01L21/311 , H01L21/316 , H01L21/32 , H01L21/321 , H01L21/3213
CPC分类号： H01L21/02071 , C23C16/047 , G03F1/68 , G03F7/2002 , G03F7/201 , G03F7/2022 , G03F7/2043 , G03F7/2053 , G03F7/265 , G03F7/36 , G03F7/38 , G03F7/7005 , G03F7/70841 , G03F7/70866 , G03F7/70875 , G03F7/70991 , H01L21/033 , H01L21/0332 , H01L21/0337 , H01L21/28556 , H01L21/28562 , H01L21/3086 , H01L21/31116 , H01L21/31144 , H01L21/31662 , H01L21/31683 , H01L21/32 , H01L21/321 , H01L21/32139 , G03F7/00 , G03F7/0035 , G03F7/0042
摘要： A processing method for etching a substrate is described. This method includes subjecting a surface of a substrate to be processed to selective irradiation with a light in a gas atmosphere to form a surface-modified layer. The substrate surface with the surface-modified layer is then annealed to stabilize and make the surface-modified layer more etch resistant. Both the stabilized surface-modified layer and a non-modified portion of the substrate are then subjected to dry etching, thereby utilizing the higher resistance to dry etching of the stabilized surface-modified layer compared to the non-modified portion to selectively etch the non-modified portion to a desired depth.
摘要翻译：对基板的蚀刻处理方法进行说明。该方法包括使待处理的基板的表面经受气体气氛中的光的选择性照射，以形成表面改性层。然后将具有表面改性层的衬底表面退火以稳定并使表面改性层更耐蚀刻。然后将稳定化的表面改性层和基底的未改性部分进行干蚀刻，从而与未改性部分相比，利用较稳定的表面改性层的干蚀刻的较高电阻以选择性地蚀刻非 - 改变的部分到期望的深度。

39. 发明授权

US5863706A Processing method for patterning a film 失效
标题翻译：图案化薄膜的加工方法
公开(公告)号：US5863706A
公开(公告)日：1999-01-26
申请号：US429287
申请日：1995-04-25
申请人： Toshiyuki Komatsu , Yasue Sato , Shin-Ichi Kawate
发明人： Toshiyuki Komatsu , Yasue Sato , Shin-Ichi Kawate
IPC分类号： C23C16/04 , G03F1/00 , G03F7/00 , G03F7/004 , G03F7/20 , G03F7/26 , G03F7/36 , G03F7/38 , H01L21/02 , H01L21/033 , H01L21/285 , H01L21/308 , H01L21/311 , H01L21/316 , H01L21/32 , H01L21/321 , H01L21/3213
CPC分类号： H01L21/02071 , C23C16/047 , G03F1/68 , G03F7/2002 , G03F7/201 , G03F7/2022 , G03F7/2043 , G03F7/2053 , G03F7/265 , G03F7/36 , G03F7/38 , G03F7/7005 , G03F7/70841 , G03F7/70866 , G03F7/70875 , G03F7/70991 , H01L21/033 , H01L21/0332 , H01L21/0337 , H01L21/28556 , H01L21/28562 , H01L21/3086 , H01L21/31116 , H01L21/31144 , H01L21/31662 , H01L21/31683 , H01L21/32 , H01L21/321 , H01L21/32139 , G03F7/00 , G03F7/0035 , G03F7/0042
摘要： A processing method is described which has a first step of depositing on a substrate a specimen film which may be any one of a semiconductor, a metal and a insulator.In a second step, the surface of the specimen film deposited in the first step, is irradiated with an ion beam to produce a physical damage on the surface, next, in a third step, the damaged specimen film surface is selectively irradiated with the light to partially cause a photochemical reaction so that a mask pattern, which depends on the desired device structure, is formed on the film surface. Finally, in a fourth step, photoetching is performed using the mask pattern formed in the third step as a shielding member.
摘要翻译：描述了一种处理方法，其具有在基板上沉积可以是半导体，金属和绝缘体中的任何一个的试样膜的第一步骤。在第二步骤中，在第一步骤中沉积的样品膜的表面用离子束照射以在表面上产生物理损伤，接下来，在第三步骤中，损伤的样品膜表面被选择性地照射光以部分地引起光化学反应，使得在膜表面上形成取决于期望的器件结构的掩模图案。最后，在第四步骤中，使用在第三步骤中形成的掩模图案作为屏蔽部件进行光刻。

40. 发明授权

US5714306A Processing method and apparatus 失效
公开(公告)号：US5714306A
公开(公告)日：1998-02-03
申请号：US428431
申请日：1995-04-25
申请人： Toshiyuki Komatsu , Yasue Sato , Shin-Ichi Kawate
发明人： Toshiyuki Komatsu , Yasue Sato , Shin-Ichi Kawate
IPC分类号： C23C16/04 , G03F1/68 , G03F7/00 , G03F7/004 , G03F7/20 , G03F7/26 , G03F7/36 , G03F7/38 , H01L21/02 , H01L21/033 , H01L21/285 , H01L21/308 , H01L21/311 , H01L21/316 , H01L21/32 , H01L21/3213
CPC分类号： G03F1/68 , C23C16/047 , G03F7/2002 , G03F7/201 , G03F7/2022 , G03F7/2043 , G03F7/2053 , G03F7/265 , G03F7/36 , G03F7/38 , G03F7/7005 , G03F7/70841 , G03F7/70866 , G03F7/70875 , G03F7/70991 , H01L21/02071 , H01L21/033 , H01L21/0332 , H01L21/0337 , H01L21/28556 , H01L21/28562 , H01L21/3086 , H01L21/31116 , H01L21/31144 , H01L21/31662 , H01L21/31683 , H01L21/32 , H01L21/32139 , G03F7/00 , G03F7/0035 , G03F7/0042
摘要： A processing method comprises: a first step of depositing on a substrate which is a specimen a film of any one of a semiconductor, a metal and an insulator; a second step of subjecting the surface of the film deposited in the first step, to irradiation with a beam having a given energy to produce a physical damage on the surface; a third step of subjecting the film surface on which the physical damage is produced in the second step, to selective irradiation with light to partially cause a photochemical reaction so that a mask pattern depending on the desired device structure is formed on the film surface; and a fourth step of carrying out photoetching using as a shielding member the mask pattern formed in the third step.

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