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    • 31. 发明申请
    • PIEZOELECTRIC DRIVEN CONTROL VALVE
    • 压电驱动控制阀
    • US20100127196A1
    • 2010-05-27
    • US12593580
    • 2008-03-13
    • Yohei SawadaKaoru HirataRyosuke DohoKouji NishinoNobukazu Ikeda
    • Yohei SawadaKaoru HirataRyosuke DohoKouji NishinoNobukazu Ikeda
    • F16K31/02
    • F16K31/007F16K7/14
    • Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.
    • 即使在高温环境下,当压电致动器缩回时,通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此,压电驱动控制阀包括:具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱,可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱,使金属隔膜与阀座接触; 以及压电致动器,其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构,用于将压缩力恒定地施加到压电致动器中的压电元件 ,设置在分离基座和压电致动器之间。
    • 33. 发明授权
    • Piezoelectric driven control valve
    • 压电式控制阀
    • US08162286B2
    • 2012-04-24
    • US12593580
    • 2008-03-13
    • Yohei SawadaKaoru HirataRyosuke DohiKouji NishinoNobukazu Ikeda
    • Yohei SawadaKaoru HirataRyosuke DohiKouji NishinoNobukazu Ikeda
    • F16K31/02
    • F16K31/007F16K7/14
    • Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.
    • 即使在高温环境下,当压电致动器缩回时,通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此,压电驱动控制阀包括:具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱,可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱,使金属隔膜与阀座接触; 以及压电致动器,其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构,用于将压缩力恒定地施加到压电致动器中的压电元件 ,设置在分离基座和压电致动器之间。
    • 35. 发明授权
    • Oscillatory type pressure sensor
    • 振荡式压力传感器
    • US06938489B2
    • 2005-09-06
    • US10486331
    • 2003-01-20
    • Masayoshi EsashiKaoru Hirata
    • Masayoshi EsashiKaoru Hirata
    • G01L9/00G01L11/00
    • G01L9/0017
    • A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for light transmission for changing an internal space in which the vibrator (12) is present into a vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the vacuum chamber (10), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration device (57) can also be operated by piezo driving and electrostatic driving from the outside without generating noise.
    • 一种高灵敏度和高精度的振动式压力传感器(1),其允许直接施加腐蚀性气体压力,具有耐热性,并且不具有混合振动器的噪声的空间,包括不锈钢压力接收膜片( 4),用于在后表面侧接收流体压力P,形成在压力接收膜(4)的前表面侧上的振动器(12),围绕振动器的周边设置的壁体(8) (12)和用于通过封闭所述壁体(8)中的开口部(8a)而将存在所述振动器(12)的内部空间改变为真空室(10)的透光性透过部(20) ),由于隔膜(4)由具有耐腐蚀性的不锈钢形成,所以传感器也可以应用于腐蚀性流体,因为电路布线从振动器(12)中消除并且振动器被隔离地设置在真空中 室(1 0),可以消除电磁噪声的混合,并且由于振动器(12)的共振频率fn通过非接触状态下的光学测量进行,因此可以进行极高灵敏度和高精度的检测。 强制振动装置(57)也可以通过压电驱动和静电驱动从外部操作而不产生噪声。