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    • 34. 发明申请
    • Method and Apparatus for Interconnect Layout in an Integrated Circuit
    • 集成电路中互连布局的方法和装置
    • US20110191729A1
    • 2011-08-04
    • US12696743
    • 2010-01-29
    • Michael J. Hart
    • Michael J. Hart
    • G06F17/50G06F9/455
    • G06F17/5068H01L23/556H01L23/585H01L24/05H01L24/13H01L2224/0401H01L2224/131H01L2924/0001H01L2924/01327H01L2924/14H01L2924/00H01L2924/014H01L2224/13099
    • An embodiment of the invention relates to a computer-implemented method of designing an integrated circuit (IC). In this embodiment, layout data describing conductive layers of the integrated circuit on a substrate is generated according to design specification data for the integrated circuit. The conductive layers include a topmost layer of bond pads. Metal structures in the layout data are modified to maximize metal density in a superimposed plane of the conductive layers within a threshold volume under each of the bond pads. A description of the layout data is generated on one or more masks for manufacturing the integrated circuit. By maximizing metal density in the superimposed plane, vertical channels through the dielectric material in the interconnect are reduced or eliminated. Thus, alpha particles cannot readily penetrate the interconnect and reach the underlying semiconductor substrate, reducing soft errors, such as single event upsets in memory cells.
    • 本发明的实施例涉及一种计算机实现的集成电路(IC)设计方法。 在本实施例中,根据集成电路的设计规格数据生成描述基板上的集成电路的导电层的布局数据。 导电层包括最上层的接合焊盘。 修改布局数据中的金属结构以在每个接合焊盘下的阈值体积内使导电层的叠加平面中的金属密度最大化。 在用于制造集成电路的一个或多个掩模上生成布局数据的描述。 通过最大化叠加平面中的金属密度,通过互连中的电介质材料的垂直沟道被减少或消除。 因此,α粒子不能容易地穿透互连并到达下面的半导体衬底,减少了软错误,例如存储器单元中的单事件混乱。
    • 36. 发明授权
    • Antifuse load sram cell
    • 消毒负载sram细胞
    • US5768179A
    • 1998-06-16
    • US730541
    • 1996-10-11
    • Michael J. Hart
    • Michael J. Hart
    • G11C11/412G11C11/00
    • G11C11/412
    • An antifuse functions as a resistive element in an SRAM cell. The antifuse layer, typically amorphous silicon, is formed to a thickness commensurate with the resistance required for proper functioning of the SRAM cell. The antifuse load SRAM cell of the present invention advantageously reduces chip area and simplifies the fabrication process. Specifically, the formation of the amorphous silicon layer is an easily controlled parameter which is therefore easily reproducible. Moreover, antifuse processing is compatible with standard CMOS processing.
    • 反熔丝用作SRAM单元中的电阻元件。 反熔丝层(通常为非晶硅)形成为与SRAM单元正常工作所需的电阻相当的厚度。 本发明的反熔断负载SRAM单元有利地减小了芯片面积并简化了制造工艺。 具体地说,非晶硅层的形成是容易控制的参数,因此很容易重现。 此外,反熔丝处理与标准CMOS处理兼容。
    • 39. 发明授权
    • Diffusion regions having different depths
    • 具有不同深度的扩散区域
    • US08299564B1
    • 2012-10-30
    • US12559457
    • 2009-09-14
    • Yun WuBei ZhuZhiyuan WuMichael J. Hart
    • Yun WuBei ZhuZhiyuan WuMichael J. Hart
    • H01L21/336H01L21/8234
    • H01L21/823807H01L21/823814
    • Formation of transistors, such as, e.g., PMOS transistors, with diffusion regions having different depths for equalization of performance among transistors of an integrated circuit is described. Shallow-trench isolation structures are formed in a substrate formed at least in part of silicon for providing the transistors with at least substantially equivalent channel widths and lengths. A series of masks and etches is performed to form first recesses and second recesses defined in the silicon having different depths and respectively associated with first and second transistors. The second recesses are deeper than the first recesses. A silicon germanium film is formed in the first recesses and the second recesses. The silicon germanium film in the second recesses is thicker than the silicon germanium film in the first recesses, in order to increase performance of the second transistor so it is closer to the performance of the first transistor.
    • 描述了具有扩散区域的诸如PMOS晶体管的晶体管的形成,其具有用于集成电路的晶体管之间的性能均衡的不同深度。 浅沟槽隔离结构形成在至少部分硅中形成的衬底中,用于为晶体管提供至少基本相当的沟道宽度和长度。 执行一系列掩模和蚀刻以形成在具有不同深度并且分别与第一和第二晶体管相关联的硅中限定的第一凹部和第二凹部。 第二凹部比第一凹部更深。 在第一凹部和第二凹部中形成硅锗膜。 第二凹部中的硅锗膜比第一凹部中的硅锗膜厚,以便增加第二晶体管的性能,使得其更接近于第一晶体管的性能。