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    • 31. 发明申请
    • Nonvolatile Memory Devices Having a Fin Shaped Active Region
    • 具有鳍形活动区域的非易失性存储器件
    • US20090294837A1
    • 2009-12-03
    • US12536740
    • 2009-08-06
    • Chang-Hyun LeeJung-Dal ChoiChang-Seok KangYoo-Cheol ShinJong-Sun Sel
    • Chang-Hyun LeeJung-Dal ChoiChang-Seok KangYoo-Cheol ShinJong-Sun Sel
    • H01L29/792H01L29/78
    • H01L27/115H01L27/11521
    • A nonvolatile memory device includes a semiconductor substrate and a device isolation layer on the semiconductor substrate. A fin-shaped active region is formed between portions of the device isolation layer. A sidewall protection layer is formed on the sidewall of the fin-shaped active region where source and drain regions are formed. Thus, it may be possible to reduce the likelihood of an undesirable connection between an interconnection layer connected to the source and drain regions and a lower sidewall of the active region so that charge leakage from the interconnection layer to a substrate can be prevented or reduced. The sidewall protection layer may be formed using the device isolation layer. Alternatively, an insulating layer having an etch selectivity with respect to an interlayer insulating layer may be formed on the device isolation layer so as to cover the sidewall of the active region.
    • 非易失性存储器件包括半导体衬底和半导体衬底上的器件隔离层。 翅片形有源区形成在器件隔离层的各部分之间。 侧壁保护层形成在形成源区和漏区的鳍状有源区的侧壁上。 因此,可以降低连接到源极和漏极区域的互连层和有源区域的下侧壁之间的不期望的连接的可能性,从而可以防止或减少从互连层到衬底的电荷泄漏。 侧壁保护层可以使用器件隔离层形成。 或者,可以在器件隔离层上形成具有相对于层间绝缘层的蚀刻选择性的绝缘层,以覆盖有源区的侧壁。
    • 32. 发明授权
    • NAND flash memory device having dummy memory cells and methods of operating same
    • 具有虚拟存储单元的NAND闪存器件及其操作方法
    • US07480178B2
    • 2009-01-20
    • US11279607
    • 2006-04-13
    • Ki-Tae ParkJung-Dal ChoiJong-Sun SelYoo-Cheol Shin
    • Ki-Tae ParkJung-Dal ChoiJong-Sun SelYoo-Cheol Shin
    • G11C16/06
    • G11C16/0483G11C16/107G11C16/12G11C16/3445
    • A NAND flash memory device includes a control circuit configured to apply, during a program operation, a first word line voltage to non-selected ones of a plurality of serially-connected memory cells, a second word line voltage greater than the first word line voltage to a selected one of the plurality of memory cells, and a third word line voltage lower than the first word line voltage to a dummy memory cell connected in series with the plurality of memory cells. In other embodiments, a control circuit is configured to program a dummy memory cell before and/or after each erase operation on a plurality of memory cells connected in series therewith. In still other embodiments, a control circuit is configured to forego erasure of a dummy memory cell while erasing a plurality of memory cells connected in series therewith.
    • NAND闪速存储器件包括控制电路,其被配置为在编程操作期间将第一字线电压施加到多个串联存储器单元中的未选择的电压,第二字线电压大于第一字线电压 到多个存储单元中的一个选择的一个,以及比第一字线电压低的第三字线电压到与多个存储单元串联连接的虚拟存储单元。 在其他实施例中,控制电路被配置为在与每个擦除操作之间的每个擦除操作之前和/或之后对与其串联的多个存储器单元进行编程。 在其他实施例中,控制电路被配置为在擦除与其串联连接的多个存储器单元时,放弃擦除伪存储器单元。
    • 33. 发明授权
    • Semiconductor devices with sidewall conductive patterns methods of fabricating the same
    • 具有侧壁导电图案的半导体器件制造方法
    • US07397093B2
    • 2008-07-08
    • US11241458
    • 2005-09-30
    • Jong-Sun SelJung-Dal ChoiJoon-Hee LeeHwa-Kyung Shin
    • Jong-Sun SelJung-Dal ChoiJoon-Hee LeeHwa-Kyung Shin
    • H01L29/76
    • H01L27/11526H01L21/28273H01L27/105H01L27/11529
    • A gate pattern is disclosed that includes a semiconductor substrate, a lower conductive pattern, an upper conductive pattern, and a sidewall conductive pattern. The lower conductive pattern is on the substrate. The insulating pattern is on the lower conductive pattern. The upper conductive pattern is on the insulating pattern opposite to the lower conductive pattern. The sidewall conductive pattern is on at least a portion of sidewalls of the upper conductive pattern and the lower conductive pattern. The sidewall conductive pattern electrically connects the upper conductive pattern and the lower conductive pattern. An upper edge portion of the lower conductive pattern may be recessed relative to a lower edge portion of the lower conductive pattern to define a ledge thereon. The sidewall conductive pattern may be directly on the ledge and sidewall of the recessed upper edge portion of the lower conductive pattern.
    • 公开了一种栅极图案,其包括半导体衬底,下导电图案,上导电图案和侧壁导电图案。 下导电图案在基板上。 绝缘图案位于下导电图案上。 上导电图案位于与下导电图案相对的绝缘图案上。 侧壁导电图案位于上导电图案和下导电图案的侧壁的至少一部分上。 侧壁导电图形电连接上导电图案和下导电图案。 下导电图案的上边缘部分可以相对于下导电图案的下边缘部分凹进,以在其上限定凸缘。 侧壁导电图案可以直接在下导电图案的凹陷的上边缘部分的凸缘和侧壁上。
    • 37. 发明授权
    • Non-volatile memory devices
    • 非易失性存储器件
    • US07884425B2
    • 2011-02-08
    • US12257939
    • 2008-10-24
    • Jong-Sun SelJung-Dal ChoiChoong-Ho LeeJu-Hyuck ChungHee-Soo KangDong-uk Choi
    • Jong-Sun SelJung-Dal ChoiChoong-Ho LeeJu-Hyuck ChungHee-Soo KangDong-uk Choi
    • H01L21/70
    • H01L23/485H01L21/76804H01L21/76816H01L27/11519H01L27/11521H01L27/11524H01L2924/0002H01L2924/00
    • In one embodiment, a semiconductor memory device includes a substrate having first and second active regions. The first active region includes a first source and drain regions and the second active region includes a second source and drain regions. A first interlayer dielectric is located over the substrate. A first conductive structure extends through the first interlayer dielectric. A first bit line is on the first interlayer dielectric. A second interlayer dielectric is on the first interlayer dielectric. A contact hole extends through the second and first interlayer dielectrics. The device includes a second conductive structure within the contact hole and extending through the first and second interlayer dielectrics. A second bit line is on the second interlayer dielectric. A width of the contact hole at a bottom of the second interlayer dielectric is less than or substantially equal to a width at a top of the second interlayer dielectric.
    • 在一个实施例中,半导体存储器件包括具有第一和第二有源区的衬底。 第一有源区包括第一源区和漏区,第二有源区包括第二源区和漏区。 第一层间电介质位于衬底上。 第一导电结构延伸穿过第一层间电介质。 第一位线位于第一层间电介质上。 第二层间电介质在第一层间电介质上。 接触孔延伸穿过第二和第一层间电介质。 该装置包括接触孔内的第二导电结构并且延伸穿过第一和第二层间电介质。 第二位线位于第二层间电介质上。 第二层间电介质的底部处的接触孔的宽度小于或基本上等于第二层间电介质顶部的宽度。
    • 38. 发明授权
    • NAND flash memory device having dummy memory cells and methods of operating same
    • 具有虚拟存储单元的NAND闪存器件及其操作方法
    • US07881114B2
    • 2011-02-01
    • US12340250
    • 2008-12-19
    • Ki-Tae ParkJung-Dal ChoiJong-Sun SelYoo-Cheol Shin
    • Ki-Tae ParkJung-Dal ChoiJong-Sun SelYoo-Cheol Shin
    • G11C16/04G11C16/06G11C16/10
    • G11C16/0483G11C16/107G11C16/12G11C16/3445
    • A NAND flash memory device includes a control circuit configured to apply, during a program operation, a first word line voltage to non-selected ones of a plurality of serially-connected memory cells, a second word line voltage greater than the first word line voltage to a selected one of the plurality of memory cells, and a third word line voltage lower than the first word line voltage to a dummy memory cell connected in series with the plurality of memory cells. In other embodiments, a control circuit is configured to program a dummy memory cell before and/or after each erase operation on a plurality of memory cells connected in series therewith. In still other embodiments, a control circuit is configured to forego erasure of a dummy memory cell while erasing a plurality of memory cells connected in series therewith.
    • NAND闪速存储器件包括控制电路,其被配置为在编程操作期间将第一字线电压施加到多个串联存储器单元中的未选择的电压,第二字线电压大于第一字线电压 到多个存储单元中的一个选择的一个,以及比第一字线电压低的第三字线电压到与多个存储单元串联连接的虚拟存储单元。 在其他实施例中,控制电路被配置为在与每个擦除操作之间的每个擦除操作之前和/或之后对与其串联的多个存储器单元进行编程。 在其他实施例中,控制电路被配置为在擦除与其串联连接的多个存储器单元时,放弃擦除伪存储器单元。
    • 40. 发明申请
    • Nonvolatile Memory Devices Including a Resistor Region
    • 包括电阻器区域的非易失性存储器件
    • US20080246073A1
    • 2008-10-09
    • US12138712
    • 2008-06-13
    • Chang-Hyun LeeJung-Dal ChoiChang-Seok KangYoo-Cheol ShinJong-Sun Sel
    • Chang-Hyun LeeJung-Dal ChoiChang-Seok KangYoo-Cheol ShinJong-Sun Sel
    • H01L29/00
    • H01L27/105B82Y10/00H01L21/823462H01L27/0629H01L27/11526H01L27/11546H01L27/11568
    • Methods of forming a memory device include forming a device isolation layer in a semiconductor substrate including a cell array region and a resistor region, the device isolation layer extending into the resistor region and defining an active region in the semiconductor substrate. A first conductive layer is formed on the device isolation layer in the resistor region. The semiconductor substrate is exposed in the cell array region. A cell insulation layer is formed on a portion of the semiconductor substrate including the exposed cell array region, the active region and the device isolation layer in the resistor region. A second conductive layer is formed on the cell insulation layer in the portion of the semiconductor substrate including the exposed cell array region, the active region and the device isolation layer in the resistor region. The second conductive layer is etched to form a cell gate electrode in the cell array region and to concurrently remove the second conductive layer from the resistor region and the first conductive layer is etched in the resistor region to form a resistor.
    • 形成存储器件的方法包括在包括单元阵列区域和电阻器区域的半导体衬底中形成器件隔离层,器件隔离层延伸到电阻器区域中并在半导体衬底中限定有源区域。 在电阻器区域中的器件隔离层上形成第一导电层。 半导体衬底暴露在电池阵列区域中。 电池绝缘层形成在包括电阻器区域中的暴露的电池阵列区域,有源区域和器件隔离层的半导体衬底的一部分上。 在半导体衬底的包括电阻器区域中的暴露的电池阵列区域,有源区域和器件隔离层的部分中的单元绝缘层上形成第二导电层。 蚀刻第二导电层以在电池阵列区域中形成电池栅电极,并且同时从电阻器区域去除第二导电层,并且在电阻器区域中蚀刻第一导电层以形成电阻器。