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    • 33. 发明授权
    • Methods of manufacturing a magnetoresistive random access memory device
    • 制造磁阻随机存取存储器件的方法
    • US09306156B2
    • 2016-04-05
    • US14533084
    • 2014-11-04
    • Eun-Sun NohJong-Chul ParkShin KwonHyung-Joon KwonChae-Lyoung KimHye-Ji Yoon
    • Eun-Sun NohJong-Chul ParkShin KwonHyung-Joon KwonChae-Lyoung KimHye-Ji Yoon
    • H01L43/12H01L27/22H01L43/02H01L43/08
    • H01L43/12H01L27/222H01L27/228H01L43/08
    • In a method of manufacturing an MRAM device, a first sacrificial layer, an etch stop layer, and a second sacrificial layer are sequentially formed on a substrate and then partially etched to form openings therethrough. Lower electrodes are formed to fill the openings. The first and second sacrificial layers and portions of the etch stop layer are removed to form etch stop layer patterns surrounding upper portions of sidewalls of the lower electrodes, respectively. An upper insulating layer pattern is formed between the etch stop layer patterns to partially define an air pad between the lower electrodes. A first magnetic layer, a tunnel barrier layer, a second magnetic layer, and an upper electrode layer are formed, and are etched to form a plurality of magnetic tunnel junction (MTJ) structures. Each MTJ structure includes a sequentially stacked first magnetic layer pattern, tunnel layer pattern, and second magnetic layer pattern, and each of the MTJ structures contacts a corresponding one of the lower electrodes.
    • 在制造MRAM器件的方法中,第一牺牲层,蚀刻停止层和第二牺牲层依次形成在衬底上,然后被部分蚀刻以形成通过其的开口。 形成下电极以填充开口。 去除第一和第二牺牲层和蚀刻停止层的部分以分别形成围绕下部电极的侧壁的上部的蚀刻停止层图案。 在蚀刻停止层图案之间形成上部绝缘层图案,以在下部电极之间部分地限定气垫。 形成第一磁性层,隧道势垒层,第二磁性层和上电极层,并被蚀刻以形成多个磁性隧道结(MTJ)结构。 每个MTJ结构包括顺序堆叠的第一磁性层图案,隧道层图案和第二磁性层图案,并且每个MTJ结构接触相应的一个下部电极。
    • 36. 发明授权
    • Electric spinning apparatus for mass-production of nano-fiber
    • 用于大规模生产纳米纤维的电纺丝设备
    • US07980838B2
    • 2011-07-19
    • US12078003
    • 2008-03-26
    • Jong-Chul Park
    • Jong-Chul Park
    • D01D5/00D04H3/03
    • D01D5/0069B82Y30/00
    • The present invention relates to an electrospinning apparatus for mass-production of nanofibers, particularly to an electrospinning apparatus with an electric stability and an improved nozzle blocks. The bottom-up electrospinning apparatus for the mass-production of nanofiber comprises at least one nozzle block having a plurality of spinning nozzles arranged in the horizontal and vertical direction; a collector installed over the nozzle blocks in order to correspond to the nozzle blocks and maintain a certain distance in between; a power source to apply voltage difference between the nozzle block and the collector; and a spinning solution container to supply the spinning solution to the nozzle block, wherein the nozzle block and the collector are connected to the positive terminal and the negative terminal, respectively and among a plurality of spinning nozzles arranged along the horizontal line, a spinning nozzle in the middle and a spinning nozzle in the end have different height.
    • 本发明涉及一种用于批量生产纳米纤维的静电纺丝装置,特别涉及具有电稳定性和改进的喷嘴块的静电纺丝装置。 用于批量生产纳米纤维的自下而上的静电纺丝装置包括至少一个具有在水平和垂直方向上布置的多个纺丝喷嘴的喷嘴块; 安装在喷嘴块上的收集器,以便对应于喷嘴块并在其间保持一定的距离; 用于施加喷嘴块和收集器之间的电压差的电源; 以及将纺丝溶液供给到喷嘴块的纺丝溶液容器,其中喷嘴块和集电器分别连接到正极端子和负极端子,并且沿着水平线布置的多个纺丝喷嘴中,纺丝喷嘴 在中间和纺纱喷嘴的末端有不同的高度。
    • 39. 发明申请
    • Electric spinning apparatus for mass-production of nano-fiber
    • 用于大规模生产纳米纤维的电纺丝设备
    • US20080241297A1
    • 2008-10-02
    • US12078003
    • 2008-03-26
    • Jong-Chul Park
    • Jong-Chul Park
    • B29C47/12
    • D01D5/0069B82Y30/00
    • The present invention relates to an electrospinning apparatus for mass-production of nanofibers, particularly to an electrospinning apparatus with an electric stability and an improved nozzle blocks. The bottom-up electrospinning apparatus for the mass-production of nanofiber comprises at least one nozzle block having a plurality of spinning nozzles arranged in the horizontal and vertical direction; a collector installed over the nozzle blocks in order to correspond to the nozzle blocks and maintain a certain distance in between; a power source to apply voltage difference between the nozzle block and the collector; and a spinning solution container to supply the spinning solution to the nozzle block, wherein the nozzle block and the collector are connected to the positive terminal and the negative terminal, respectively and among a plurality of spinning nozzles arranged along the horizontal line, a spinning nozzle in the middle and a spinning nozzle in the end have different height.
    • 本发明涉及一种用于批量生产纳米纤维的静电纺丝装置,特别涉及具有电稳定性和改进的喷嘴块的静电纺丝装置。 用于批量生产纳米纤维的自下而上的静电纺丝装置包括至少一个具有在水平和垂直方向上布置的多个纺丝喷嘴的喷嘴块; 安装在喷嘴块上的收集器,以便对应于喷嘴块并在其间保持一定的距离; 用于施加喷嘴块和收集器之间的电压差的电源; 以及将纺丝溶液供给到喷嘴块的纺丝溶液容器,其中喷嘴块和集电器分别连接到正极端子和负极端子,并且沿着水平线布置的多个纺丝喷嘴中,纺丝喷嘴 在中间和纺纱喷嘴的末端有不同的高度。