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    • 36. 发明授权
    • Method and apparatus for forming fine patterns on printed circuit board
    • 用于在印刷电路板上形成精细图案的方法和装置
    • US5834160A
    • 1998-11-10
    • US586347
    • 1996-01-16
    • Alan E. FerryByung Joon HanMaureen Yee LauRobert T. Scruton, Sr.King Lien Tai
    • Alan E. FerryByung Joon HanMaureen Yee LauRobert T. Scruton, Sr.King Lien Tai
    • G03F7/20H05K3/00H05K3/06G03C5/00G03B27/52
    • G03F7/70216G03F7/2002G03F7/70241G03F7/70791H05K3/0082
    • The present inventors have discovered that fine patterns of metal or insulator can be formed on printed circuit board using conventional lithographic steppers with inverted projection lenses. The inverted projection lenses act as enlargement lenses rather than reducing lenses and exhibit a large depth of focus sufficient to accommodate the deviations of PC board from planarity. The inverted lens reduces the size of the image needed at the mask, permitting multiple mask levels to be combined on a single glass. This reduces the cost of the mask set and permits the use of smaller glass masks having greater accuracy and dimensional stability than the convention mylar masks used for PC board. By inverting the projection lenses on near-obsolete steppers, applicants were able to form metal patterns on PC board of finer dimension than heretofore reported. Inverting a 5.times. ZEISS lens on a GCA 6300A stepper, applicants were able to form vias of less than 25 .mu.m diameter, pattern metal lines and spaces of less than 25 .mu.m, and obtain overlay registration accuracy of less than 25 .mu.m. The field size was larger than 1 in.sup.2, and the depth of focus was greater than 50 .mu.m.
    • 本发明人已经发现,使用具有倒置投影透镜的常规光刻步进器可以在印刷电路板上形成金属或绝缘体的精细图案。 反转的投影透镜作为放大透镜而不是减少透镜并且展现出足够的焦深以适应PC板与平面度的偏差。 倒置的镜头减少了掩模所需的图像的尺寸,允许在单个玻璃上组合多个掩模级别。 这降低了掩模组的成本,并且允许使用比用于PC板的常规聚酯薄膜掩模更大的精度和尺寸稳定性的较小的玻璃面罩。 通过将投影镜片倒置在近陈旧的步进器上,申请人能够在PC板上形成比迄今报告的更细的尺寸的金属图案。 将5x蔡司镜头倒置在GCA 6300A步进机上,申请人能够形成直径小于25微米的通孔,图案金属线和小于25微米的间隙,并获得小于25微米的覆盖对准精度。 场尺寸大于1 in2,焦点深度大于50m。