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    • 31. 发明申请
    • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20120196429A1
    • 2012-08-02
    • US13349062
    • 2012-01-12
    • Tomoyuki TezukaMahito ShinoharaYasuhiro Kawabata
    • Tomoyuki TezukaMahito ShinoharaYasuhiro Kawabata
    • H01L21/266
    • H01L27/14643H01L21/2652H01L21/266H01L27/14689H01L29/78
    • A method of manufacturing a semiconductor device that includes a semiconductor substrate is provided. The method includes: exposing a photoresist coated on the semiconductor substrate using a photomask including a plurality of regions having different light transmittances; developing the photoresist to form a resist pattern including a plurality of regions having different thicknesses that depend on an exposure amount of the photoresist; and implanting impurity ions into the semiconductor substrate through the plurality of regions of the resist pattern having different thicknesses to form a plurality of impurity regions whose depths from a surface of the semiconductor substrate to peak positions are different from each other. The depths to the peak positions depend on the thickness of the resist pattern through which the implanted impurity ions pass.
    • 提供一种制造包括半导体衬底的半导体器件的方法。 该方法包括:使用包括具有不同光透射率的多个区域的光掩模曝光涂覆在半导体衬底上的光致抗蚀剂; 显影光致抗蚀剂以形成包括取决于光致抗蚀剂的曝光量的具有不同厚度的多个区域的抗蚀剂图案; 以及通过具有不同厚度的抗蚀剂图案的多个区域将杂质离子注入到半导体衬底中,以形成从半导体衬底的表面到峰值位置的深度彼此不同的多个杂质区域。 峰位置的深度取决于注入的杂质离子通过的抗蚀剂图案的厚度。
    • 33. 发明授权
    • Turbocharger control system
    • 涡轮增压器控制系统
    • US4512153A
    • 1985-04-23
    • US454170
    • 1982-12-28
    • Yasuhiro KawabataMotonobu Akagi
    • Yasuhiro KawabataMotonobu Akagi
    • F02B37/00F02B37/16F02B37/12
    • F02B37/16Y02T10/144
    • A turbocharger control system for a vehicle engine which includes a first air passage for supplying air to the vehicle engine, a throttle valve pivotally mounted in the first air passage, a turbocharger having a compressor and a turbine, the compressor being positioned within the first air passage upstream of the throttle valve, a second air passage for connecting a portion of the first passage downstream of the compressor and a portion of the first passage upstream of the compressor, a valve device positioned within the second air passage for relieving fluid pressure from the downstream portion of the first air passage to the upstream of the first air passage, a throttle sensor operatively associated with the throttle valve for detecting the operating position of the throttle valve and generating signals in response thereto and a computer connected to the valve for receiving the signals generated from the throttle sensor and for delivering the signals to the valve to operate the valve in response to the position of the throttle valve and acceleration of movement of the throttle valve.
    • 一种用于车辆发动机的涡轮增压器控制系统,其包括用于向车辆发动机供应空气的第一空气通道,枢转地安装在第一空气通道中的节气门,具有压缩机和涡轮机的涡轮增压器,所述压缩机定位在第一空气 在节流阀上游的通道,用于将压缩机下游的第一通道的一部分和压缩机上游的第一通道的一部分连接的第二空气通道,位于第二空气通道内的阀装置,用于将流体压力从 所述第一空气通道的下游部分到达所述第一空气通道的上游;节气门传感器,其与所述节流阀可操作地相关联,用于检测所述节流阀的操作位置并响应于所述节气门产生信号,以及连接到所述阀的计算机, 从节气门传感器产生的信号并将信号传送到阀门以操作阀门 响应于节流阀的位置和节流阀的运动加速。
    • 36. 发明授权
    • Vacuum actuator
    • 真空执行器
    • US4364301A
    • 1982-12-21
    • US186160
    • 1980-09-11
    • Yasuhiro KawabataKongo Aoki
    • Yasuhiro KawabataKongo Aoki
    • B60H1/00F15B11/12F15B15/10F15B15/24F15B15/22
    • F15B11/122
    • A vacuum actuator for connection to a vacuum source, the actuator utilizing a diaphragm combination having three stable positions. An annular diaphragm, having its outer periphery fixed in a housing, has its inner periphery secured between two movable annular members, the diaphragm and the annular members forming a combination dividing the housing into upper and lower chambers. Two inlet ports individually supply a vacuum force or atmospheric pressure to the upper chamber, the first one of the ports including a projection extending toward a space formed by the movable members. A poppet valve normally closes an opening at the top of the space, the bottom of the space normally having access to the atmosphere. When vacuum is applied to the first port, the diaphragm combination is raised from a biased first position to the position where the poppet valve interrupts the vacuum through the projection, determining the second position. The application of vacuum force to the second inlet port then raises the diaphragm combination to the third stable position, the projection sliding the poppet valve to a lower position in the space formed by the movable members, closing the access to the atmosphere.
    • 用于连接到真空源的真空致动器,所述致动器利用具有三个稳定位置的隔膜组合。 环形隔膜的外周固定在外壳中,其内周固定在两个可移动环形构件之间,隔膜和环形构件形成将外壳分成上下腔室的组合。 两个入口端口单独地向上腔室提供真空力或大气压力,第一个端口包括朝向由可移动构件形成的空间延伸的突起。 提升阀通常关闭空间顶部的开口,空间的底部通常可以进入大气。 当对第一端口施加真空时,隔膜组合从偏置的第一位置升高到提升阀通过突起中断真空的位置,从而确定第二位置。 然后将真空力施加到第二入口然后将隔膜组合件升高到第三稳定位置,突起将提升阀滑动到由可移动构件形成的空间中的下部位置,从而关闭进入大气的通道。
    • 38. 发明授权
    • Air flow control means for automobile engine exhaust gas cleaning means
    • 用于汽车发动机废气净化装置的气流控制装置
    • US4033125A
    • 1977-07-05
    • US614692
    • 1975-09-18
    • Masami InadaYasuhiro KawabataKatsujiro Sato
    • Masami InadaYasuhiro KawabataKatsujiro Sato
    • F01N3/22F01N3/10
    • F01N3/227F01N3/22Y10T137/2546Y10T137/86919
    • In an automobile engine exhaust gas cleaning system including an exhaust gas reactor which is supplied with auxiliary air for effecting combustion of unburnt constituents such as CO and HC in the exhaust gas, an air flow control device is provided for controlling the supply of the auxiliary air. The control device includes a first control valve disposed in the auxiliary air supply passage and controlled in response to the engine intake pressure so that it is opened when the engine intake vacuum is above the wide-open throttle vacuum, and a second control valve for controlling the supply of the engine intake vacuum to the first control valve in such a manner that it allows the engine intake vacuum to pass into the first control valve when the vacuum is lower than the value that is produced during deceleration and that it introduces atmospheric pressure to the first control valve when the vacuum increases to the value that is produced during deceleration. A time delay device is provided in the second control valve so that the atmospheric pressure to the first control valve is cut-off and the engine intake vacuum is again introduced into the first control valve after a certain time delay during initial period of engine deceleration.
    • 在包括排气反应器的汽车发动机废气净化系统中,所述排气反应器被供给辅助空气,用于对排气中的CO和HC等未燃烧成分进行燃烧,设置有用于控制辅助空气供给的气流控制装置 。 控制装置包括:第一控制阀,设置在辅助空气供给通道中,并且响应于发动机进气压力被控制,使得当发动机进气真空高于宽敞节气门真空时打开;以及第二控制阀,用于控制 将发动机进气真空供给到第一控制阀,使得当真空低于减速期间产生的值时,允许发动机进气真空进入第一控制阀,并且将大气压力引入 当真空度增加到减速期间产生的值时,第一控制阀。 在第二控制阀中设置有时间延迟装置,使得在第一控制阀的大气压力被切断,并且在发动机减速初始期间经过一定时间延迟之后再次将发动机进气真空引入到第一控制阀中。
    • 39. 发明授权
    • Method for manufacturing energy ray detection device
    • 能量射线检测装置的制造方法
    • US08912034B2
    • 2014-12-16
    • US13536750
    • 2012-06-28
    • Yasuhiro Kawabata
    • Yasuhiro Kawabata
    • H01L21/00H01L31/103H01L27/146
    • H01L27/14603H01L31/103
    • In a method for manufacturing an energy ray detection device including a first semiconductor region disposed below a first area on a surface of a semiconductor substrate, a second semiconductor region disposed below a second area on the surface and connected to a contact portion, and a third semiconductor region disposed below a third area on the surface between the first area and the second area, the first semiconductor region and the third semiconductor region are formed on the semiconductor substrate by performing ion implantation through a buffer film that covers the first area and the third area, a portion of the buffer film that covers the third area having a thickness smaller than a portion of the buffer film that covers the first area.
    • 在制造能量射线检测装置的方法中,包括设置在半导体衬底的表面上的第一区域下方的第一半导体区域,设置在表面上的第二区域下方并连接到接触部分的第二半导体区域,以及第三半导体区域 半导体区域设置在第一区域和第二区域之间的表面上的第三区域下方,通过经由覆盖第一区域和第三区域的缓冲膜进行离子注入,在半导体衬底上形成第一半导体区域和第三半导体区域 所述缓冲膜的覆盖所述第三区域的部分的厚度小于覆盖所述第一区域的所述缓冲膜的一部分。