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    • 36. 发明授权
    • Method of forming a metal contact to landing pad structure in an
integrated circuit
    • 在集成电路中形成与接地焊盘结构的金属接触的方法
    • US5956615A
    • 1999-09-21
    • US362655
    • 1994-12-22
    • Loi N. NguyenFrank R. Bryant
    • Loi N. NguyenFrank R. Bryant
    • H01L21/28H01L21/285H01L21/768H01L21/8239H01L23/485H01L23/522H01L23/528H01L27/02H01L21/44
    • H01L21/28H01L21/28525H01L21/76895H01L23/485H01L23/5226H01L23/5283H01L27/0248H01L27/1052H01L2924/0002
    • A method is provided for forming an improved landing pad of a semiconductor integrated circuit, and an integrated circuit formed according to the same. A first opening is formed through a first dielectric layer to expose a portion of a diffused region. A landing pad is formed over the first dielectric layer and in the opening. The landing pad preferably comprises a doped polysilicon layer disposed in the first opening and over a portion of the first dielectric layer. The landing pad will provide for smaller geometries and meet stringent design rules such as that for contact space to gate. A second dielectric layer having an opening therethrough is formed over the landing pad having an opening therethrough exposing a portion of the landing pad. A conductive contact, such as aluminum, is formed in the contact opening. The conductive contact will electrically connect with the diffused region through the landing pad. Misalignment of the conductive contact opening over the landing pad may be tolerated without invading design rules. Additionally, the landing pad will enhance planarization to provide for better step coverage of the metal contact in the second opening.
    • 提供一种用于形成半导体集成电路的改进的着陆焊盘的方法,以及根据该集成电路形成的集成电路。 通过第一介电层形成第一开口以暴露扩散区域的一部分。 在第一介电层上和开口中形成着陆垫。 着陆垫优选地包括设置在第一开口中并在第一介电层的一部分上方的掺杂多晶硅层。 着陆垫将提供较小的几何形状,并符合严格的设计规则,例如接触空间到门。 具有穿过其中的开口的第二电介质层形成在着陆焊盘上,具有通过其暴露出一部分着陆焊盘的开口。 在接触开口中形成诸如铝的导电接触。 导电触点将通过着陆焊盘与扩散区域电连接。 可以容忍在着陆垫上的导电接触开口的不对准,而不会侵入设计规则。 另外,着陆垫将增强平面化以提供第二开口中的金属接触件的更好的台阶覆盖。
    • 38. 发明授权
    • Making integrated circuit transistor having drain junction offset
    • 制造具有漏极结偏移的集成电路晶体管
    • US5344790A
    • 1994-09-06
    • US114754
    • 1993-08-31
    • Frank R. BryantRobert L. Hodges
    • Frank R. BryantRobert L. Hodges
    • H01L21/336H01L29/786
    • H01L29/66757H01L29/78624
    • A method for fabricating an integrated circuit transistor begins with forming a gate electrode over an insulating layer grown on a conductive layer. Sidewall spacers are formed alongside vertical edges of the gate electrode and a mask is applied to a drain region. A relatively fast-diffusing dopant is then implanted into a source region in the conductive layer. Thereafter, the mask is removed and the drain region is implanted with a relatively slow-diffusing dopant. Finally, the conductive layer is annealed, causing the relatively fast-diffusing dopant to diffuse beneath the source sidewall spacer to a location approximately beneath the vertical edge of the source side of the gate electrode, and causing the relatively slow-diffusing dopant to extend beneath the drain sidewall spacer a lesser distance, so that the drain junction is laterally spaced from underneath the gate electrode. Due to the difference in diffusion rates between the relatively slow-diffusing dopant and the relatively fast-diffusing dopant, a transistor having a drain junction offset is formed.
    • 制造集成电路晶体管的方法开始于在导电层上生长的绝缘层上形成栅电极。 侧壁间隔物沿着栅电极的垂直边缘形成,并且掩模施加到漏极区域。 然后将相对快速扩散的掺杂​​剂注入到导电层中的源极区域中。 此后,去除掩模,并用较慢扩散的掺杂​​剂注入漏区。 最后,导电层被退火,导致相对快速扩散的掺杂​​剂在源侧壁间隔物下方扩散到栅电极的源极侧的垂直边缘附近的位置,并使相对较慢的扩散掺杂剂在下面延伸 漏极侧壁间隔较小的距离,使得漏极结与栅极下方横向间隔开。 由于相对较慢扩散的掺杂​​剂和相对快速扩散的掺杂​​剂之间的扩散速率的差异,形成具有漏极结偏移的晶体管。