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31. 发明授权

US07548139B2 Coupled resonator filter and fabrication method thereof 有权
标题翻译：耦合谐振滤波器及其制造方法
公开(公告)号：US07548139B2
公开(公告)日：2009-06-16
申请号：US11455190
申请日：2006-06-19
申请人： Hao-seok Park , Joo-ho Lee , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
发明人： Hao-seok Park , Joo-ho Lee , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
IPC分类号： H03H9/17 , H03H9/00
CPC分类号： H03H9/584 , H03H3/04 , H03H9/587 , H03H9/588
摘要： A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.
摘要翻译：提供耦合谐振滤波器和制造耦合谐振滤波器的方法。该方法包括：在基板的表面上依次堆叠第一电极，第一压电层，第二电极，绝缘层，第三电极，第二压电层和第四电极; 顺序地构图第一电极，第一压电层，第二电极，绝缘层，第三电极，第二压电层和第四电极，以暴露第一，第二和第三电极的区域; 形成分别连接到第一，第二和第三电极的暴露区域和第四电极的区域的多个连接电极; 并且蚀刻在第一电极下方的衬底的区域以形成气隙。

32. 发明授权

US07432785B2 Thin film resonator, method for making thin film resonator and filter having thin film resonators 有权
标题翻译：薄膜谐振器，制造薄膜谐振器的方法和具有薄膜谐振器的滤波器
公开(公告)号：US07432785B2
公开(公告)日：2008-10-07
申请号：US10936522
申请日：2004-09-09
申请人： Yong-seop Yoon , Yun-kwon Park , Hyung Choi
发明人： Yong-seop Yoon , Yun-kwon Park , Hyung Choi
IPC分类号： H03H9/00 , H03H9/09 , H03H9/54
CPC分类号： H03H9/173 , H03H3/04 , H03H2003/021
摘要： A thin film resonator having a membrane layer formed on top of a substrate, a lower electrode formed on part of the top surface of the membrane layer, a piezoelectric layer formed on top of the lower electrode, an upper electrode formed on top of the piezoelectric layer, and a mass loading layer interposed between the lower electrode and the membrane layer and having a predetermined mass. This structure enables precise adjustment of the resonant frequency of the thin film resonator, thereby providing a more precise filter.
摘要翻译：一种薄膜谐振器，其具有形成在基板顶部的膜层，形成在所述膜层的上表面的一部分上的下电极，形成在所述下电极的顶部上的压电层，形成在所述压电体的顶部的上电极层和介于下电极和膜层之间并具有预定质量的质量加载层。这种结构能够精确地调整薄膜谐振器的谐振频率，从而提供更精确的滤波器。

33. 发明申请

US20070188920A1 Microinductor and fabrication method thereof 审中-公开
标题翻译：微电极及其制造方法
公开(公告)号：US20070188920A1
公开(公告)日：2007-08-16
申请号：US11706260
申请日：2007-02-15
申请人： Hyung Choi , Wen Ding , Yong Zhou
发明人： Hyung Choi , Wen Ding , Yong Zhou
IPC分类号： G11B5/147
CPC分类号： H01F17/0033 , H01F10/131 , H01F10/138 , H01F17/045 , H01F41/046 , H01F41/18 , H01L28/10
摘要： A microinductor comprises a magnetic core and a coil which winds around the magnetic core. The magnetic core used in the microinductor is formed of FeCuNbCrSiB.
摘要翻译：微电感器包括磁芯和绕磁芯缠绕的线圈。微导体中使用的磁芯由FeCuNbCrSiB形成。

34. 发明申请

US20060229045A1 Tri-state RF switch 有权
公开(公告)号：US20060229045A1
公开(公告)日：2006-10-12
申请号：US11345237
申请日：2006-02-02
申请人： Hyung Choi , Jiwei Jiao , Yuelin Wang , Xianglong Xing
发明人： Hyung Choi , Jiwei Jiao , Yuelin Wang , Xianglong Xing
IPC分类号： H04B1/06
CPC分类号： H01H59/0009 , H01H2001/0042 , H01P1/127
摘要： A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.

35. 发明申请

US20060208607A1 Actuator with double plate structure 审中-公开
标题翻译：双板结构执行机构
公开(公告)号：US20060208607A1
公开(公告)日：2006-09-21
申请号：US11369727
申请日：2006-03-08
申请人： Yong-seop Yoon , Hyung Choi
发明人： Yong-seop Yoon , Hyung Choi
IPC分类号： G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , H02N1/006
摘要： An actuator, including: a substrate; a middle plate supported above the substrate to be rotatable, about a rotation axis, with respect to the substrate; a stage connected to and spaced above the middle plate; a pair of first driving electrodes located on the substrate around the rotation axis; and a pair of second driving electrodes located on the substrate surrounding the first driving electrodes. Torsion springs connect opposite sides of the middle plate to support the middle plate above the substrate. A connecting member connects the stage and middle plate.
摘要翻译：一种致动器，包括：基板; 支撑在所述基板上方的中间板，以相对于所述基板绕旋转轴线旋转; 与中间板连接并间隔开的台阶; 一对第一驱动电极，位于绕旋转轴线的基板上; 以及位于围绕第一驱动电极的基板上的一对第二驱动电极。扭转弹簧连接中间板的两侧，以支撑基板上方的中间板。连接构件连接平台和中间板。

36. 发明申请

US20060017539A1 Low-loss inductor device and fabrication method thereof 审中-公开
标题翻译：低损耗电感器件及其制造方法
公开(公告)号：US20060017539A1
公开(公告)日：2006-01-26
申请号：US11184999
申请日：2005-07-20
申请人： Moon-chul Lee , Hyung Choi
发明人： Moon-chul Lee , Hyung Choi
IPC分类号： H01F5/00
CPC分类号： H01L27/08 , H01F17/0006 , H01F17/02 , H01F27/027 , H01F2017/002 , H01F2017/008
摘要： An inductor device having an improved quality factor is provided. To obtain the improved quality factor, the inductor device includes a substrate etched away at predetermined intervals; first and second inductors formed on the top and bottom of the substrate, respectively; and first and second protection packages for shielding the first and second inductors, respectively, from outside. The first and second inductors are formed in a symmetrical structure with respect to the substrate, and the inductor device further includes connection parts for electrically connecting the first and second inductors. Further, the inductor device has air gaps between the substrate, first inductor, and second inductor in order for the first and second inductors to be exposed in the air, and the first protection package has an electrode layer formed thereon at predetermined positions to supply electric currents to the inductor device.
摘要翻译：提供了具有改进的品质因数的电感器件。为了获得改进的品质因数，电感器件包括以预定间隔蚀刻掉的衬底; 分别形成在基板的顶部和底部的第一和第二电感器; 以及分别从外部屏蔽第一和第二电感器的第一和第二保护封装。第一和第二电感器相对于衬底形成对称的结构，并且电感器件还包括用于电连接第一和第二电感器的连接部件。此外，电感器件在衬底，第一电感器和第二电感器之间具有空气间隙，以便使第一和第二电感器暴露在空气中，并且第一保护封装具有在预定位置形成在其上的电极层以供应电电流到电感器件。

37. 发明申请

US20050052261A1 Thin film resonator, method for making thin film resonator and filter having thin film resonators 有权
标题翻译：薄膜谐振器，制造薄膜谐振器的方法和具有薄膜谐振器的滤波器
公开(公告)号：US20050052261A1
公开(公告)日：2005-03-10
申请号：US10936522
申请日：2004-09-09
申请人： Yong-seop Yoon , Yun-kwon Park , Hyung Choi
发明人： Yong-seop Yoon , Yun-kwon Park , Hyung Choi
IPC分类号： H01L41/09 , H01L41/22 , H03H3/02 , H03H3/04 , H03H9/17 , H03H9/24 , H03H9/54 , H03H9/58
CPC分类号： H03H9/173 , H03H3/04 , H03H2003/021
摘要： A thin film resonator having a membrane layer formed on top of a substrate, a lower electrode formed on part of the top surface of the membrane layer, a piezoelectric layer formed on top of the lower electrode, an upper electrode formed on top of the piezoelectric layer, and a mass loading layer interposed between the lower electrode and the membrane layer and having a predetermined mass. This structure enables precise adjustment of the resonant frequency of the thin film resonator, thereby providing a more precise filter.
摘要翻译：一种薄膜谐振器，其具有形成在基板顶部的膜层，形成在所述膜层的上表面的一部分上的下电极，形成在所述下电极的顶部上的压电层，形成在所述压电体的顶部的上电极层和介于下电极和膜层之间并具有预定质量的质量加载层。这种结构能够精确地调整薄膜谐振器的谐振频率，从而提供更精确的滤波器。

38. 发明授权

US07710708B2 Two-axis geomagnetic sensor and method for manufacturing the same 有权
标题翻译：二轴地磁传感器及其制造方法
公开(公告)号：US07710708B2
公开(公告)日：2010-05-04
申请号：US11637767
申请日：2006-12-13
申请人： Hae-seok Park , Joo-ho Lee , Hyung Choi , Kyoung-won Na
发明人： Hae-seok Park , Joo-ho Lee , Hyung Choi , Kyoung-won Na
IPC分类号： H01G5/012
CPC分类号： G01C17/30 , G01R33/02 , Y10T29/49002
摘要： A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.
摘要翻译：公开了一种双轴地磁传感器。双轴地磁传感器包括第一地磁传感器部分，其包括在第一晶片的表面上的第一晶片和第一地磁传感器; 以及第二地磁传感器部分，其包括在第二晶片的表面上的第二晶片和第二地磁传感器。第一和第二地磁传感器部分彼此结合，其中第一和第二地磁传感器以彼此正交的关系定位。因此，可以减少地磁传感器的占用面积。此外，每个斧头上的地磁传感器可以具有相同的磁性材料性质，并且不能产生对准偏差。

39. 发明申请

US20090309932A1 HEATER OF AN INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE HEATER 有权
标题翻译：喷嘴加热器和制造加热器的方法
公开(公告)号：US20090309932A1
公开(公告)日：2009-12-17
申请号：US12250749
申请日：2008-10-14
申请人： Kyong-il KIM , Sung-joon Park , Jun-woo Suh , Hyung Choi
发明人： Kyong-il KIM , Sung-joon Park , Jun-woo Suh , Hyung Choi
IPC分类号： B41J2/05 , G01D15/00
CPC分类号： B41J2/1639 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1646 , B41J2002/14387 , B41J2202/03 , C23C14/0676 , Y10T29/49083
摘要： A heater of a thermal inkjet printhead. The heater is formed of tantalum aluminum oxynitride (Ta—Al—ON), wherein the tantalum aluminum oxynitride is formed of about 30 to about 60 atomic % tantalum, about 10 to about 30 atomic % aluminum, about 5 to about 30 atomic % oxygen, and about 5 to about 30 atomic % nitrogen.
摘要翻译：热喷墨打印头的加热器。加热器由钽氮氧化铝（Ta-Al-ON）形成，其中钽铝氧氮化物由约30至约60原子％的钽，约10至约30原子％的铝，约5至约30原子％的氧，，和约5至约30原子％的氮气。

40. 发明授权

US07477884B2 Tri-state RF switch 有权
标题翻译：三态RF开关
公开(公告)号：US07477884B2
公开(公告)日：2009-01-13
申请号：US11345237
申请日：2006-02-02
申请人： Hyung Choi , Jiwel Jiao , Yuelin Wang , Xianglong Xing
发明人： Hyung Choi , Jiwel Jiao , Yuelin Wang , Xianglong Xing
IPC分类号： H04B1/06
CPC分类号： H01H59/0009 , H01H2001/0042 , H01P1/127
摘要： A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.
摘要翻译：三态RF MEMS开关包括：形成在第一衬底中的第一阱; 第一输入信号线和第一输出信号线，其在第一阱中形成第一间隙; 在第二基板中形成第二阱和第三阱之间的边界的柱条; 第二输入信号线和第二输出信号线，以及分别在第二阱和第三阱中形成第二间隙和第三间隙的第三输入信号线和第三输出信号线; 以及膜，其设置在所述第一基板和所述第二基板之间，使得所述膜跨越所述第一，第二和第三间隙，所述膜包括第一导电焊盘，第二导电焊盘和第三导电焊盘，和第三个差距。

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