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31. 发明申请

US20060197931A1 Printer and a method for recording a multi-level image 有权
标题翻译：打印机和记录多级图像的方法
公开(公告)号：US20060197931A1
公开(公告)日：2006-09-07
申请号：US11361418
申请日：2006-02-24
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.
摘要翻译：一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击衬底，每个被调制的光束阵列响应于对应于对应的亮度级相关图像的输入信号被调制被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。

32. 发明授权

US07053985B2 Printer and a method for recording a multi-level image 有权
公开(公告)号：US07053985B2
公开(公告)日：2006-05-30
申请号：US10615008
申请日：2003-07-07
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.

33. 发明授权

US06937343B2 Laser scanner with amplitude and phase detection 有权
标题翻译：具有振幅和相位检测的激光扫描仪
公开(公告)号：US06937343B2
公开(公告)日：2005-08-30
申请号：US10232093
申请日：2002-08-29
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G01B9/02 , G01N21/95 , G01N21/956
CPC分类号： G01B9/02081 , G01B9/02003 , G01B2290/45 , G01B2290/70 , G01N21/8851 , G01N21/9501 , G01N21/95607
摘要： A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.
摘要翻译：用于光学评估样品的方法包括扫描样品上的相干辐射束，由此辐射从样品中散射，同时将扫描光束的一部分朝向衍射光栅引导，使得光束的该部分被扫描光栅，由此频移参考光束从光栅衍射。散射辐射和频移参考光束在检测器处组合以产生光学外差信号。

34. 发明授权

US06750436B2 Focus error detection apparatus and method having dual focus error detection path 有权
标题翻译：具有双重焦点误差检测路径的聚焦误差检测装置和方法
公开(公告)号：US06750436B2
公开(公告)日：2004-06-15
申请号：US10192220
申请日：2002-07-09
申请人： Haim Feldman , Boris Golberg , Alexander Libinson
发明人： Haim Feldman , Boris Golberg , Alexander Libinson
IPC分类号： G02B704
CPC分类号： G02B7/34
摘要： An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.
摘要翻译：一种用于聚焦误差检测的装置和方法，其可操作以接收从检查对象反射的光并确定被检查对象的表面上的聚焦误差，所述聚焦误差检测装置包括光学元件和至少一个检测装置，而光学元件和至少一个检测装置限定至少第一聚焦误差检测路径和第二聚焦误差检测路径，第一聚焦误差检测路径以比第二聚焦误差检测路径更大的灵敏度检测聚焦误差，而第二聚焦误差检测路径在比第一个聚焦误差检测路径更大的聚焦误差范围内检测到聚焦误差。

35. 发明授权

US07684048B2 Scanning microscopy 有权
标题翻译：扫描显微镜
公开(公告)号：US07684048B2
公开(公告)日：2010-03-23
申请号：US11559741
申请日：2006-11-14
申请人： Doron Meshulach , Haim Feldman
发明人： Doron Meshulach , Haim Feldman
IPC分类号： G01B11/02
CPC分类号： G01N21/47 , G01N21/21 , G01N21/95623 , G01N2021/4709 , G01N2021/4792
摘要： Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.
摘要翻译：用于对包括扫描光学元件在内的表面进行成像的装置，其被配置为将一个或多个行进光束扫描并聚焦到所述表面上，以便在其上形成一个或多个行进光点。该装置还包括收集光学器件，其被布置成收集从一个或多个行进点散射的辐射并且聚焦辐射以形成沿着一行行进的一个或多个图像斑点。该装置还具有检测组件，该检测组件由检测器构成，该检测器被配置为响应于一个或多个行进图像点产生信号，以及插入在收集光学器件和检测器之间的检测器入口，其与线。该装置还包括用于行进梁的相位和/或极化改变元件。

36. 发明授权

US07634754B2 Simulation of aerial images 有权
公开(公告)号：US07634754B2
公开(公告)日：2009-12-15
申请号：US11967511
申请日：2007-12-31
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06F17/50 , G03F1/00 , G21K5/00 , G06F19/00
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

37. 发明申请

US20090284835A1 SCANNING MICROSCOPY USING INHOMOGENEOUS POLARIZATION 有权
标题翻译：扫描显微镜使用非均匀偏振
公开(公告)号：US20090284835A1
公开(公告)日：2009-11-19
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

38. 发明授权

US07342218B2 Methods and systems for optical inspection of surfaces based on laser screening 有权
标题翻译：基于激光筛选的表面光学检测方法和系统
公开(公告)号：US07342218B2
公开(公告)日：2008-03-11
申请号：US10327534
申请日：2002-12-19
申请人： Gilad Almogy , Haim Feldman
发明人： Gilad Almogy , Haim Feldman
IPC分类号： H01J3/14 , G01N27/00
CPC分类号： G01N21/8806 , G02B26/10
摘要： A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.
摘要翻译：一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

39. 发明申请

US20060221331A1 High Throughput Inspection System and a Method for Generating Transmitted and/or Reflected Images 有权
标题翻译：高通量检测系统和生成传输和/或反射图像的方法
公开(公告)号：US20060221331A1
公开(公告)日：2006-10-05
申请号：US11425101
申请日：2006-06-19
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

40. 发明申请

US20060048090A1 Simulation of aerial images 有权
公开(公告)号：US20060048090A1
公开(公告)日：2006-03-02
申请号：US10928537
申请日：2004-08-27
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06F17/50 , G21K5/00
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

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