专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07518718B2 High throughput inspection system and a method for generating transmitted and/or reflected images 有权
标题翻译：高通量检测系统和用于产生透射和/或反射图像的方法
公开(公告)号：US07518718B2
公开(公告)日：2009-04-14
申请号：US11425101
申请日：2006-06-19
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

2. 发明授权

US06930770B2 High throughput inspection system and method for generating transmitted and/or reflected images 有权
标题翻译：高通量检测系统和用于产生透射和/或反射图像的方法
公开(公告)号：US06930770B2
公开(公告)日：2005-08-16
申请号：US10215972
申请日：2002-08-08
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88 , G01N21/956
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

3. 发明申请

US20050270521A1 High throughput inspection system and method for generating transmitted and/or reflected images 有权
公开(公告)号：US20050270521A1
公开(公告)日：2005-12-08
申请号：US11127914
申请日：2005-05-11
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88 , G01N21/956
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

4. 发明授权

US07187439B2 High throughput inspection system and method for generating transmitted and/or reflected images 有权
标题翻译：高通量检测系统和用于产生透射和/或反射图像的方法
公开(公告)号：US07187439B2
公开(公告)日：2007-03-06
申请号：US11127914
申请日：2005-05-11
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

5. 发明申请

US20060221331A1 High Throughput Inspection System and a Method for Generating Transmitted and/or Reflected Images 有权
标题翻译：高通量检测系统和生成传输和/或反射图像的方法
公开(公告)号：US20060221331A1
公开(公告)日：2006-10-05
申请号：US11425101
申请日：2006-06-19
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

6. 发明授权

US5797317A Universal chuck for holding plates of various sizes 失效
标题翻译：用于保持各种尺寸的板的通用卡盘
公开(公告)号：US5797317A
公开(公告)日：1998-08-25
申请号：US818312
申请日：1997-03-14
申请人： Eitan Lahat , Nissim Zafrani
发明人： Eitan Lahat , Nissim Zafrani
IPC分类号： B23Q3/08 , G03F7/20 , H01L21/027 , H05K13/00 , B05C17/08
CPC分类号： G03F7/707 , G03F7/70716 , H05K13/0069 , Y10S101/36
摘要： This invention discloses an universal chuck for holding plates, including a base having a longitudinal axis and a transverse axis, a lower carriage movable on the base along said longitudinal axis, an upper carriage movable on the lower carriage along the longitudinal axis, a plate mounting carried by the lower carriage at one side thereof for mounting one edge of a plate to be held by the universal chuck, and a plate mounting carried by the upper carriage at the side thereof opposite to the one side of the lower carriage, for mounting the opposite edge of the plate to be held by the universal chuck, such that moving the lower carriage and the upper carriage with respect to each other and with respect to the base along said longitudinal axis, changes the distance between the lower carriage and upper carriage plate mountings to thereby enable the chuck to hold plates of different longitudinal dimensions.
摘要翻译：本发明公开了一种用于保持板的通用卡盘，包括具有纵向轴线和横向轴线的基座，沿着所述纵向轴线在基座上可移动的下托架，可沿着纵向轴线在下托架上运动的上托架，板安装件在其一侧由下托架承载，用于安装由通用卡盘保持的板的一个边缘，以及由上滑架在与下滑架一侧相对的一侧承载的板安装件，用于安装由通用卡盘保持的板的相对边缘，使得下滑架和上托架相对于彼此沿着所述纵向轴线相对于基座移动，改变了下滑架和上托架板之间的距离从而使卡盘能够容纳不同纵向尺寸的板。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式