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31. 发明授权

US08462341B2 Mounting for deviation angle self compensating substantially achromatic retarder 有权
标题翻译：安装偏移角自补偿基本上消色差延迟器
公开(公告)号：US08462341B2
公开(公告)日：2013-06-11
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01J4/00 , G01J4/04
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。

32. 发明授权

US08159672B1 Sample investigating system and method of use 有权
标题翻译：样本调查系统及使用方法
公开(公告)号：US08159672B1
公开(公告)日：2012-04-17
申请号：US12592015
申请日：2009-11-19
申请人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
发明人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/55
摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
摘要翻译：用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。

33. 发明授权

US07468794B1 Rotating compensator ellipsometer system with spatial filter equivalent 有权
标题翻译：具有空间滤波器等效旋转补偿器椭偏仪系统
公开(公告)号：US07468794B1
公开(公告)日：2008-12-23
申请号：US11204929
申请日：2005-08-15
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/55
摘要： Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
摘要翻译：在采样系统之后，将由会聚透镜和光纤构成的空间滤波器等效应用于旋转补偿器椭偏仪系统中。目的是消除呈现低强度水平不规则内容的大致任意轮廓波束的径向外环，使电磁波强度作为半径的函数快速衰减为零。

34. 发明授权

US07215424B1 Broadband ellipsometer or polarimeter system including at least one multiple element lens 有权
标题翻译：包括至少一个多元素透镜的宽带椭偏仪或偏振计系统
公开(公告)号：US07215424B1
公开(公告)日：2007-05-08
申请号：US11103229
申请日：2005-04-12
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0202 , G01J3/0208 , G01N21/21 , G01N21/211 , G01N2021/213
摘要： Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.
摘要翻译：准无彩色多元素透镜在管状安装夹具中相对于彼此精确地安装，以及其在聚焦（和任选地重新准直））中的应用，使分光电磁束成为非常小的，相对不分散的，材料系统上的区域斑点。

35. 发明授权

US07193710B1 Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses 有权
标题翻译：旋转或可旋转补偿器光谱椭偏仪系统包括多个元件透镜
公开(公告)号：US07193710B1
公开(公告)日：2007-03-20
申请号：US10829620
申请日：2004-04-22
申请人： Blaine D. Johs , Martin M. Liphardt , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Blaine D. Johs , Martin M. Liphardt , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J4/04 , G01N21/211 , G01N2021/213
摘要： Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.
摘要翻译：公开了一种分光椭偏仪系统，其包括偏振器和分析器元件，其在数据采集期间保持固定在适当的位置，以及至少一个连续旋转或逐步旋转的补偿器，其透过电磁束并且施加连续可变或多个顺序离散的极化状态在电磁辐射束上; 以及至少一个透射电磁光束的多重元件透镜。

36. 发明授权

US06937341B1 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation 有权
标题翻译：系统和方法能够同时对具有两束电磁辐射的样品进行调查
公开(公告)号：US06937341B1
公开(公告)日：2005-08-30
申请号：US10238241
申请日：2002-09-10
申请人： John A. Woollam , Galen L. Pfeiffer , Daniel W. Thompson , Blaine D. Johs , Craig M. Herzinger
发明人： John A. Woollam , Galen L. Pfeiffer , Daniel W. Thompson , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N21/21 , G01J4/00 , G01N21/00
CPC分类号： G01N21/211
摘要： Disclosed are system and method for characterizing a system consisting of a fluid sample on a two sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the same or different wavelength content and/or polarization state, and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence.
摘要翻译：本发明公开了一种用于表征在双面台上由流体样品构成的系统的系统和方法，利用通过从电磁辐射束两侧将电磁辐射束施加到容纳细胞体积中的流体涂覆表面而获得的数据。光束可以具有相同或不同的波长含量和/或偏振状态，并且可以以相同或不同的大小的入射角施加，并且可以在正常入射角施加第三通常的非偏振光束。

37. 发明授权

US06930813B1 Spatial filter source beam conditioning in ellipsometer and the like systems 有权
标题翻译：椭偏仪等空间滤波器源光束调理系统
公开(公告)号：US06930813B1
公开(公告)日：2005-08-16
申请号：US10425801
申请日：2003-04-29
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , James D. Welch
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , James D. Welch
IPC分类号： G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46 , G02F1/00 , G01J3/28 , G01J3/50 , G01J4/00 , G02F1/33
CPC分类号： G01N21/211 , G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46
摘要： Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
摘要翻译：公开了在采样系统之前在椭偏仪等系统中应用空间滤波器和光束能均匀化系统。目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。

38. 发明授权

US06822738B1 Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system 有权
标题翻译：具有伪消色差延迟器系统的光谱旋转补偿器椭偏仪系统
公开(公告)号：US06822738B1
公开(公告)日：2004-11-23
申请号：US10034800
申请日：2001-12-28
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N2100
CPC分类号： G01J3/447 , G01J3/0224 , G01J4/00 , G01J2003/2866 , G01N21/211
摘要： Disclosed is a spectroscopic Ellipsometer having pseudo-achromatic compensator(s) having fast axes which vary with wavelength and which provide, a range of retardations, (that is, maximum retardance minus minimum retardance), of less than 90 degrees over a range of wavelengths, said range of retardations being bounded by a minimum of preferably at least 30 degrees, to a maximum of less than 135 degrees. Calibration is achieved by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Various Dimensional Data Set(s) obtained with the Spectroscopic Ellipsometer configured in a Sample, present” or in a Straight-through” configuration, are variously normalized to D.C., A.C. or combination D.C. and A.C. components. Sample analysis using a detector provided intensity signal simultaneously comprising 2&ohgr; and 4&ohgr; signals simultaneously, and use of un-normalized A.C. and/or D.C. signals in reflectance monitoring are also disclosed.
摘要翻译：公开了一种光谱椭圆计，其具有伪波消除补偿器，其具有随波长变化的快轴，并且在波长范围内提供小于90度的延迟范围（即最大延迟减去最小延迟）所述延迟范围由最小至少30度的最小值限制到最大不超过135度。通过基于数学回归的技术实现校准，该技术涉及校准参数的参数化。使用配置在样品中的“或”直通“配置的样品中的光谱椭圆计数器获得的各种尺寸数据集被不同地归一化为D.C.，A.C.或组合D.C.和A.C.组分。还公开了使用检测器提供的同时包含2omega和4omega信号的强度信号的样本分析，并且还公开了在反射率监测中使用未归一化的交直流信号和/或直流信号。

39. 发明授权

US06456376B1 Rotating compensator ellipsometer system with spatial filter 有权
标题翻译：带空间滤波器的旋转补偿器椭偏仪系统
公开(公告)号：US06456376B1
公开(公告)日：2002-09-24
申请号：US09864840
申请日：2001-05-24
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
IPC分类号： G01J400
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/21 , G01N21/211 , G02B5/3058 , G02B5/3083 , G02B27/46
摘要： Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
摘要翻译：公开了在采样系统之前或之后在旋转补偿器椭偏仪系统中应用空间滤波器。目的是例如消除具有低强度水平不规则内容的大致任意轮廓波束的径向外环，使得使电磁波强度作为半径的函数快速衰减到零。

40. 发明授权

US06118537A Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭圆光度计和偏光计系统的多个倾斜的人造革板光学延迟器元件
公开(公告)号：US06118537A
公开(公告)日：2000-09-12
申请号：US223822
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01N21/21
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： Disclosed are retarder systems, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second Berek-type retarders which each present with first and second essentially parallel sides. The first and second Berek-type retarders are oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation. A system with similarly oriented third and fourth Berek-type retarders, sequentially placed after the first and second Berek-type retarders, is also disclosed.
摘要翻译：公开了用于在电磁辐射束的正交部件之间输入延迟的延迟器系统，其具有第一和第二Berek型延迟器，每个Berek型延迟器具有第一和第二基本平行的侧面。第一和第二Berek型延迟器从侧视图中被定向，其中一个Berek型延迟器的第一和第二侧面定向成不同于另一Berek型延迟器的第一和第二侧。在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转电磁辐射束。还公开了具有相似方向的第三和第四Berek型延迟器的系统，其顺序地放置在第一和第二Berek型延迟器之后。

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