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1. 发明授权

US07508510B2 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths 有权
标题翻译：在具有多个波长的样品基板上研究完全相同点的系统和方法
公开(公告)号：US07508510B2
公开(公告)日：2009-03-24
申请号：US11636786
申请日：2006-12-12
申请人： Galen L. Pfeiffer , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Christopher A. Goeden , Ping He , John A. Woollam , James D. Welch
发明人： Galen L. Pfeiffer , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Christopher A. Goeden , Ping He , John A. Woollam , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0289 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/213
摘要： System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzing data obtained at those wavelengths.
摘要翻译：使用在相对于样本的各个位置处以至少两个波长提供相同焦距的透镜系统来分析具有多个波长的基本上与其上的基本上完全相同的小点处的样本的系统和方法，包括分析获得的数据在那些波长。

2. 发明授权

US07057717B1 System for and method of investigating the exact same point on a sample substrate with at least two wavelengths 有权
标题翻译：用至少两个波长在样品基底上研究完全相同点的系统和方法
公开(公告)号：US07057717B1
公开(公告)日：2006-06-06
申请号：US10426590
申请日：2003-04-30
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01N21/00
CPC分类号： G02B13/146 , G01J3/0208 , G01N21/21 , G01N21/211
摘要： Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.
摘要翻译：公开了用至少两个波长或至少两个波长范围分析样品系统上基本上相同点的系统和方法，其中焦距不超过可接受量的波长变化。

3. 发明授权

US07522279B1 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths 有权
标题翻译：在具有多个波长的样品基板上研究完全相同点的系统和方法
公开(公告)号：US07522279B1
公开(公告)日：2009-04-21
申请号：US11447247
申请日：2006-06-05
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J3/02 , G01J3/0202 , G01J3/0205 , G01J3/0208 , G01J3/0235 , G01J3/0237 , G01N21/211 , G01N21/23 , G02B1/00 , G02B9/12 , G02B13/146
摘要： Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.
摘要翻译：公开了用至少两个波长或至少两个波长范围分析样品系统上基本上相同点的系统和方法，其中焦距不超过可接受量的波长变化。

4. 发明授权

US06930813B1 Spatial filter source beam conditioning in ellipsometer and the like systems 有权
标题翻译：椭偏仪等空间滤波器源光束调理系统
公开(公告)号：US06930813B1
公开(公告)日：2005-08-16
申请号：US10425801
申请日：2003-04-29
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , James D. Welch
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , James D. Welch
IPC分类号： G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46 , G02F1/00 , G01J3/28 , G01J3/50 , G01J4/00 , G02F1/33
CPC分类号： G01N21/211 , G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46
摘要： Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
摘要翻译：公开了在采样系统之前在椭偏仪等系统中应用空间滤波器和光束能均匀化系统。目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。

5. 发明授权

US07633625B1 Spectroscopic ellipsometer and polarimeter systems 有权
公开(公告)号：US07633625B1
公开(公告)日：2009-12-15
申请号：US11901225
申请日：2007-09-17
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
IPC分类号： G01B9/02 , G01J3/45 , G01J4/00
CPC分类号： G01J3/02 , G01J3/0213 , G01J3/0224 , G01J3/10 , G01N21/211 , G01N21/274 , G01N2021/213
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

6. 发明授权

US07616319B1 Spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：光谱椭偏仪和偏光计系统
公开(公告)号：US07616319B1
公开(公告)日：2009-11-10
申请号：US11890354
申请日：2007-08-05
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
IPC分类号： G01B9/02 , G01J3/45 , G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008 , G02B27/286
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译：具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于元素系统的位置和/或旋转。

7. 发明授权

US07304737B1 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence 有权
标题翻译：旋转或可旋转的补偿器系统以多个入射角对样品上的斑点提供畸变校正的电磁辐射
公开(公告)号：US07304737B1
公开(公告)日：2007-12-04
申请号：US11497920
申请日：2006-08-03
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/212 , G01N2021/213 , G01N2021/215
摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
摘要翻译：光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。

8. 发明授权

US06950182B1 Functional equivalent to spatial filter in ellipsometer and the like systems 有权
标题翻译：功能相当于椭圆仪等系统中的空间滤波器
公开(公告)号：US06950182B1
公开(公告)日：2005-09-27
申请号：US10178723
申请日：2002-06-24
申请人： Martin M Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
发明人： Martin M Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
IPC分类号： G01J4/00 , G01N21/00 , G01N21/21 , G01N21/55
CPC分类号： G01N21/55 , G01N21/211
摘要： Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
摘要翻译：公开了在椭偏仪等系统中应用空间滤波器的功能等同物。包括的是将电磁波聚焦到光纤上的多元件会聚透镜系统。目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。

9. 发明授权

US06804004B1 Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry 有权
标题翻译：用于透镜延迟，椭圆测量和偏振测量的参数化数学模型方程中参数的不相关评估的多元素透镜系统和方法
公开(公告)号：US06804004B1
公开(公告)日：2004-10-12
申请号：US09583229
申请日：2000-05-30
申请人： Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt
发明人： Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt
IPC分类号： G01B1106
CPC分类号： G01N21/211 , G01J3/14 , G01J3/447
摘要： Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.
摘要翻译：公开了多元素透镜，其在椭偏仪和偏光计系统中表现出减少的消色差焦距和降低的电磁光束光斑尺寸分散效应。还公开了用于评估参数化方程式中的参数的方法，该方法能够计算在电磁辐射束中输入到或之间的正交分量的延迟，所述正交分量被引导通过输入和/或输出光学元件并与材料系统相互作用的输入和输出光学元件，与材料系统进入的延迟基本上不相关。本发明的输入和/或输出聚焦透镜在光谱椭偏仪介导的对材料系统上的小斑点的调查中的应用发现，其中使电磁辐射束通过输入透镜会聚，与非常小的，色散的未分散的点相互作用区域，然后在进入检测器系统之前可选地通过输出透镜重新校准。本发明的方法在需要分离输入和/或输出光学元件聚焦透镜的双折射效应（可选地与存在于椭圆偏振仪系统中的光束引导和/或窗口元件）相关联的位置方面提供了益处，所述光学元件聚焦透镜相对于输入和/或输出len（es）以便椭圆不能与其区分开来，以得到表征椭圆偏振PSI和DELTA结果的材料系统。

10. 发明申请

US20110188040A1 Mounting for deviation angle self compensating substantially achromatic retarder 有权
标题翻译：安装偏移角自补偿基本上消色差延迟器
公开(公告)号：US20110188040A1
公开(公告)日：2011-08-04
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00 , G01J4/04
CPC分类号： G01J4/00 , G01J4/04
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。

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