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31. 发明申请

US20100266268A1 Multi-stage Optical Homogenization 有权
标题翻译：多级光学均匀化
公开(公告)号：US20100266268A1
公开(公告)日：2010-10-21
申请号：US12762351
申请日：2010-04-18
申请人： Dean C. Jennings , Timothy N. Thomas , Samuel C. Howells , Bruce E. Adams , Jiping Li
发明人： Dean C. Jennings , Timothy N. Thomas , Samuel C. Howells , Bruce E. Adams , Jiping Li
IPC分类号： H05B1/00 , G02B27/12 , G02F1/37
CPC分类号： H01L21/67115 , B23K26/0006 , B23K26/0622 , B23K26/0648 , B23K26/0652 , B23K26/12 , B23K26/125 , B23K26/127 , B23K26/352 , B23K26/354 , B23K2101/40 , B23K2103/56 , G02B27/0927 , G02B27/0961 , H01L21/02678 , H01L21/02686 , H01L21/268
摘要： Substrate processing equipment and methods are used to improve the uniformity of illumination across an illuminated portion of a substrate by processing light with multiple optical homogenizers. The multiple optical homogenizers each include micro-lens arrays and Fourier lens. The multiple optical homogenizers are arranged so that the output numerical aperture of one of the optical homogenizers is within 5% of the input numerical aperture of another optical homogenizer.
摘要翻译：基板处理设备和方法用于通过用多个光学均化器处理光线来改善衬底的照射部分上的照明的均匀性。多个光学均质器各自包括微透镜阵列和傅里叶透镜。多个光学均质器被布置成使得一个光学均质器的输出数值孔径在另一个光学均化器的输入数值孔径的5％内。

32. 发明授权

US07910499B2 Autofocus for high power laser diode based annealing system 有权
标题翻译：基于大功率激光二极管的退火系统的自动对焦
公开(公告)号：US07910499B2
公开(公告)日：2011-03-22
申请号：US11198660
申请日：2005-08-05
申请人： Dean Jennings , Timothy N. Thomas
发明人： Dean Jennings , Timothy N. Thomas
IPC分类号： H01L21/00
CPC分类号： H01L21/67115
摘要： Apparatus for thermally processing a substrate includes a source of laser radiation comprising a plurality diode lasers arranged along a slow axis, optics directing the laser radiation from the source to the substrate, and an array of photodetectors arranged along a fast axis perpendicular to the slow axis and receiving portions of the laser radiation reflected from the substrate through the optics.
摘要翻译：用于热处理衬底的设备包括激光辐射源，其包括沿着慢轴布置的多个二极管激光器，将激光辐射从源极引导到衬底的光学器件，以及沿着垂直于慢轴的快轴布置的光电检测器阵列以及接收通过光学器件从衬底反射的激光辐射的部分。

33. 发明申请

US20070221640A1 APPARATUS FOR THERMAL PROCESSING STRUCTURES FORMED ON A SUBSTRATE 审中-公开
标题翻译：在基材上形成的热处理结构的装置
公开(公告)号：US20070221640A1
公开(公告)日：2007-09-27
申请号：US11459852
申请日：2006-07-25
申请人： Dean Jennings , Alexander N. Lerner , Abhilash Mayur , Stephen Moffatt , Timothy N. Thomas
发明人： Dean Jennings , Alexander N. Lerner , Abhilash Mayur , Stephen Moffatt , Timothy N. Thomas
IPC分类号： B23K26/00
CPC分类号： H01L21/26506 , H01L21/26513 , H01L21/268 , H01L21/324 , H01L21/67115 , H01L21/823418 , H01L29/0653 , H01L29/6659 , H01L29/66659
摘要： The present invention generally describes one ore more apparatuses and various methods that are used to perform an annealing process on desired regions of a substrate. In one embodiment, an amount of energy is delivered to the surface of the substrate to preferentially melt certain desired regions of the substrate to remove unwanted damage created from prior processing steps (e.g., crystal damage from implant processes), more evenly distribute dopants in various regions of the substrate, and/or activate various regions of the substrate. The preferential melting processes will allow more uniform distribution of the dopants in the melted region, due to the increased diffusion rate and solubility of the dopant atoms in the molten region of the substrate. The creation of a melted region thus allows: 1) the dopant atoms to redistribute more uniformly, 2) defects created in prior processing steps to be removed, and 3) regions that have hyper-abrupt dopant concentrations to be formed.
摘要翻译：本发明通常描述了一种更多的装置和各种方法，用于对基底的期望区域进行退火处理。在一个实施例中，一定量的能量被传送到衬底的表面以优先地熔化衬底的某些所需区域以去除由先前的处理步骤（例如，从注入工艺引起的晶体损伤）所产生的不必要的损坏，更均匀地分布各种掺杂剂基底的区域和/或激活基底的各个区域。由于掺杂剂原子在衬底的熔融区域中的扩散速率和溶解度增加，优选熔融过程将允许掺杂剂在熔融区域中更均匀地分布。熔化区域的产生因此允许：1）掺杂剂原子更均匀地重新分布，2）在先前的待处理步骤中产生的缺陷，以及3）具有要突变的掺杂剂浓度的区域。

34. 发明申请

US20090015830A1 METHODS AND DEVICES FOR MEASURING A CONCENTRATED LIGHT BEAM 审中-公开
标题翻译：用于测量浓缩光束的方法和装置
公开(公告)号：US20090015830A1
公开(公告)日：2009-01-15
申请号：US12201251
申请日：2008-08-29
申请人： Timothy N. Thomas , Bruce Adams , Dean C. Jennings
发明人： Timothy N. Thomas , Bruce Adams , Dean C. Jennings
IPC分类号： G01J3/30
CPC分类号： G01J1/58 , G01J1/4257
摘要： Methods and devices are provided for profiling a beam of light that includes a wavelength λ. The beam of light is received. Secondary light is generated at a wavelength λ′ different from wavelength λ by fluorescing a material with the received beam of light. The secondary light is separated from the received beam of light. The separated secondary light is optically directed to a sensor.
摘要翻译：提供了用于对包括波长λ的光束进行成像的方法和装置。光束被接收。通过用接收的光束发射材料，在与波长λ不同的波长λ'处产生二次光。二次光从接收的光束分离。被分离的二次光被光学地指向传感器。

35. 发明申请

US20080002253A1 Combined illumination and imaging system 有权
标题翻译：组合照明和成像系统
公开(公告)号：US20080002253A1
公开(公告)日：2008-01-03
申请号：US11480133
申请日：2006-06-30
申请人： Dean C. Jennings , Timothy N. Thomas
发明人： Dean C. Jennings , Timothy N. Thomas
IPC分类号： G02B21/06
CPC分类号： G02B19/0057 , G02B19/0014 , G02B19/009 , G02B27/0955
摘要： An illumination system has a light source, an optical train, and a wavelength beam splitter. The optical train focuses light from the light source into a defined geometrical pattern on a surface. The wavelength beam splitter transmits light of a first wavelength and redirects light of a second wavelength. One of these wavelengths is included by the light from the light source, while the other is an emission wavelength generated by thermal excitation of the surface by the focused geometrical pattern.
摘要翻译：照明系统具有光源，光学列车和波长分束器。光学系列将来自光源的光聚焦到表面上限定的几何图案中。波长分束器透射第一波长的光并重定向第二波长的光。这些波长中的一个被来自光源的光包围，而另一个是通过聚焦几何图案的表面的热激发产生的发射波长。

36. 发明授权

US5383677A Bicycle body support apparatus 失效
标题翻译：自行车身体支撑装置
公开(公告)号：US5383677A
公开(公告)日：1995-01-24
申请号：US209272
申请日：1994-03-14
申请人： Timothy N. Thomas , Robert P. Schladetzky
发明人： Timothy N. Thomas , Robert P. Schladetzky
IPC分类号： B62J1/28 , B62J99/00 , B62K19/40
CPC分类号： B62J99/00 , B62J1/28 , B62J2099/0073
摘要： A body support mounted to a cross tube portion of an associated bicycle includes a mounting bracket pivotally mounting a seat assembly thereto, such that the seat assembly is pivoted to a displaced position during periods of non-use relative to the mounting bracket structure, with a lock sleeve cooperatively associated with the mounting bracket and support assembly and magnetically adhered to an abutment ring relative to the seat assembly to maintain latching of the seat assembly in an operative position relative to a rider of the bicycle.
摘要翻译：安装到相关联自行车的横管部分的主体支撑件包括安装支架，其将座椅组件枢转地安装到其上，使得座椅组件在不使用相对于安装支架结构的时段期间枢转到移动位置，其中锁定套筒与安装支架和支撑组件协作地相关联，并且相对于座椅组件磁性地粘附到邻接环上，以保持座椅组件相对于自行车骑手的操作位置的闩锁。

37. 发明申请

US20090045182A1 PULSED LASER ANNEAL SYSTEM ARCHITECTURE 有权
标题翻译：脉冲激光神经系统结构
公开(公告)号：US20090045182A1
公开(公告)日：2009-02-19
申请号：US11839436
申请日：2007-08-15
申请人： ALEXANDER N. LERNER , Timothy N. Thomas , Sundar Ramamurthy
发明人： ALEXANDER N. LERNER , Timothy N. Thomas , Sundar Ramamurthy
IPC分类号： B23K26/42 , B23K26/02
CPC分类号： H01L21/67109 , H01L21/6719 , H01L21/67201 , H01L21/67745 , H01L21/67748
摘要： Embodiments of the present invention provide method and apparatus for annealing semiconductor substrates. One embodiment of the present invention provides a semiconductor processing chamber comprising a first substrate support configured to support a substrate, a second substrate support configured to support a substrate, a shuttle coupled to the first substrate support and configured to move the first substrate support between a processing zone and a first loading zone, wherein the processing zone having a processing volume configured to alternately accommodating the first substrate support and the second substrate support.
摘要翻译：本发明的实施例提供了半导体衬底的退火方法和装置。本发明的一个实施例提供一种半导体处理室，其包括被配置为支撑基板的第一基板支撑件，被配置为支撑基板的第二基板支撑件，耦合到第一基板支撑件的梭子，并被配置成将第一基板支撑件处理区域和第一装载区域，其中所述处理区域具有被配置为交替地容纳所述第一衬底支撑件和所述第二衬底支撑件的处理容积。

38. 发明授权

US07440088B2 Methods and devices for measuring a concentrated light beam 失效
标题翻译：用于测量集中光束的方法和装置
公开(公告)号：US07440088B2
公开(公告)日：2008-10-21
申请号：US11261439
申请日：2005-10-28
申请人： Timothy N. Thomas , Bruce Adams , Dean C. Jennings
发明人： Timothy N. Thomas , Bruce Adams , Dean C. Jennings
IPC分类号： G01J1/00
CPC分类号： G01J1/58 , G01J1/4257
摘要： Methods and devices are provided for profiling a beam of light that includes a wavelength λ. The beam of light is received. Secondary light is generated at a wavelength λ′ different from wavelength λ by fluorescing a material with the received beam of light. The secondary light is separated from the received beam of light. The separated secondary light is optically directed to a sensor.
摘要翻译：提供了用于对包括波长λ的光束进行成像的方法和装置。光束被接收。通过用接收的光束发射材料，在与波长λ不同的波长λ'处产生二次光。二次光从接收的光束分离。被分离的二次光被光学地指向传感器。

39. 发明授权

US06997304B2 Accumulating conveyor 失效
标题翻译：累积输送机
公开(公告)号：US06997304B2
公开(公告)日：2006-02-14
申请号：US10744658
申请日：2003-12-23
申请人： Timothy N. Thomas , Bradley R. Carver
发明人： Timothy N. Thomas , Bradley R. Carver
IPC分类号： B65G37/00
CPC分类号： B65G35/06 , B65G17/002
摘要： A preferred embodiment of an accumulating conveyor system has at least one shoe slideably connected to an endless chain. Each shoe includes a pair of opposing rollers, one of which is engageable with the endless chain when the shoe is positioned adjacent an upper support member, and the other is engageable with the endless chain when the shoe is positioned adjacent a lower support member. The shoe further includes a transverse roller attached to a body of the shoe and engageable with the upper and lower support members. In another aspect of the present invention, a workpiece support may be detachably connected to two shoes positioned on opposite sides of the conveyor system to form a pallet. In yet another aspect of the present invention, two or more pallets may be connected together using an anti back-flex chain to form a pallet assembly.
摘要翻译：累积输送机系统的优选实施例具有至少一个可滑动地连接到环形链条的滑靴。每个鞋子包括一对相对的辊子，当鞋子邻近上部支撑构件定位时，其中一个可与环形链接合，另一个可在鞋子邻近下部支撑构件定位时与环形链接合。该鞋还包括一个连接到鞋体上的横向辊子，可与上部和下部支撑件接合。在本发明的另一方面，工件支撑件可以可拆卸地连接到位于输送机系统的相对侧上的两个鞋，以形成托盘。在本发明的另一方面，两个或多个托盘可以使用防反向挠性链连接在一起以形成托盘组件。

40. 发明授权

US06274830B1 Stop block with embedded proximity switch 失效
标题翻译：带嵌入式接近开关的停止块
公开(公告)号：US06274830B1
公开(公告)日：2001-08-14
申请号：US09513499
申请日：2000-02-25
申请人： Timothy N. Thomas
发明人： Timothy N. Thomas
IPC分类号： H01H316
CPC分类号： H01H9/02 , H01H3/16
摘要： An improved stop block assembled to NAAMS™ specifications for providing a locating device for a movable member. The stop block has at least one crowned end for positioning to face the movable member and to accurately stop the movable member when the movable member comes in contact with the stop block. The improved stop block includes a proximity switch installed within the stop block for sensing when the movable member contacts the stop block. The improved stop block may also include an actuating device communicating with the proximity switch for sending a signal to a controlling device.
摘要翻译：改进的止动块组装成NAAMS TM规范，用于提供可动构件的定位装置。止动块具有至少一个凸起端，用于定位以面对可动构件，并且当可动构件与止动块接触时精确地阻止可动构件。改进的止动块包括安装在止动块内的接近开关，用于在可动构件接触止动块时感测。改进的止挡块还可以包括与接近开关通信的致动装置，用于向控制装置发送信号。

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