会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 38. 发明申请
    • Large substrate test system
    • 大基板测试系统
    • US20060022694A1
    • 2006-02-02
    • US10901936
    • 2004-07-29
    • Matthias BrunnerShinichi KuritaWendell BloniganEdgar Kehrberg
    • Matthias BrunnerShinichi KuritaWendell BloniganEdgar Kehrberg
    • G01R31/26
    • H01J37/185G01R31/2886H01J2237/204
    • A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.
    • 提供了用于测试一个或多个大基板的方法和系统。 在一个或多个实施例中,系统包括具有设置在其中的衬底台的测试室。 衬底台适于在各个方向上移动测试室内的衬底。 更具体地,衬底台包括可在第一方向上移动的第一阶段和沿第二方向移动的第二阶段,其中每个阶段沿X方向,Y方向或X方向和Y方向两者移动。 该系统还包括至少部分地设置在测试室下方的负载锁定室和耦合到负载锁定室和测试室的传送室。 在一个或多个实施例中,传送室包括设置在其中的机器人,其适于在载荷锁定室和测试室之间传送基板。