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1. 发明申请

US20060022694A1 Large substrate test system 失效
标题翻译：大基板测试系统
公开(公告)号：US20060022694A1
公开(公告)日：2006-02-02
申请号：US10901936
申请日：2004-07-29
申请人： Matthias Brunner , Shinichi Kurita , Wendell Blonigan , Edgar Kehrberg
发明人： Matthias Brunner , Shinichi Kurita , Wendell Blonigan , Edgar Kehrberg
IPC分类号： G01R31/26
CPC分类号： H01J37/185 , G01R31/2886 , H01J2237/204
摘要： A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.
摘要翻译：提供了用于测试一个或多个大基板的方法和系统。在一个或多个实施例中，系统包括具有设置在其中的衬底台的测试室。衬底台适于在各个方向上移动测试室内的衬底。更具体地，衬底台包括可在第一方向上移动的第一阶段和沿第二方向移动的第二阶段，其中每个阶段沿X方向，Y方向或X方向和Y方向两者移动。该系统还包括至少部分地设置在测试室下方的负载锁定室和耦合到负载锁定室和测试室的传送室。在一个或多个实施例中，传送室包括设置在其中的机器人，其适于在载荷锁定室和测试室之间传送基板。

2. 发明授权

US07075323B2 Large substrate test system 失效
公开(公告)号：US07075323B2
公开(公告)日：2006-07-11
申请号：US10901936
申请日：2004-07-29
申请人： Matthias Brunner , Shinichi Kurita , Wendell T. Blonigan , Edgar Kehrberg
发明人： Matthias Brunner , Shinichi Kurita , Wendell T. Blonigan , Edgar Kehrberg
IPC分类号： G01R31/26
CPC分类号： H01J37/185 , G01R31/2886 , H01J2237/204
摘要： A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.

3. 发明授权

US07372250B2 Methods and apparatus for determining a position of a substrate relative to a support stage 失效
标题翻译：用于确定衬底相对于支撑台的位置的方法和装置
公开(公告)号：US07372250B2
公开(公告)日：2008-05-13
申请号：US10782503
申请日：2004-02-19
申请人： Shinichi Kurita , Emanuel Beer , Edgar Kehrberg , Matthias Brunner
发明人： Shinichi Kurita , Emanuel Beer , Edgar Kehrberg , Matthias Brunner
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： H01L21/67265 , G03F7/707 , G03F7/70716 , G03F7/70775 , G03F7/70791 , G03F9/7011
摘要： A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.
摘要翻译：感测系统包括围绕适于支撑衬底的平台间隔设置的多个探针。每个探针包括适于从已知起始位置移动到由所述载物台支撑的所述基底的边缘的检测部分; 在衬底由载物台支撑的同时检测衬底的边缘; 在所述检测之后产生检测信号; 并且在所述检测之后停止移动到基板的边缘。控制器可以基于每个检测部分的已知开始位置并且基于由每个检测部分生成的检测信号来确定基板相对于载物台的边缘位置。提供了许多其他方面。

4. 发明授权

US07129694B2 Large substrate test system 失效
公开(公告)号：US07129694B2
公开(公告)日：2006-10-31
申请号：US10155796
申请日：2002-05-23
申请人： Matthias Brunner , Shinichi Kurita , Wendell T. Blonigan , Edgar Kehrberg
发明人： Matthias Brunner , Shinichi Kurita , Wendell T. Blonigan , Edgar Kehrberg
IPC分类号： G01R31/28
CPC分类号： H01L21/67748 , G01R31/01 , H01L21/67288 , H01L21/682
摘要： A system and method for testing substrates is generally provided. In one embodiment, a test system for testing a substrate includes a load lock chamber, a transfer chamber and a test station. The load lock chamber and the test station are disposed on top of one another and coupled to the transfer chamber. The transfer chamber includes a robot adapted to transfer a substrate between the load lock chamber, which is at a first elevation, and the test station, which is at a second elevation. In another embodiment, a test station is provided having a turntable adapted to rotate the substrate. The turntable enables the range of motion required to test the substrate to be substantially reduced while facilitating full test and/or inspection of the substrate.

5. 发明申请

US20100327162A1 IN-LINE ELECTRON BEAM TEST SYSTEM 有权
标题翻译：在线电子束测试系统
公开(公告)号：US20100327162A1
公开(公告)日：2010-12-30
申请号：US12826635
申请日：2010-06-29
申请人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01N23/00
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

6. 发明授权

US07319335B2 Configurable prober for TFT LCD array testing 有权
标题翻译：用于TFT LCD阵列测试的可配置探头
公开(公告)号：US07319335B2
公开(公告)日：2008-01-15
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/305
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。

7. 发明申请

US20080061807A1 Configurable Prober for TFT LCD Array Test 有权
标题翻译：用于TFT LCD阵列测试的可配置探头
公开(公告)号：US20080061807A1
公开(公告)日：2008-03-13
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/02
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译：描述了一种在基板上测试电子器件的方法。该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

8. 发明申请

US20050179452A1 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US20050179452A1
公开(公告)日：2005-08-18
申请号：US10903216
申请日：2004-07-30
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

9. 发明授权

US07973546B2 In-line electron beam test system 有权
标题翻译：在线电子束测试系统
公开(公告)号：US07973546B2
公开(公告)日：2011-07-05
申请号：US12826635
申请日：2010-06-29
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/302 , G01R31/305
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the method includes transferring a substrate on an end effector relative to a testing platform having a plurality of testing columns coupled thereto, the substrate having a plurality of electronic devices located thereon, and moving the substrate in a single directional axis relative to an optical axis of each of the plurality of testing columns, the single directional axis being substantially orthogonal to the optical axis to define a test area on the substrate, wherein the test area is configured to cover an entire length or an entire width of the substrate such that the testing columns are capable of testing the entire substrate as the substrate is moved through the test area.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子设备的方法。在一个实施例中，所述方法包括相对于具有耦合到其上的多个测试柱的测试平台在端部执行器上传送衬底，所述衬底具有位于其上的多个电子器件，并且相对于所述多个测试列中的每一个的光轴，所述单方向轴基本上垂直于所述光轴，以在所述衬底上限定测试区域，其中所述测试区域被配置为覆盖所述衬底的整个长度或整个宽度使得当衬底移动通过测试区域时，测试柱能够测试整个衬底。

10. 发明授权

US07847566B2 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US07847566B2
公开(公告)日：2010-12-07
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译：描述了一种在基板上测试电子器件的方法。该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

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