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1. 发明授权

US4985681A Particle beam measuring method for non-contact testing of interconnect networks 失效
标题翻译：用于互连网络非接触测试的粒子束测量方法
公开(公告)号：US4985681A
公开(公告)日：1991-01-15
申请号：US813875
申请日：1985-12-27
申请人： Matthias Brunner , Juergen Frosien , Reinhold Schmitt , Burkhard Lischke
发明人： Matthias Brunner , Juergen Frosien , Reinhold Schmitt , Burkhard Lischke
IPC分类号： G01N23/225 , G01R31/02 , G01R31/302 , G01R31/305 , H01L21/66
CPC分类号： G01R31/024 , G01R31/305
摘要： For testing an interconnect network for shorts and interruptions, a point of the network to be tested is charged with a particle beam. Subsequently, a potential at least one further contact point is read with the same particle beam and an unaltered primary energy. An identification of potential occurs by documenting the secondary electrons triggered at the contact points. In order to avoid a disturbing change of potential during the measuring phase, the measuring time is only a fraction of the time for charging the network.
摘要翻译：为了测试短路和中断的互连网络，要测试的网络的一点充满了粒子束。随后，用相同的粒子束和未改变的一次能量读取潜在的至少一个另外的接触点。通过记录在接触点处触发的二次电子来发生电位的识别。为了避免测量阶段电位的干扰变化，测量时间只是网络充电时间的一小部分。

2. 发明授权

US5268638A Method for particle beam testing of substrates for liquid crystal displays "LCD" 失效
标题翻译：液晶显示器基板的粒子束测试方法“LCD”
公开(公告)号：US5268638A
公开(公告)日：1993-12-07
申请号：US882657
申请日：1992-05-13
申请人： Matthias Brunner , Reinhold Schmitt
发明人： Matthias Brunner , Reinhold Schmitt
IPC分类号： G01R31/02 , G01R31/302 , G01R31/305 , G01R31/308 , G02F1/136 , G02F1/1362 , G02F1/1368 , G09F9/35 , G09G3/18 , G01R31/00
CPC分类号： G01R31/305 , G01R31/302 , G01R31/308 , G02F2001/136254
摘要： Method for particle beam testing of substrates for liquid crystal displays (LCD). This invention is directed to methods wherein, given a substrate (SUB1) for a liquid crystal display, either potentials or, respectively, currents are set in defined fashion with a particle beam (S1, S2 and S4) and/or potentials are measured by detecting secondary electrons (S5) at different switch statuses of the switch elements (T) of the substrate (SUB1). The geometrical integrity and the electrical functionability of the substrate (SUB1) are thereby tested, even though, for example, a supplementary plane electrode is not present for forming a capacitor. An important advantage of the method is that faulty substrates can be repaired or can be segregated even before further-processing and, thus, costs can be reduced.
摘要翻译：液晶显示器（LCD）基板的粒子束测试方法。本发明涉及一种方法，其中给定用于液晶显示器的衬底（SUB1），电势或电流分别以粒子束（S1，S2和S4）定义为电流，和/或电位通过在衬底（SUB1）的开关元件（T）的不同开关状态下检测二次电子（S5）。因此，即使例如辅助平面电极不存在用于形成电容器，也可以测试基板（SUB1）的几何完整性和电功能性。该方法的一个重要优点是，即使在进一步处理之前，有缺陷的基板可以被修复或者可以被分离，因此可以降低成本。

3. 发明授权

US5371459A Method for particle beam testing of substrates for liquid crystal displays using parasitic currents 失效
标题翻译：使用寄生电流的液晶显示器的基板的粒子束测试方法
公开(公告)号：US5371459A
公开(公告)日：1994-12-06
申请号：US123261
申请日：1993-09-20
申请人： Matthias Brunner , Reinhold Schmitt
发明人： Matthias Brunner , Reinhold Schmitt
IPC分类号： G01R31/02 , G01R31/302 , G01R31/305 , G01R31/308 , G02F1/136 , G02F1/1362 , G02F1/1368 , G09F9/35 , G09G3/18 , G01R31/00
CPC分类号： G01R31/305 , G01R31/302 , G01R31/308 , G02F2001/136254
摘要： Method for particle beam testing of substrates for liquid crystal displays (LCD). This is directed to methods wherein, given a substrate (SUB1) for a liquid crystal display, either potentials or, respectively, currents are set in defined fashion with a particle beam (S1, S2 and S4) and/or potentials are measured by detecting secondary electrons (S5) at different switch statuses of the switch elements (T) of the substrate (SUB1). The geometrical integrity and the electrical functionability of the substrate (SUB1) are thereby tested, even though, for example, a supplementary plane electrode is not present for forming a capacitor. An important advantage of the method is that faulty substrates can be repaired or can be segregated even before further-processing and, thus, costs can be reduced.
摘要翻译：液晶显示器（LCD）基板的粒子束测试方法。这涉及以下方法：其中，给定用于液晶显示器的衬底（SUB1），电势或电流分别以粒子束（S1，S2和S4）的形式设定，和/或电位通过检测在基板（SUB1）的开关元件（T）的不同开关状态下的二次电子（S5）。因此，即使例如辅助平面电极不存在用于形成电容器，也可以测试基板（SUB1）的几何完整性和电功能性。该方法的一个重要优点是，即使在进一步处理之前，有缺陷的基板可以被修复或者可以被分离，因此可以降低成本。

4. 发明授权

US4748407A Method and apparatus for measuring time dependent signals with a particle probe 失效
标题翻译：用粒子探针测量时间依赖信号的方法和装置
公开(公告)号：US4748407A
公开(公告)日：1988-05-31
申请号：US16696
申请日：1987-01-28
申请人： Matthias Brunner , Reinhold Schmitt , Dieter Winkler
发明人： Matthias Brunner , Reinhold Schmitt , Dieter Winkler
IPC分类号： H01L21/66 , G01N23/225 , G01Q30/02 , G01R31/26 , G01R31/302 , G01R31/305 , H01J37/28 , H01J49/44 , G01R31/28
CPC分类号： G01R31/305
摘要： To measure high frequency signal curves at nodes and interconnections of integrated circuits and achieve a good chronological resolution in accordance with the sampling method, extremely short primary electron pulses are used. For such extremely short pulse widths obtainable with beam blanking systems, only individual statistically appearing secondary electrons are registered per pulse, these electrons generating current pulses having different amplitudes and different time behaviors at the output of an energy analyzer. It is proposed that the number of current pulses occurring at the output of the energy analyzer within a prescribed time interval be identified and the quotient, or ratio, thereof, be kept constant with the assistance of a feedback circuit for connection to the voltage of a retarding field electrode. The feedback circuit includes a pulse counter, a digital-to-analog converter, and a spectrometer drive.
摘要翻译：为了测量集成电路的节点和互连的高频信号曲线，并根据采样方法实现良好的时间分辨率，使用极短的一次电子脉冲。对于通过光束消隐系统可获得的这种极短的脉冲宽度，每个脉冲仅记录每个统计学显示的二次电子，这些电子在能量分析仪的输出处产生具有不同幅度和不同时间行为的电流脉冲。提出在规定的时间间隔内在能量分析器的输出处出现的电流脉冲数被识别，并且在一个反馈电路的辅助下，商或其比率被保持恒定，以连接到延迟场电极。反馈电路包括脉冲计数器，数模转换器和光谱仪驱动器。

5. 发明授权

US5414374A Method for particle beam testing of substrates for liquid crystal displays (LCD) 失效
标题翻译：液晶显示器（LCD）基板的粒子束测试方法
公开(公告)号：US5414374A
公开(公告)日：1995-05-09
申请号：US123218
申请日：1993-09-20
申请人： Matthias Brunner , Reinhold Schmitt
发明人： Matthias Brunner , Reinhold Schmitt
IPC分类号： G01R31/02 , G01R31/302 , G01R31/305 , G01R31/308 , G02F1/136 , G02F1/1362 , G02F1/1368 , G09F9/35 , G09G3/18 , G01R31/00
CPC分类号： G01R31/305 , G01R31/302 , G01R31/308 , G02F2001/136254
摘要： Method for particle beam testing of substrates for liquid crystal displays (LCD). This is directed to methods wherein, given a substrate (SUB1) for a liquid crystal display, either potentials or, respectively, currents are set in defined fashion with a particle beam (S1, S2 and S4) and/or potentials are measured by detecting secondary electrons (S5) at different switch statuses of the switch elements (T) of the substrate (SUB1). The geometrical integrity and the electrical functionability of the substrate (SUB1) are thereby tested, even though, for example, a supplementary plane electrode is not present for forming a capacitor. An important advantage of the method is that faulty substrates can be repaired or can be segregated even before further-processing and, thus, costs can be reduced.
摘要翻译：液晶显示器（LCD）基板的粒子束测试方法。这涉及以下方法：其中，给定用于液晶显示器的衬底（SUB1），电势或电流分别以粒子束（S1，S2和S4）的形式设定，和/或电位通过检测在基板（SUB1）的开关元件（T）的不同开关状态下的二次电子（S5）。因此，即使例如辅助平面电极不存在用于形成电容器，也可以测试基板（SUB1）的几何完整性和电功能性。该方法的一个重要优点是，即使在进一步处理之前，有缺陷的基板可以被修复或者可以被分离，因此可以降低成本。

6. 发明授权

US08115506B2 Localization of driver failures within liquid crystal displays 有权
标题翻译：液晶显示器内部驱动器故障的定位
公开(公告)号：US08115506B2
公开(公告)日：2012-02-14
申请号：US12119821
申请日：2008-05-13
申请人： Matthias Brunner
发明人： Matthias Brunner
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G09G3/3648
摘要： Methods and apparatus for determining whether a malfunctioning pixel in a large area substrate, such as a liquid crystal display (LCD) panel, is due to the pixel itself or to the driver circuit for that pixel and for localizing any driver circuit defects are provided. In an effort to localize the driver circuit defects, test pads coupled to the input and/or output of certain driver circuits may be fabricated on the substrate. The voltage or charge of these test pads may be detected using any suitable sensing device, such as an electron beam, an electro-optical sensor, or an electrode in close proximity to the surface of the pixels and/or drivers capacitively coupled to the pixel or driver. For some embodiments, the defective driver circuits may be repaired in the same area as the test area or may be transported via conveyor or robot to a separate repair station.
摘要翻译：提供了用于确定诸如液晶显示器（LCD）面板的大面积基板中的故障像素是由于像素本身还是由于该像素的驱动器电路以及用于定位任何驱动器电路缺陷的方法和装置。为了定位驱动器电路缺陷，可以在衬底上制造耦合到某些驱动器电路的输入和/或输出的测试焊盘。这些测试焊盘的电压或电荷可以使用任何合适的感测装置来检测，例如电子束，电光传感器或靠近像素表面的电极和/或与电容耦合到像素的驱动器或司机。对于一些实施例，有缺陷的驱动器电路可以在与测试区域相同的区域中修复，或者可以经由输送机或机器人被传送到单独的维修站。

7. 发明申请

US20100327162A1 IN-LINE ELECTRON BEAM TEST SYSTEM 有权
标题翻译：在线电子束测试系统
公开(公告)号：US20100327162A1
公开(公告)日：2010-12-30
申请号：US12826635
申请日：2010-06-29
申请人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01N23/00
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

8. 发明申请

US20090179656A1 LIGHT-ASSISTED TESTING OF AN OPTOELECTRONIC MODULE 有权
标题翻译：光电模块的光辅助测试
公开(公告)号：US20090179656A1
公开(公告)日：2009-07-16
申请号：US12296055
申请日：2007-04-04
申请人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
发明人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/305 , G01N23/225 , G01N21/88
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译：本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

9. 发明授权

US07372250B2 Methods and apparatus for determining a position of a substrate relative to a support stage 失效
标题翻译：用于确定衬底相对于支撑台的位置的方法和装置
公开(公告)号：US07372250B2
公开(公告)日：2008-05-13
申请号：US10782503
申请日：2004-02-19
申请人： Shinichi Kurita , Emanuel Beer , Edgar Kehrberg , Matthias Brunner
发明人： Shinichi Kurita , Emanuel Beer , Edgar Kehrberg , Matthias Brunner
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： H01L21/67265 , G03F7/707 , G03F7/70716 , G03F7/70775 , G03F7/70791 , G03F9/7011
摘要： A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.
摘要翻译：感测系统包括围绕适于支撑衬底的平台间隔设置的多个探针。每个探针包括适于从已知起始位置移动到由所述载物台支撑的所述基底的边缘的检测部分; 在衬底由载物台支撑的同时检测衬底的边缘; 在所述检测之后产生检测信号; 并且在所述检测之后停止移动到基板的边缘。控制器可以基于每个检测部分的已知开始位置并且基于由每个检测部分生成的检测信号来确定基板相对于载物台的边缘位置。提供了许多其他方面。

10. 发明授权

US07319335B2 Configurable prober for TFT LCD array testing 有权
标题翻译：用于TFT LCD阵列测试的可配置探头
公开(公告)号：US07319335B2
公开(公告)日：2008-01-15
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/305
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。

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