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    • 35. 发明授权
    • Exposure method and apparatus, and semiconductor device manufactured using the method
    • 曝光方法和装置,以及使用该方法制造的半导体器件
    • US06236447B1
    • 2001-05-22
    • US09141141
    • 1998-08-27
    • Yuichi YamadaAtsushi Kawahara
    • Yuichi YamadaAtsushi Kawahara
    • G03B2742
    • G03F9/7034G03F9/7046
    • An exposure method for exposing a surface to be exposed via a projection optical system after a substrate moves stepwise in a direction perpendicular to an optical axis of the projection optical system to feed to a predetermined exposure position a plurality of shots on the substrate, in turn, in which at least one of a position and tilt of the surface to be exposed of a fed shot to be exposed in the direction of the optical axis is measured during the stepwise movement, and the surface to be exposed is brought to a position of a focal plane of the projection optical system on the basis of a measurement value. The method includes a step of obtaining, in advance, a focus offset as a measurement error resulting from different measurement points for the measurement during the stepwise movement and a deformation of a main body structure, in each shot, and a step of bringing the surface to be exposed for the shot to be exposed to the position of the focal plane on the basis of a correction result of the measurement, in each shot to be exposed, using the focus offset, in an exposure sequence.
    • 一种曝光方法,用于在基板沿着与投影光学系统的光轴垂直的方向上逐步移动之后经由投影光学系统曝光待曝光的表面,从而在基板上进行多次投射到预定的曝光位置 其中在逐步运动期间测量要沿着光轴方向暴露的馈送镜头要暴露的表面的位置和倾斜中的至少一个,并且待曝光的表面被带到 基于测量值的投影光学系统的焦平面。 该方法包括以下步骤:预先获得作为在逐次移动期间的测量的不同测量点和每个镜头中的主体结构的变形产生的测量误差的聚焦偏移,以及使表面 根据测量的校正结果,在曝光顺序中使用焦点偏移的每个要被曝光的镜头中的曝光曝光到焦平面的位置。
    • 37. 发明授权
    • Image-scanning apparatus
    • 图像扫描装置
    • US4639787A
    • 1987-01-27
    • US647422
    • 1984-09-05
    • Masaki IsogaiAtsushi Kawahara
    • Masaki IsogaiAtsushi Kawahara
    • H04N1/04G06T1/00H04N1/00H04N1/10H04N1/19H04N1/193H04N1/38H04N1/40H04N1/407H04N5/253H04N5/238
    • H04N1/1021H04N1/1013H04N1/1043H04N1/40056H04N1/4072H04N1/193H04N2201/0404H04N2201/0416
    • An image scanning apparatus for making picture signals has an optical system for forming an image of an object on a predetermined plane and means for scanning the object image by a light-receiving surface disposed on the predetermined plane and generating an output indicative of the light intensity distribution of the object image on the plane. The apparatus comprising first driving means for moving the scanning means relative to the object image, second driving means for moving the scanning means relative to the object image in response to the completion of movement of the scanning means by the first driving means, means for controlling the exposure of the light-receiving surface of the scanning means during the movement of the scanning means by the second driving means in accordance with the output of the scanning means generated during the movement thereof by the first driving means; and means for processing the output of the scanning means generated during the movement thereof by the second driving means into a picture signal corresponding to the object image in accordance with the output of the scanning means generated during the movement thereof by the first driving means.
    • 用于制作图像信号的图像扫描装置具有用于在预定平面上形成物体的图像的光学系统和用于通过设置在预定平面上的受光面来扫描物体图像的装置,并且产生指示光强度的输出 物体图像在飞机上的分布。 该装置包括用于相对于物体图像移动扫描装置的第一驱动装置,用于响应于由第一驱动装置完成扫描装置的移动而使扫描装置相对于物体图像移动的第二驱动装置,用于控制 根据由第一驱动装置移动期间产生的扫描装置的输出,通过第二驱动装置在扫描装置移动期间扫描装置的光接收表面的曝光; 以及用于根据在其由第一驱动装置移动期间产生的扫描装置的输出,将由第二驱动装置移动期间产生的扫描装置的输出处理成对应于对象图像的图像信号的装置。
    • 38. 发明授权
    • Focus detecting apparatus for microscope or camera
    • 用于显微镜或相机的聚焦检测装置
    • US4587416A
    • 1986-05-06
    • US508166
    • 1983-06-27
    • Koichi KudoHidehiro OgawaAtsushi Kawahara
    • Koichi KudoHidehiro OgawaAtsushi Kawahara
    • G03B13/36G02B7/38G03B3/10
    • G03B3/10
    • A focus detecting apparatus having an optical device movable to cause the light from an object to be imaged on a predetermined plane and comparing the different imaged conditions of the light from the object on the predetermined plane comprises a light intensity distribution detecting device for detecting the distribution of the intensity of light on the predetermined plane and putting out a detection signal indicative of the distribution of the intensity of light on the predetermined plane, a device for taking out a high frequency component from the detection signal, a device for rectifying the taken out high frequency component, a device for forming the envelope of the rectified high frequency component, a device for integrating the envelope at any time and putting out an integrated value, and a focus detecting device for detecting, on the basis of the integrated value of the envelope, the amount of movement necessary for the imaging optical device to cause the light from the object to be imaged on the predetermined plane.
    • 一种聚焦检测装置,其具有可移动以使来自物体的光在预定平面上成像的光学装置,并且与来自预定平面上的物体的光的不同成像条件进行比较,包括用于检测分布的光强度分布检测装置 在预定平面上的光的强度,并且将表示在预定平面上的光强度的分布的检测信号,从检测信号中取出高频分量的装置,用于整流取出的装置 高频分量的装置,用于形成整流高频分量的包络的装置,用于在任何时间对包络进行积分并提供积分值的装置,以及聚焦检测装置,用于根据 包络,成像光学装置使来自物体的光所需的移动量 以在预定平面上成像。
    • 39. 发明授权
    • Solid-state area imaging apparatus
    • 固态区域成像装置
    • US4566037A
    • 1986-01-21
    • US451599
    • 1982-12-20
    • Norihiko TakatsuAtsushi KawaharaMasaki Isogai
    • Norihiko TakatsuAtsushi KawaharaMasaki Isogai
    • H01L27/148H04N5/335H04N5/341H04N5/3725H04N5/3728C08J7/10
    • H01L27/14831
    • There is disclosed a solid-state area imaging apparatus suitable for photographing a still picture. The apparatus comprises a plurality of vertical transfer electrodes and a pair of horizontal read CCDs, and the vertical transfer electrodes are vertically continuously arranged such that each electrode alternately crosses vertically adjoining two of a plurality of imaginary horizontal scanning lines thereby providing a plurality of photosensitive elements distributed in a checkered pattern on the imaging surface of the apparatus. This distribution of the photosensitive elements has the effect of applying the video signal to all the horizontal scanning lines. Thus, by using the existing integrated circuit technique, it is possible to realize a solid-state area imaging apparatus whose vertical resolution of reproduced still pictures is two times the vertical resolution obtained previously.
    • 公开了一种适用于拍摄静止图像的固态成像装置。 该装置包括多个垂直传送电极和一对水平读取CCD,并且垂直传输电极垂直连续地布置,使得每个电极交替地跨越多个虚拟水平扫描线的垂直相邻的两个,从而提供多个感光元件 分布在装置的成像表面上的方格图案中。 感光元件的这种分布具有将视频信号施加到所有水平扫描线的效果。 因此,通过使用现有的集成电路技术,可以实现其再现静止图像的垂直分辨率是先前获得的垂直分辨率的两倍的固态区域成像装置。