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31. 发明申请

US20150262811A1 METHOD AND SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE 审中-公开
标题翻译：清洁半导体衬底的方法和系统
公开(公告)号：US20150262811A1
公开(公告)日：2015-09-17
申请号：US14423270
申请日：2013-08-19
申请人： YUICHI OGAWA , HARUYOSHI YAMAKAWA
发明人： Yuichi Ogawa , Haruyoshi Yamakawa
IPC分类号： H01L21/02 , B08B3/10 , C25F1/00
CPC分类号： H01L21/02068 , B08B3/10 , B08B3/102 , C11D3/3947 , C11D11/0047 , C11D11/0064 , C25B1/285 , C25B15/08 , C25F1/00 , H01L21/28088 , H01L21/32134 , H01L21/67017
摘要： A cleaning method including a persulphuric acid producing step of causing a cleaning sulfuric acid solution to travel into an electrolyzing section and to circulate therethrough to produce persulphuric acid having a predetermined concentration by electrolysis in the electrolyzing section, a solution mixing step of mixing the sulfuric acid solution containing the persulphuric acid produced in the persulphuric acid producing step with a halide solution containing one or more types of halide ion without causing the solutions to travel into the electrolyzing section to produce a mixed solution having a post-mixture concentration of oxidant including the persulphuric acid that ranges from 0.001 to 2 mol/L, a heating step of heating the mixed solution, and a cleaning step of cleaning a semiconductor substrate by transporting the heated mixed solution to cause the heated mixed solution to come into contact with the semiconductor substrate.
摘要翻译：一种清洗方法，其特征在于，包括使硫酸溶液进入电解部并进行循环的硫酸生产工序，在所述电解部中通过电解生成具有规定浓度的过硫酸的溶液混合工序;将所述硫酸在含有一种或多种卤化物离子的卤化物溶液中含有在过硫酸生产步骤中产生的过硫酸的溶液，而不会使溶液进入电解部分，以产生具有包含硫化氢的氧化剂的后期浓度的混合溶液酸，范围为0.001〜2mol / L，加热混合溶液的加热步骤，以及通过输送加热的混合溶液以使加热的混合溶液与半导体基板接触来清洁半导体基板的清洗步骤。

32. 发明授权

US08916048B2 Water treatment method and method for producing ultrapure water 有权
标题翻译：水处理方法及超纯水生产方法
公开(公告)号：US08916048B2
公开(公告)日：2014-12-23
申请号：US13579749
申请日：2011-02-28
申请人： Nobukazu Arai , Nozomu Ikuno
发明人： Nobukazu Arai , Nozomu Ikuno
IPC分类号： C02F9/04 , C02F3/02 , C02F1/76 , C02F1/50 , C02F3/00 , C02F3/06 , C02F9/00
CPC分类号： C02F1/50 , C02F1/32 , C02F1/42 , C02F1/444 , C02F1/445 , C02F1/52 , C02F1/76 , C02F3/00 , C02F3/02 , C02F3/06 , C02F3/106 , C02F3/107 , C02F9/00 , C02F2101/38 , C02F2103/04 , C02F2103/06 , Y02W10/15 , Y10S210/90
摘要： A water treatment method and a method for producing ultrapure water are provided in which urea in raw water is sufficiently decomposed, and an organism (bacterial cells) in biological treatment is prevented from flowing downstream. In a water treatment method for performing biological treatment of raw water containing urea, a carbon source is added to the raw water, and the raw water is then supplied to biological treatment means 1 and 2 having a fixed bed formed of an organism-supporting carrier to perform the biological treatment. The biological treatment after the addition of the carbon source to the raw water improves the efficiency of decomposition and removal of urea. The biological treatment means using a fixed bed formed of an organism-supporting carrier decreases the number of bacterial cells flowing downstream.
摘要翻译：提供了一种水处理方法和超纯水的制造方法，其中原水中的尿素被充分分解，并且防止生物处理中的生物体（细菌细胞）向下游流动。在对含有尿素的原水进行生物处理的水处理方法中，向原水中添加碳源，然后将原水供给具有由生物体支持载体形成的固定床的生物处理装置1和2 进行生物处理。将碳源添加到原水中后的生物处理提高了尿素的分解和除去效率。使用由生物体载体载体形成的固定床的生物处理意味着减少下游流动的细菌细胞的数量。

33. 发明申请

US20140029924A1 LIQUID HEATING METHOD, LIQUID HEATING APPARATUS, AND HEATED LIQUID SUPPLYING APPARATUS 有权
标题翻译：液体加热方法，液体加热装置和加热液体供应装置
公开(公告)号：US20140029924A1
公开(公告)日：2014-01-30
申请号：US14007026
申请日：2012-02-24
申请人： Minoru Uchida
发明人： Minoru Uchida
IPC分类号： F24H1/12 , F24H9/20
CPC分类号： F24H1/121 , B08B2203/007 , F24H9/2028 , H01L21/67017
摘要： A liquid heating method and apparatus including a heat device 7 having a flow passage member forming a tubular flow passage for passing a sulfuric acid solution, a heater arranged on an outside of at least one of opposing flow passage surfaces of the tubular flow passage, a liquid draining line 10, an atmosphere opening line 12, valves 11 and 13, a liquid draining mechanism for draining the sulfuric acid solution heated at least in a heat receiving area between the opposing liquid flow passage surfaces of the tubular flow passage, a flow meter 6 for measuring a flow rate of the sulfuric acid solution, and a control unit 14 responsive to the flow meter 6 for determining a defective liquid flow in the tubular flow passage and for draining the sulfuric acid solution using the liquid draining mechanism.
摘要翻译：一种液体加热方法和装置，包括：加热装置7，其具有形成用于使硫酸溶液通过的管状流动通道的流动通道构件;布置在管状流动通道的至少一个相对流动通道表面的外侧的加热器，液体排放管线10，大气开放管线12，阀门11和13，用于排出至少在管状流动通道的相对液体流动通道表面之间的受热区域中加热的硫酸溶液的排液机构，流量计 6，用于测量硫酸溶液的流量;以及控制单元14，其响应于流量计6，用于确定管状流动通道中的有缺陷的液体流动并且使用液体排出机构排出硫酸溶液。

34. 发明授权

US08409735B2 Microbial power generation method and microbial power generation device 有权
标题翻译：微生物发电方法和微生物发电装置
公开(公告)号：US08409735B2
公开(公告)日：2013-04-02
申请号：US12998423
申请日：2009-10-09
申请人： Tetsuro Fukase , Nobuhiro Orita
发明人： Tetsuro Fukase , Nobuhiro Orita
IPC分类号： H01M8/16 , H01M8/04
CPC分类号： H01M8/16 , Y02E60/527
摘要： Power generation efficiency of a microbial power generation device is improved by a simple and inexpensive means. Two plate-shaped cation-exchange membranes 31 are disposed parallel to each other in a tank body 30, whereby a negative electrode chamber 32 is formed between the cation-exchange membranes 31. Two positive electrode chambers 33 are each formed so as to be separated from the negative electrode chamber 32 by the corresponding cation-exchange membrane 31. An oxygen-containing gas is passed through the positive electrode chamber 33, a negative electrode solution L is supplied to the negative electrode chamber, and preferably the negative electrode solution is circulated. An acid gas (carbon dioxide gas) is introduced into the oxygen-containing gas to be supplied to the positive electrode chamber 33. Movement of Na+ and K+ ions is promoted by the pH neutralization effect produced by the acid gas, and thereby power generation efficiency can be improved.
摘要翻译：微生物发电装置的发电效率通过简单且廉价的方式得到改善。两个板状阳离子交换膜31在罐体30中彼此平行地设置，由此在阳离子交换膜31之间形成负极室32.两个正极室33分别形成为分离从负极室32通过相应的阳离子交换膜31.含氧气体通过正极室33，将负极溶液L供给到负极室，优选负极溶液循环。将酸性气体（二氧化碳气体）引入到供给到正极室33的含氧气体中。通过由酸性气体产生的pH中和作用促进Na +和K +离子的移动，从而发电效率可以改进。

35. 发明申请

US20120298570A1 FILTRATION APPARATUS AND WATER TREATMENT APPARATUS 审中-公开
标题翻译：过滤设备和水处理设备
公开(公告)号：US20120298570A1
公开(公告)日：2012-11-29
申请号：US13577442
申请日：2011-03-28
申请人： Masanobu Osawa , Keijirou Tada , Shigeru Sato
发明人： Masanobu Osawa , Keijirou Tada , Shigeru Sato
IPC分类号： B01D29/07 , B01D29/66 , C02F1/52 , C02F1/44 , B01D36/02
CPC分类号： C02F1/001 , B01D25/24 , B01D61/025 , B01D61/04 , B01D61/08 , B01D63/10 , B01D65/02 , B01D2311/04 , B01D2311/06 , B01D2313/143 , B01D2313/40 , B01D2313/90 , B01D2321/04 , C02F1/283 , C02F1/441 , C02F1/52 , C02F1/5209 , C02F2201/003 , C02F2301/08 , C02F2303/16 , C02F2303/20 , B01D2311/2649 , B01D2311/2642 , B01D2311/2619 , B01D2311/2692
摘要： A filtration apparatus 10, includes: a filter body 4 formed by spirally winding a sheet-shaped member; and a filtration tank 1 through which water to be treated is passed, and into which the filter body 4 is charged such that the axis of the filter body 4 extends along the direction of water passage, wherein the sheet-shaped member is composed of a sheet-shaped mesh sheet 5 having holes through which the water to be treated passes, and a sheet-shaped spacer 6 through which the water to be treated passes with difficulty as compared with the mesh sheet 5, the sheet surfaces of the mesh sheet 5 and the spacer 6 being superposed on each other.
摘要翻译：过滤装置10包括：通过螺旋卷绕片状构件而形成的过滤体4; 以及过滤槽1，待处理水通过该过滤槽1，过滤体4的轴线沿着水通道的方向延伸，过滤器主体4的轴线沿着水通道的方向延伸，其中，片状部件由片状网眼片5具有通过其的被处理水的孔和与网片5相比难以处理的待处理水的片状间隔件6，网眼片5的片材表面并且间隔件6彼此重叠。

36. 发明申请

US20120291806A1 CLEANING SYSTEM AND CLEANING METHOD 有权
标题翻译：清洁系统和清洁方法
公开(公告)号：US20120291806A1
公开(公告)日：2012-11-22
申请号：US13575042
申请日：2011-05-26
申请人： Minoru Uchida , Toru Otsu
发明人： Minoru Uchida , Toru Otsu
IPC分类号： B08B3/00 , B08B7/04
CPC分类号： H01L21/31133 , C25B1/285 , C25B9/08 , H01L21/67017
摘要： Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.The system comprises: an electrolytic part for electrolyzing a sulfuric acid solution to produce peroxosulfuric acid; a first reservoir for storing the sulfuric acid solution; a circulation line for circulating the sulfuric acid solution between the electrolytic part and the first reservoir; a cleaning apparatus for cleaning a cleaning object by use of the sulfuric acid solution containing peroxosulfuric acid; a supply line for sending the sulfuric acid solution electrolyzed in the electrolytic part to the cleaning apparatus; a heating part for heating the sulfuric acid solution to be used in the cleaning apparatus, the heating part being interposed in the supply line on the upstream side of the cleaning apparatus; and a second reservoir which is interposed in the supply line on the upstream side of the heating part. Since the second reservoir and the heating parts are positioned spatially above the level of the first reservoir, the electrolytic part and the circulation line, the device can be disposed with good space efficiency while preventing application of a high fluid pressure to the heating part or the like.
摘要翻译：提供一种能够提供含有过硫酸的硫酸溶液的系统和方法，即使在诸如清洁室的安装受限的空间中也可以用于清洁，同时抑制诸如快速加热器的加热部件中的流体压力。该系统包括：用于电解硫酸溶液以产生过氧硫酸的电解部分; 用于存储硫酸溶液的第一储存器; 用于使硫酸溶液在电解部分和第一储存器之间循环的循环管线; 用于使用含有过硫酸的硫酸溶液清洗清洁物体的清洁装置; 用于将电解部分中电解的硫酸溶液送至清洗装置的供给管线; 用于加热清洗装置中使用的硫酸溶液的加热部分，加热部分插入清洁装置的上游侧的供给管线中; 以及第二储存器，其被插入在所述加热部的上游侧的供给管线中。由于第二储存器和加热部件位于空间上位于第一储存器，电解部分和循环管线的高度之上，所以可以以良好的空间效率设置装置，同时防止对加热部件施加高流体压力或喜欢。

37. 发明申请

US20120241377A1 WATER TREATMENT METHOD AND WATER TREATMENT FLOCCULANT 有权
标题翻译：水处理方法和水处理絮凝剂
公开(公告)号：US20120241377A1
公开(公告)日：2012-09-27
申请号：US13389171
申请日：2010-08-05
申请人： Yasuhiro Ooi , Keijirou Tada , Yukio Abe , Takeshi Iizuka , Satoru Kitano
发明人： Yasuhiro Ooi , Keijirou Tada , Yukio Abe , Takeshi Iizuka , Satoru Kitano
IPC分类号： C02F1/54 , C08L61/14 , C02F1/44
CPC分类号： C02F1/56 , C02F1/44 , C02F1/441 , C02F9/00 , C08G8/04 , C08L61/06
摘要： There is provided a water treatment method using a water treatment flocculant that suffers from minimal secondary contamination with flocculation residues and contains an alkaline solution of a phenolic resin. A water treatment method involving the addition of a flocculant to water to be treated and subsequent membrane separation treatment. The flocculant contains an alkaline solution of a phenolic resin having a melting point in the range of 130° C. to 220° C. The water treatment flocculant is produced by a resole-type second-order reaction in the presence of an alkaline catalyst in which an aldehyde is added to an alkali solution of a novolak phenolic resin. The novolak phenolic resin is produced by a reaction between a phenol and an aldehyde in the presence of an acid catalyst.
摘要翻译：提供了一种使用水处理絮凝剂的水处理方法，该絮凝剂受到絮凝残余物的最小二次污染并含有酚醛树脂的碱性溶液。一种水处理方法，包括将絮凝剂加入待处理的水和随后的膜分离处理。絮凝剂含有熔点在130℃至220℃范围内的酚醛树脂的碱性溶液。水处理絮凝剂是在碱性催化剂存在下通过甲阶酚醛二级反应将醛加入到酚醛清漆酚醛树脂的碱溶液中。酚醛清漆酚醛树脂是在酸催化剂存在下通过苯酚和醛之间的反应制备的。

38. 发明授权

US08273502B2 Direct methanol fuel cell system using solid methanol, portable electronic device using same, and fuel cartridge for direct methanol fuel cell system 失效
标题翻译：使用固体甲醇的直接甲醇燃料电池系统，使用其的便携式电子设备，以及用于直接甲醇燃料电池系统的燃料盒
公开(公告)号：US08273502B2
公开(公告)日：2012-09-25
申请号：US12450400
申请日：2008-03-25
申请人： Mitsuru Nozue
发明人： Mitsuru Nozue
IPC分类号： H01M8/04
CPC分类号： H01M8/1011 , H01M8/04208 , H01M2008/1095 , H01M2250/30 , Y02B90/18 , Y02E60/523
摘要： A fuel cartridge has a pair of flat faces in which holes are formed. A net is stretched within the holes, and solid methanol is packed inside the fuel cartridge. A fuel cell unit, shaped as a flat box, comprises a pair of flat wall portions, a pair of long-side wall portions, and a pair of short-side wall portions. Each flat wall portion is provided with two MEAs-4, as fuel cells that are arranged so that the fuel electrodes (not shown) face inward. One of the long-side wall portions has an opening provided with, on the edge thereof, an elastic packing serving as a sealing member. An opening and closing lid is pivotably provided to the opening by a pivot as a pivot member. The resulting reduced size methanol fuel cell system has sufficient air-tightness and good power generation efficiency, and is simple in structure.
摘要翻译：燃料盒具有一对形成有孔的平面。网孔在孔内拉伸，固体甲醇包装在燃料盒内。形成为扁平盒的燃料电池单元包括一对平壁部分，一对长边壁部分和一对短边壁部分。每个平壁部分设置有两个MEA-4，作为燃料电池被布置成使得燃料电极（未示出）面向内。一个长边壁部分具有在其边缘上设置有用作密封构件的弹性填料的开口。打开和关闭盖通过作为枢转构件的枢轴可枢转地设置到开口。所得到的甲醇缩小的甲醇燃料电池系统具有足够的气密性和良好的发电效率，结构简单。

39. 发明申请

US20120228233A1 APPARATUS AND METHOD FOR FLUID MIXING 审中-公开
标题翻译：流体混合的装置和方法
公开(公告)号：US20120228233A1
公开(公告)日：2012-09-13
申请号：US13395804
申请日：2010-09-16
申请人： Mitsuharu Terashima , Hideaki Iino
发明人： Mitsuharu Terashima , Hideaki Iino
IPC分类号： B01F5/06 , C02F1/52
CPC分类号： B01F3/1228 , B01F5/0611 , B01F15/00019 , B01F15/00123 , B01F15/00162
摘要： There is provided an apparatus and method for fluid mixing, which enable mixing efficiency to be enhanced and enable a lodging impurity to be easily removed. A liquid, powder, or the like is added from a pipe 2 to a liquid flowing in a pipe 1, and the resultant liquid then passes a plurality of half-open ball valves 3A to 3C, thereby being mixed. The ball valves 3A to 3C each have angular difference θ in the position around the axis thereof. Sufficient mixing can be performed without preparing a static mixer having a complicated structure. In addition, in the case where clogging due to an impurity occurs, the valve is opened with the result that the impurity can be released.
摘要翻译：提供了一种用于流体混合的装置和方法，其能够提高混合效率，并且能够容易地去除倒伏杂质。从管2向管1内流动的液体添加液体，粉末等，然后使所得液体通过多个半开式球阀3A〜3C，从而混合。球阀3A〜3C各自具有角度差异; 在其轴线的位置。可以在不制备具有复杂结构的静态混合器的情况下进行足够的混合。此外，在由于杂质发生堵塞的情况下，阀打开，结果可以释放杂质。

40. 发明申请

US20120172273A1 WAFER WASHING WATER AND WAFER WASHING METHOD 审中-公开
标题翻译： WAFER洗衣水和WAFER洗衣方法
公开(公告)号：US20120172273A1
公开(公告)日：2012-07-05
申请号：US13496366
申请日：2010-09-28
申请人： Tetsuo Mizuniwa , Shigeyuki Hoshi
发明人： Tetsuo Mizuniwa , Shigeyuki Hoshi
IPC分类号： C11D7/60
CPC分类号： H01L21/02052
摘要： The invention provides a wafer washing technique which does not require complicated operations and by which a wafer is washed with ultrapure water through relatively simple operations without contaminating the wafer surface with metals even if the ultrapure water contains metal ions on the ng/L (ppt) level. Wafer washing water includes ultrapure water to which a substance having an affinity for metal ions has been added. A wafer washing method uses this wafer washing water. A substance that exhibits an affinity for metal ions is added beforehand to wafer washing ultrapure water. As a result, the substance captures metal ions present in the ultrapure water and stabilizes them in water, thereby effectively preventing the metal ions from migrating toward the wafer surface and becoming attached to the wafer surface during washing.
摘要翻译：本发明提供一种不需要复杂操作的晶片清洗技术，即使超纯水在ng / L（ppt）上含有金属离子，通过相对简单的操作也可以用超纯水洗涤晶片，而不会金属污染晶片表面，水平。晶片洗涤水包括已经添加了对金属离子具有亲和性的物质的超纯水。晶圆洗涤方法使用该晶片洗涤水。向金属离子表现出亲和性的物质预先加入到晶圆洗涤超纯水中。结果，该物质捕获超纯水中存在的金属离子并将其稳定在水中，从而有效地防止金属离子向晶片表面迁移并在洗涤期间附着于晶片表面。

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