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    • 39. 发明授权
    • Illumination optical system and laser processor having the same
    • 照明光学系统和激光处理器相同
    • US06894839B2
    • 2005-05-17
    • US10081975
    • 2002-02-22
    • Yoshikazu SugiyamaMiyuki MasakiTakehito Yagi
    • Yoshikazu SugiyamaMiyuki MasakiTakehito Yagi
    • G03F7/20G02B1/12G02B27/10
    • G02B1/12
    • An illumination optical system has superior image formation capabilities, and can radiate a linear beam with excellent illumination uniformity and a narrow line width having a large aspect ratio; the illumination optical system comprises an afocal beam expander system which expands an beam illuminated from a laser light source; a linear beam-forming lens system having at least refractive power in a second direction which is substantially at a right angle to at least a first direction, the linear beam-forming lens system converting the beam, illuminated from said beam expander system, to a linear beam having its long side in said first direction; a lens array section having a plurality of element lenses, arranged along said first direction; and a condenser optical system which illuminates a processed face by reconnecting images of said linear beam from each of said element lenses thereon.
    • 照明光学系统具有优异的图像形成能力,并且可以辐射具有优异照明均匀性的线性束和具有大纵横比的窄线宽度; 该照明光学系统包括一个放大从激光光源照射的光束的无焦束扩束器系统; 线性波束成形透镜系统,其至少在第二方向上具有与至少第一方向成直角的折射力,所述线性波束成形透镜系统将从所述光束扩展器系统照射的光束转换成 线性光束在所述第一方向上具有长边; 具有沿着所述第一方向布置的多个元件透镜的透镜阵列部分; 以及聚光器光学系统,其通过从其中的每个所述元件透镜重新连接所述线性光束的图像照亮经处理的面。