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    • 25. 发明申请
    • DISCHARGE IONIZATION CURRENT DETECTOR
    • 放电电流检测器
    • US20130221972A1
    • 2013-08-29
    • US13777585
    • 2013-02-26
    • SHIMADZU CORPORATION
    • Shinji Uchiyama
    • G01N27/66
    • G01N27/66
    • A discharge ionization current detector is provided with a dielectric tube through which plasma generating gas flows, a plasma generating unit formed from one section of the dielectric tube in a flow direction of the plasma generating gas, a casing connected to a lower end portion, in the flow direction of the plasma generating gas, of the dielectric tube, a sample ionization unit provided inside the casing, and an ion current detection unit for detecting a sample component ionized by the sample ionization unit. The lower end, in the flow direction of the plasma generating gas, of the dielectric tube protrudes into the space inside the casing.
    • 放电电离电流检测器设置有等离子体产生气体流过的电介质管,等离子体产生单元,其在等离子体产生气体的流动方向上由介电管的一个部分形成,外壳连接到下端部, 电介质管的等离子体发生气体的流动方向,设置在壳体内的样品离子化单元和用于检测由样品电离单元离子化的样品成分的离子电流检测单元。 电介质管的等离子体产生气体的流动方向的下端突出到壳体内的空间内。
    • 26. 发明授权
    • Detection and suppression of electrical arcing
    • 检测和抑制电弧
    • US07292045B2
    • 2007-11-06
    • US11149896
    • 2005-06-10
    • Suhail AnwarRemegio ManacioChung-Hee ParkDong-Kil YimSoo Young Choi
    • Suhail AnwarRemegio ManacioChung-Hee ParkDong-Kil YimSoo Young Choi
    • G01R31/08G01N27/66
    • G01R31/1254
    • Method and apparatus for detecting or suppressing electrical arcing or other abnormal change in the electrical impedance of a load connected to a power source. Preferably the load is a plasma chamber used for manufacturing electronic components such as semiconductors and flat panel displays. Arcing is detected by monitoring one or more sensors. Each sensor either responds to a characteristic of the electrical power being supplied by an electrical power source to the plasma or is coupled to the plasma chamber so as to respond to an electromagnetic condition within the chamber. Arcing is suppressed by reducing the power output for a brief period. Then the power source increases its power output, preferably to its original value. If the arcing resumes, the power source repeats the steps of reducing and then restoring the power output.
    • 用于检测或抑制连接到电源的负载的电阻抗的电弧或其他异常变化的方法和装置。 优选地,负载是用于制造诸如半导体和平板显示器的电子部件的等离子体室。 通过监视一个或多个传感器来检测电弧。 每个传感器或者响应于由电源提供给等离子体的电力的特性,或者耦合到等离子体室,以便对室内的电磁条件作出响应。 通过在短时间内减少功率输出来抑制电弧。 然后电源增加其功率输出,最好提高到其原始值。 如果电弧恢复,则电源重复减少然后恢复功率输出的步骤。
    • 28. 发明授权
    • Photo-ionization detector for detecting volatile organic gases
    • 用于检测挥发性有机气体的光电离检测器
    • US5393979A
    • 1995-02-28
    • US61418
    • 1993-05-12
    • Peter C. Hsi
    • Peter C. Hsi
    • G01N27/66G01N33/00
    • G01N27/66
    • A photo-ionization detector utilizes an ultraviolet (UV) lamp for detecting and measuring the concentration of volatile gases flowing between closely spaced parallel electrodes. One of the electrodes is made of mesh to allow photons to pass into the space between the electrodes to ionize the volatile gases between the electrodes. The detector also incorporates an improved ionization chamber. In other embodiments, a plurality of gas discharge lamps, each generating a different photon energy, may be placed adjacent to a plurality of closely spaced electrodes, all electrodes in one ionization chamber, to detect and measure different types of volatile gases that may exist.
    • 光电离检测器利用紫外(UV)灯来检测和测量在紧密间隔的平行电极之间流动的挥发性气体的浓度。 电极中的一个由网状物制成,以允许光子进入电极之间的空间,以电离电极之间的挥发性气体。 检测器还包含改进的电离室。 在其它实施例中,每个产生不同光子能量的多个气体放电灯可以放置在与多个紧密隔开的电极(一个电离室中的所有电极)附近,以检测和测量可能存在的不同类型的挥发性气体。
    • 29. 发明授权
    • Automatically regulated combustion process
    • 自动调节燃烧过程
    • US4959010A
    • 1990-09-25
    • US642346
    • 1984-08-20
    • Heinz BurtscherAndreas Schmidt-OttHans-Christoph Siegmann
    • Heinz BurtscherAndreas Schmidt-OttHans-Christoph Siegmann
    • F02D41/14F23N5/00F23N5/24G01N27/66
    • F23N5/006G01N27/66
    • In a combustion process a fuel is mixed with an oxygen-containing gas in an adjustable ratio. This fuel-gas-mixture is burned and thereby an exhaust gas is produced. At least a part of the exhaust gas is collected and exposed to an ultra violet radiation source, thereby generating positive and negative charge carriers in the exhaust gas by means of a photoelectric charge separation process. The kind or amount of the positive and/or negative charge carriers is detected to produce a measurement value which reflects the amount and/or the charge of the carriers. Therefrom a control signal is derived and the mixture-ratio of the oxygen-containing gas and the fuel, the so-called .lambda.-factor, is adjusted in response to said control signal in order to improve the efficiency of the combustion and to reduce the emission of toxic substances.
    • 在燃烧过程中,燃料与可调节比例的含氧气体混合。 该燃料气体混合物燃烧,从而产生废气。 废气的至少一部分被收集并暴露于紫外线辐射源,从而通过光电荷分离过程在废气中产生正负电荷载体。 检测正和/或负电荷载体的种类或量,以产生反映载流子的量和/或电荷的测量值。 从控制信号得到,并且响应于所述控制信号调节含氧气体和燃料(所谓的λ-因子)的混合比,以提高燃烧效率并减少 排放有毒物质。